JP3129080B2 - Method of manufacturing ink ejecting apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink jet apparatus.

[0002]

2. Description of the Related Art The non-impact type printing apparatus which has been replacing the conventional impact type printing apparatus and is now expanding its market greatly is the simplest in principle and has a multi-gradation and color printing. For example, an ink-jet type printing apparatus can be used. Above all, a drop that ejects only ink drops used for printing
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Among them, the former is difficult to miniaturize, and the latter requires a heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A new method for simultaneously solving the above-mentioned defects has been proposed in Japanese Patent Application Laid-Open No. 63-247051.
JP-A-63-252750 and JP-A-Hei 2
This is a shear mode type using piezoelectric ceramics disclosed in JP-A-150355.

Hereinafter, the structure of the conventional example will be specifically described with reference to FIG. A piezoelectric ceramic plate 2 having a plurality of grooves 15 (FIG. 7) and side walls 11 separating the grooves 15 and having been subjected to a polarization treatment in the direction of arrow 6 and a cover plate 3 made of a ceramic material are made of an epoxy-based material. The actuator section 1 is formed by bonding via a bonding layer 4 made of an adhesive or the like, and the groove 15 (FIG. 7) becomes a plurality of ink liquid chambers 12 spaced from each other in the lateral direction. The ink liquid chamber 12 has an elongated shape with a rectangular cross section, and the side wall 11 extends over the entire length of the ink liquid chamber 12. Electrodes 13 for applying a driving electric field are formed on both surfaces from the upper portion of the side wall 11 near the adhesive layer 4 to the center of the side wall 11.

Next, the operation of the conventional example will be described with reference to FIG. 6B which shows a cross-sectional view of the actuator section 1 of the ink ejecting apparatus. In the ink ejecting apparatus, for example, when the ink liquid chamber 12b is selected according to desired print data, a positive drive voltage is applied to the electrodes 13d and 13e,
c and 13f are grounded. As a result, a driving electric field in the direction of arrow 14b is applied to the side wall 11b, and an arrow 14 is applied to the side wall 11c.
A driving electric field in the direction of c acts. At this time, since the driving electric field directions 14b and 14c are orthogonal to the polarization direction 6,
The side walls 11b and 11c are deformed outward from the ink liquid chamber 12b by the piezoelectric sliding effect. Due to this deformation, the volume of the ink liquid chamber 12b increases, the ink pressure in the ink liquid chamber 12b decreases, and ink is supplied from the ink supply port 21 (FIG. 7) into the ink liquid chamber 12b through the manifold 22 (FIG. 7). You. When the application of the driving voltage is stopped, the side walls 11b and 11c are moved to the positions before deformation (FIG. 6).
(Refer to (a)), the ink pressure in the ink liquid chamber 12b rapidly increases, and a pressure wave is generated.
Ink droplets are ejected from a nozzle 32 (FIG. 7) communicating with b.

In the conventional example, since ink droplets cannot be simultaneously ejected from two nozzles communicating with two adjacent ink liquid chambers, for example, a nozzle 32 (communicating with an odd-numbered ink liquid chamber 12 from the left end) ( After the ink droplets are ejected from FIG. 7), the ink droplets are ejected from the nozzles 32 (FIG. 7) communicating with the even-numbered ink liquid chambers 12, and then the ink droplets are ejected again from the odd-numbered ink chambers. Next, the ink liquid chambers 12 are divided into a plurality of groups to eject ink droplets.

Next, FIG. 7 is a perspective view of an ink ejecting apparatus.
The configuration and manufacturing method of the conventional example will be described. A groove 15 for forming the ink liquid chamber 12 having the above-described shape is formed in the polarized piezoelectric ceramic plate 2 by cutting using a thin disk-shaped diamond blade or the like. The groove 15 is a parallel groove having the same depth over substantially the entire area of the piezoelectric ceramic plate 2, but is formed so as to gradually become shallower as approaching the end face 17, and to become a shallow parallel shallow groove 18 near the end face 17. This groove 15 and the shallow groove 1
The electrode 13 is formed on the inner surface of the substrate 8 by sputtering or the like. On the inner surface of the groove 15, the electrode 13 is formed only on the upper half of the side surface. On the inner surface of the shallow groove 18, the electrode 13 is formed on the entire side surface and bottom surface. Further, the ink inlet 21 and the manifold 22 are formed on the cover plate 3 made of a ceramic material by grinding or cutting.

