JPH08276583A - Ink jet device and production thereof - Google Patents

Abstract

PURPOSE: To emit ink liquid droplets having a speed and vol. sufficient to form a character or image by low drive voltage and to enhance the reliability of electrical connection. CONSTITUTION: In an ink jet device 201 having ink liquid chambers 112 having side walls 111, 116 constituted of a piezoelectric material and electrodes 113, 114 generating electric fields in the side walls 111, 116 and displacing the side walls 111, 116 by the application of voltage to the electrodes 113, 114 to apply pressure to the ink in the ink liquid chambers 112 to emit ink, a metal layer 213 is formed by a plating method so as to cover an electrode 213. The electrode 213 is electrically connected by a conductive layer 215.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet device.

[0002]

2. Description of the Related Art Among the non-impact type printers, which are currently replacing the impact type printers that have been used up to now, and whose market is expanding greatly, the principle is the simplest, and multi-gradation and colorization are realized. As easy as
Inkjet printers are available. Drop-on that ejects only the ink droplets used for printing
The demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Of these, the former is difficult to miniaturize, and the latter requires a high heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A method proposed to solve the above defects at the same time is disclosed in Japanese Patent Laid-Open No. 63-247051.
JP-A-63-252750 and JP-A-2
It is a shear mode type disclosed in Japanese Patent Publication No. 150355. 2, FIG. 3, FIG. 4, FIG. 5 and FIG. 6 show schematic diagrams of these conventional examples.

FIG. 2 showing a cross-sectional view of the ink ejecting apparatus is shown below.
The configuration of the conventional example will be described in detail. The ink ejecting apparatus 1 is composed of an actuator plate 2, a cover plate 3 and a nozzle plate 31 (FIG. 4). The actuator plate 2 is formed of a piezoelectric material having ferroelectricity, for example, a lead zirconate titanate (PZT) -based ceramic material, etc., and is polarized in the direction of the arrow 5, and the plurality of grooves 15 and the grooves 15 are formed. It has a side wall 11 which separates 15. The cover plate 3 is made of a ceramic material, a resin material, or the like. By joining the actuator plate 2 and the cover plate 3 with the joining layer 4 made of an adhesive such as an epoxy adhesive, the groove 15 is formed into a plurality of ink liquid chambers 12 having a space between each other in the lateral direction. Become. The ink liquid chamber 12 has an elongated shape with a rectangular cross section, and the side wall 11 extends over the entire length of the ink liquid chamber 12. Electrodes 13 for applying a driving voltage are formed on both surfaces of the sidewall 11 near the bonding layer 4 from the upper portion of the sidewall 11 to the central portion of the sidewall 11. In the ink liquid chamber 12, from the ink supply port 21 (FIG. 4) to the manifold 22 (FIG. 4).
Ink 81 is introduced through.

Next, the operation of the conventional example will be described with reference to FIG. 3, which is a sectional view of the ink ejecting apparatus 1. In the ink ejecting apparatus 1, for example, when the ink liquid chamber 12b is selected according to desired print data, a positive drive voltage is rapidly applied to the electrodes 13c and 13d, and the electrodes 13b and 13e are grounded. As a result, the driving electric field in the direction of arrow 14a acts on the side wall 11a, and the driving electric field in the direction of arrow 14b acts on the side wall 11b. At this time, the driving electric field directions 14a and 14b
And the polarization