Next, the groove 1 of the piezoelectric ceramic plate 2
5 The processing side and the manifold 22 processing side of the cover plate 3 are adhered to each other with an epoxy adhesive or the like such that the respective grooves 15 form the ink liquid chambers 12, thereby producing the actuator section 1. . Next, a nozzle plate 31 provided with nozzles 32 at positions corresponding to the positions of the respective ink liquid chambers 12 is bonded to the end faces 16 of the piezoelectric ceramic plate 2 and the cover plate 3. A substrate 41 provided with a conductive layer pattern 42 at a position corresponding to the position of each ink liquid chamber 12 is formed on the surface of the piezoelectric ceramic plate 2 on the side opposite to the groove 15 processing side with an epoxy-based adhesive or the like. Glue. The electrode 13 on the bottom of the shallow groove 18
The conductive layer 43 is connected to the conductive layer pattern 42 by a known wire bonding.

Next, the configuration of a conventional control unit will be described with reference to FIG. 8 showing a block diagram of the control unit. The conductive layer patterns 42 provided on the substrate 41 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54, and the ground line 55 are also connected to the LSI chip 51. The LSI chip 51 converts the data appearing on the data line 53 based on the continuous clock pulse supplied from the clock line 52 from
It is determined from which nozzle 32 the ink droplet should be ejected. Then, the LSI chip 51 is provided with a conductive layer pattern 42 electrically connected to the electrode 13 in the ink liquid chamber 12 to be driven.
Then, the voltage V of the voltage line 54 is applied, and the ground line 55 is connected to the pattern 42 of the conductive layer that is electrically connected to the electrode 13 other than the ink liquid chamber 12 to be grounded.

Next, the configuration and operation of a conventional example will be described with reference to FIG. 9 which shows a perspective view of a printer. The actuator section 1 and the nozzle plate 31 have the configuration and operation described with reference to FIGS. The actuator section 1 is fixed on a carriage 62, and the ink supply tube 63 communicates with the ink supply port 21 (FIG. 7).
(FIG. 8) is built in the carriage 62, and the flexible cable 64 corresponds to the clock line 52, the data line 53, the voltage line 54, and the ground line 55 shown in FIG. The carriage 62 reciprocates along the slider 66 in the direction of arrow 65 over the entire width of the recording paper 71,
The actuator unit 1 ejects ink droplets from the nozzles 32 (FIG. 7) provided on the nozzle plate 31 to the recording paper 71 held by the platen roller 72 while the carriage 62 is moving, and the recording paper 71 A drop of ink is deposited on top.

The recording paper 71 is stationary when the actuator unit 1 is ejecting ink droplets, but the paper feed rollers 73 and 74 each time the carriage 62 reciprocates.
Is transferred by a fixed amount in the direction of arrow 75. As a result, the actuator unit 1 can form desired characters and images on the entire surface of the recording paper 71.

[0013]

However, in the ink jetting apparatus having the above-described structure, the nozzle plate 31 having the nozzles 32 is attached to the actuator section 1 with an adhesive so that the nozzles 32 correspond to the ink liquid chambers 12. Since the adhesive is adhered, an excess amount of the adhesive flows into the nozzle 32 at the time of adhesion, which affects the flying direction of the ink droplet, or blocks the nozzle 32 so that the ink droplet is not ejected. There was a danger of doing. In addition, the nozzle 32
Since the size and pitch of the ink liquid chambers 12 are extremely small, an image processing device is required to bond the nozzle plate 31 and the actuator unit 1 at positions where the nozzles 32 and the ink liquid chambers 12 correspond to each other. The cost is increased because an expensive positioning device with a camera is required.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a method of manufacturing an ink ejecting apparatus which reduces manufacturing costs and does not cause an adhesive to flow into a nozzle. I do.

[0015]

In order to achieve the above object, according to the present invention, there is provided a nozzle plate having a plurality of ink chambers filled with ink and a nozzle communicating with the ink chamber. Adhering the nozzle plate having no nozzle formed thereon to a nozzle plate auxiliary member provided with a communication hole communicating with the plurality of ink liquid chambers, the method comprising: Irradiating the nozzle plate with laser light through the communication hole of the auxiliary member to form a nozzle on the nozzle plate; and joining the communication hole of the nozzle plate auxiliary member and the ink liquid chamber so as to communicate with each other. And characterized by the following.

According to a second aspect of the present invention, the size of the opening of the communication hole formed in the nozzle plate auxiliary member on the ink liquid chamber side is smaller than the size of the ink liquid chamber.

According to a third aspect of the present invention, the communication hole formed in the nozzle plate auxiliary member has a larger opening on a side communicating with the ink liquid chamber than on a side communicating with the nozzle. And

According to a fourth aspect of the present invention, the nozzle plate auxiliary member serves as a laser beam mask.

According to a fifth aspect of the present invention, there is provided an ink ejecting apparatus comprising: a head portion provided with a plurality of ink liquid chambers to be filled with ink; and a nozzle plate formed with nozzles communicating with the ink liquid chambers of the head portion. In the manufacturing method, the step of bonding the nozzle plate having no nozzle to the opening surface of the ink liquid chamber of the head portion, and cutting the nozzle plate so as to be substantially orthogonal to the ink liquid chamber of the head portion. Processing a nozzle plate auxiliary member to which the nozzle plate is adhered, and an actuator member that generates energy for ejecting ink; and laser light is applied to the nozzle plate through the ink liquid chamber of the nozzle plate auxiliary member. Irradiating the nozzle plate with a nozzle to form a nozzle, and the ink liquid chamber of the nozzle plate auxiliary member. An ink liquid chamber of said actuator member, characterized in that comprising the step of bonding so as to communicate.

[0020]

In the method for manufacturing an ink jet apparatus according to the first aspect of the present invention having the above structure, the nozzle is not formed in the nozzle plate auxiliary member provided with the communication hole communicating with the plurality of ink liquid chambers. After the nozzle plate is adhered, the nozzle plate is irradiated with laser light through the communication hole of the nozzle plate auxiliary member, and the nozzle plate is processed with a nozzle. By joining the chambers so as to communicate with each other, an ink ejecting apparatus in which the adhesive does not enter the nozzles is manufactured.

According to a fifth aspect of the invention, there is provided a method of manufacturing an ink jet apparatus, wherein the nozzle plate on which a nozzle is not formed is adhered to an opening surface of the ink liquid chamber of the head, and the head is attached to the ink liquid chamber. By being cut so as to be substantially orthogonal, the nozzle plate auxiliary member to which the nozzle plate is bonded and the actuator member that generates energy for ejecting ink are processed. Then, after the nozzle plate is irradiated with laser light through the ink liquid chamber of the nozzle plate auxiliary member to form a nozzle on the nozzle plate, the ink liquid chamber of the nozzle plate auxiliary member and the actuator member Is joined so as to communicate with the ink liquid chamber of the first embodiment, whereby an ink ejecting apparatus in which the adhesive does not enter the nozzle is manufactured.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. The same members as those in the conventional example are denoted by the same reference numerals, and description thereof will be omitted.

FIG. 1 is a perspective view of an ink ejecting apparatus.
The configuration of one embodiment of the present invention will be specifically described.

As shown in FIG. 1, the actuator section 101 of the ink ejecting apparatus includes a piezoelectric ceramic plate 10.
2 and a cover plate 103.

The piezoelectric ceramic plate 102
The piezoelectric ceramic plate 102 is formed of a lead zirconate titanate (PZT) ceramic material, and is cut into a plurality of grooves 1 by a diamond blade or the like.
15 are formed. The side wall 111 serving as the side surface of the groove 115 is polarized in the direction of the arrow 106. The grooves 115 are of the same depth and are parallel. The depth of the grooves 115 depends on the piezoelectric ceramic plate 10.
2 gradually becomes shallower as it approaches one end face 117,
A shallow groove 118 is formed. On the inner surface of the groove 115, electrodes 113 are formed on the upper halves of both sides by sputtering or the like. On the inner surface of the shallow groove 118, electrodes 113 are formed on the side and bottom surfaces thereof by sputtering or the like. Thus, the electrodes 113 formed on both side surfaces of the groove 115 are electrically connected by the electrodes 113 formed in the shallow groove 118.

Next, the cover plate 103 is formed of the same or different ceramic material as the piezoelectric ceramic plate 102. The cover plate 103 has a manifold 121 and an ink supply port 121 formed therein.

The piezoelectric ceramic plate 102
The surface on the processing side of the groove 115 is bonded to the cover plate 103 via the epoxy-based adhesive layer 104 (FIG. 5).
Reference numeral 15 denotes a plurality of ink liquid chambers 1 spaced from each other in the horizontal direction.
It becomes 12.

The end faces 116 of the piezoelectric ceramic plate 102 and the cover plate 103 have respective ink liquid chambers 11.
The nozzle plate auxiliary member 105 provided with a communication hole 153 at a position corresponding to the position 2 is joined to the nozzle plate auxiliary member 105.
A nozzle plate 131 provided with a nozzle 132 at a position corresponding to No. 3 is joined as shown in FIG.

The nozzle plate auxiliary member 105 is made of a ceramic or resin material, and has a plurality of grooves 151 having the same depth and the same width corresponding to the ink liquid chamber 112 as shown in FIG. And cover parts 152
Are bonded by an adhesive, and cut to a predetermined thickness (for example, 1 mm) at the cut surface 160 as shown in FIG.

The nozzle plate 131 is made of polyalkylene (for example, ethylene) terephthalate, polyimide,
After the nozzle plate 131 made of a plastic such as polyetherimide, polyether ketone, polyether sulfone, polycarbonate, or cellulose acetate and having no nozzle formed thereon is bonded to the nozzle plate auxiliary member 105 with an adhesive, FIG. As shown in c), a nozzle 132 is formed by the laser beam 170 that has passed through a mask (not shown) and has passed through the communication hole 153 of the nozzle plate auxiliary member 105.

The nozzle plate auxiliary member 105 in which the nozzle plate 131 is joined and the nozzle 132 is formed on the nozzle plate 131 is attached to the piezoelectric ceramic plate 10.
2 and the end face 116 of the cover plate 103.
Conventionally, when positioning and joining a nozzle plate formed with nozzles to an actuator portion so that the nozzles correspond to ink liquid chambers, an expensive positioning device including a camera having an image processing device was required. Against
In the ink ejecting apparatus of the present embodiment, the nozzle 132 and the ink liquid chamber 112 are positioned at the corresponding positions by a simple method such as joining the side surfaces of the piezoelectric ceramic plate 102 and the nozzle plate auxiliary member 105 to the common surface and then joining them. Since they are arranged, the productivity is high and the cost of the joining process can be reduced. In addition, since the nozzle 132 is formed after the nozzle plate 131 is joined to the nozzle plate auxiliary member 105, there is no danger that the adhesive flows into the nozzle and the nozzle is blocked as in the related art, thereby improving the yield.

Groove 11 of piezoelectric ceramic plate 102
5 On the back side of the processing side, the substrate 4 on which the pattern 42 is formed
The pattern 42 is connected to the electrode 113 of the shallow groove 118 by a conductive wire 43.

Next, the configuration of the control unit will be described with reference to FIG. 8 showing a block diagram of the control unit. The conductive layer patterns 42 provided on the substrate 41 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54, and the ground line 55 are also connected to the LSI chip 51. The LSI chip 51 determines which nozzle 132 should eject the ink droplet from the data appearing on the data line 53 based on the continuous clock pulse supplied from the clock line 52,
The voltage V of the voltage line 54 is applied to the conductive layer pattern 42 that is connected to the electrode 113 in the ink liquid chamber 112 to be driven. Also, the electrodes 11 other than the ink liquid chamber 112 to be driven
3 to the ground line 55
Connect to

Next, the operation of the actuator section 101 of the ink ejecting apparatus of this embodiment will be described. In order to eject ink droplets from the ink liquid chamber 112b of FIG. 5B, a voltage pulse is applied to the ink liquid chamber 112b (here, applying a voltage to a certain ink liquid chamber 112b means Electrodes 113d and 1 facing ink liquid chamber 112b
13e, and grounds the electrode 113 facing the ink liquid chamber 112 which is not indicated). Then, an electric field in the direction of arrow 114b is generated on the side wall 111b, and an electric field in the direction of arrow 114c is generated on the side wall 111c.
11b and 111c move away from each other due to the piezoelectric thickness-shear effect. The volume of the ink liquid chamber 112b increases, and the pressure in the ink liquid chamber 112b including the vicinity of the nozzle 132 decreases. This state is maintained for a time indicated by L / a. Then, ink is supplied from an ink supply source (not shown) via the manifold 121 during that time.

The above L / a is necessary for the pressure wave in the ink liquid chamber 112 to propagate one way in the longitudinal direction of the ink liquid chamber 112 (from the manifold 121 to the nozzle plate 131 or vice versa). It is determined by the length L of the ink liquid chamber 112 and the speed of sound a in the ink.

According to the pressure wave propagation theory, the ink liquid chamber 112b
The pressure inside the ink chamber reverses and turns to a positive pressure, but the voltage applied to the ink liquid chamber 112b is returned to 0 V at this timing. Then, the side walls 111b and 111c return to the state before deformation (FIG. 5A), and pressure is applied to the ink. At that time, the pressure turned positive and the side wall 111b,
The pressure generated by returning to the state before the deformation of 111 c is added, and a relatively high pressure is applied to the ink in the ink liquid chamber 112 b, so that the ink droplet is ejected from the nozzle 132.

In the above-described embodiment, first, the drive voltage is applied in the direction in which the volume of the ink liquid chamber 112b increases, and then the application of the drive voltage is stopped, and the volume of the ink liquid chamber 112b is reduced to the natural state. Although the ink droplets were ejected from the liquid chamber 112b, first, a drive voltage was applied so that the volume of the ink liquid chamber 112b was reduced, and the ink droplets were ejected from the ink liquid chamber 112b. May be stopped and the volume of the ink liquid chamber 112b may be increased from the reduced state to the natural state to supply the ink into the ink chamber 112b.

In the above embodiment, the nozzle plate auxiliary member 105 having the communication hole 153 having the same groove depth as the ink liquid chamber 112 is used. However, as shown in FIG. A groove part 154 having a shallow groove and a cover part 155 may be joined to form a communication hole 156 having a groove depth smaller than that of the ink liquid chamber 112. In this case, the ink nozzle plate The resistance on the 131 surface can be reduced.

As shown in FIG. 2C, the opening of the communication hole 159 formed in the nozzle plate auxiliary member 105 on the ink liquid chamber 112 side is wider than the opening on the nozzle plate 131 side. With this configuration, the resistance of the ink on the nozzle plate 131 can be further reduced. At this time, as shown in FIG.
After connecting the groove component 157 with the inclined depth and the cover component 158 to form a communication hole 159, and joining the nozzle plate 131 on which the nozzle is not formed to the smaller surface of the opening of the communication hole 159. As shown in FIG. 4B, when the laser beam 170 is directly irradiated from the larger surface of the communication hole 159 without using a mask, the nozzle plate auxiliary member 105 functions as a mask for the laser beam 170, The nozzle 132 is processed. For this reason, a mask for forming a desired size for processing a laser beam at the time of laser processing is not required, so that positioning of the mask is not required and productivity is improved.

After bonding a nozzle plate 131 on which no nozzle is formed to an end face 116 of the piezoelectric ceramic plate 102 and the cover plate 103 of the actuator section 101 with an adhesive, the actuator section 101 is substantially aligned with the ink liquid chamber 112. The nozzle plate 131 is cut perpendicularly to form a portion to which the nozzle plate 131 is bonded and another portion, and irradiates the nozzle plate 131 with a laser beam through the ink liquid chamber of the portion to which the nozzle plate 131 is bonded. 132 and processed nozzle 1
The portion to which the nozzle plate 131 with the processed 32 is bonded may be joined to the other portion so that the ink liquid chamber communicates with the other portion. In this way, the portion to which the nozzle plate 131 is adhered and the other portion are formed by cutting the actuator portion 101, so that the two ink members communicate with each other when the two members are joined. Is very easy because the positioning can be performed by aligning the side surfaces.

In the above embodiment, all the grooves 1
15 was used as the ink liquid chamber 112, the adjacent ink liquid chambers could not be ejected at the same time. However, an air chamber (not shown) that does not eject ink and an ink liquid chamber 115
May be provided alternately so that adjacent ink liquid chambers can be ejected simultaneously. Further, in the above-described embodiment, the piezoelectric slip effect is used as a means for applying pressure to the ink. However, other piezoelectric modes such as a piezoelectric longitudinal effect and a piezoelectric transverse effect may be used. May be constituted by an injection device using another pressure generating method such as a bubble jet method.

In the above embodiment, the groove 115 is formed on one surface of the piezoelectric ceramic plate 102.
The thickness of the piezoelectric ceramic plate may be increased, grooves may be formed on both sides, and two rows of ink liquid chambers may be provided vertically.

Further, in the above embodiment, the electrode 113 is formed on the upper half of the side wall 111, and the lower half of the side wall 111 is driven by the piezoelectric thickness shear deformation of the upper half of the side wall 111. A groove may be formed in the plate in the opposite direction, electrodes may be formed on the entire side surface of the groove, and the piezoelectric thickness-shear deformation may be performed on the upper and lower portions of the side wall to eject ink.

[0044]

As is apparent from the above description, according to the method for manufacturing an ink jet apparatus of the first aspect of the present invention,
A nozzle plate having no nozzle is bonded to a nozzle plate auxiliary member provided with a communication hole communicating with the plurality of ink liquid chambers, and laser light is applied to the nozzle plate through the communication hole of the nozzle plate auxiliary member. After irradiating and processing the nozzles in the nozzle plate, the connection is made so that the communication holes of the nozzle plate auxiliary member and the ink liquid chamber communicate with each other. There is no danger of clogging, and the yield is improved. In addition, when the nozzle plate is bonded, no nozzle is formed, so that the positioning of the bonding can be easily performed, and further, a simple method such as joining the side surfaces of the ink ejecting device main body and the nozzle plate auxiliary member to a common surface and joining them together can be used. By this method, positioning and joining between the communication hole of the nozzle plate auxiliary member and the ink liquid chamber can be performed, and since the productivity is high, the cost of the joining process can be reduced.

According to a fifth aspect of the invention, there is provided a method of manufacturing an ink jet apparatus, wherein the nozzle plate on which a nozzle is not formed is bonded to an opening surface of the ink liquid chamber of the head portion, and the head portion is formed of the ink liquid. By cutting so as to be substantially perpendicular to the chamber, a nozzle plate auxiliary member to which the nozzle plate is bonded and an actuator member that generates energy for ejecting ink are processed, and the ink liquid of the nozzle plate auxiliary member is processed. After irradiating the nozzle plate with a laser beam through a chamber and processing the nozzle on the nozzle plate, the ink liquid chamber of the nozzle plate auxiliary member and the ink liquid chamber of the actuator member are joined so as to communicate with each other. Therefore, there is no danger of the adhesive flowing into the nozzle and blocking the nozzle as in the past, To improve. Further, when the nozzle plate is bonded, no nozzle is formed, so that the positioning of the bonding can be easily performed. Further, by cutting the head member, the nozzle plate auxiliary member and the actuator member are formed. Accurate positioning and joining between the ink liquid chamber of the nozzle plate auxiliary member and the ink liquid chamber of the actuator member can be performed by a simple method, such as joining the side surfaces of the plate auxiliary member and the actuator member to a common surface, and producing. Because of its high performance, the cost of the joining process can be reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating an ink ejecting apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view of the ink ejecting apparatus according to the embodiment of the present invention.

FIG. 3 is an explanatory view showing a step of forming a nozzle plate auxiliary member and a nozzle according to the embodiment of the present invention.

FIG. 4 is an explanatory view showing a process of forming a nozzle according to another embodiment of the present invention.

FIG. 5 is a cross-sectional view illustrating an operation of the ink ejecting apparatus according to the embodiment of the present invention.

FIG. 6 is a cross-sectional view illustrating an operation of a conventional ink ejecting apparatus.

FIG. 7 is a perspective view showing a conventional ink ejecting apparatus.

FIG. 8 is a block diagram illustrating a control unit of the ink ejection device according to the related art and the embodiment of the present invention.

FIG. 9 is a perspective view illustrating a configuration of a conventional printer.

[Explanation of symbols]

 101 Actuator 105 Nozzle plate auxiliary member 112 Ink chamber 131 Nozzle plate 132 Nozzle 151 Groove part 152 Cover part 153 Communication hole 154 Groove part 155 Cover part 156 Communication hole 157 Groove part 158 Cover part 159 Communication hole

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B41J 2/16 B41J 2/045 B41J 2/055 B41J 2/135

Claims (5)

(57) [Claims] 1. A method of manufacturing an ink ejecting apparatus, comprising: a plurality of ink liquid chambers filled with ink; and a nozzle plate having a nozzle formed to communicate with the ink liquid chambers. Bonding the nozzle plate on which the nozzle is not formed to a nozzle plate auxiliary member provided with a communication hole to be provided; and irradiating the nozzle plate with laser light through the communication hole of the nozzle plate auxiliary member, thereby forming the nozzle A method for manufacturing an ink ejecting apparatus, comprising: a step of forming a nozzle on a plate; and a step of joining a communication hole of the nozzle plate auxiliary member and the ink liquid chamber so as to communicate with each other. 2. The ink jet according to claim 1, wherein a size of an opening of the communication hole formed in the nozzle plate auxiliary member on the ink liquid chamber side is smaller than a size of the ink liquid chamber. Device manufacturing method. 3. The communication hole formed in the nozzle plate auxiliary member has a side communicating with the ink liquid chamber,
2. The method according to claim 1, wherein the opening is larger than a side communicating with the nozzle. 4. The method according to claim 1, wherein the nozzle plate auxiliary member serves as a mask for a laser beam. 5. A method for manufacturing an ink ejecting apparatus, comprising: a head section provided with a plurality of ink liquid chambers filled with ink; and a nozzle plate formed with nozzles communicating with the ink liquid chambers of the head section. A step of bonding the nozzle plate having no nozzle formed thereon to an opening surface of the ink liquid chamber of the head portion; and cutting the nozzle plate so as to be substantially orthogonal to the ink liquid chamber of the head portion. Processing a nozzle plate auxiliary member to which the plate is adhered, and an actuator member that generates energy for ejecting ink; and irradiating the nozzle plate with laser light through an ink liquid chamber of the nozzle plate auxiliary member. Forming a nozzle on the nozzle plate, the ink liquid chamber of the nozzle plate auxiliary member, Method of manufacturing an ink jet apparatus and the ink liquid chamber of Chueta member is characterized by comprising the step of bonding so as to communicate.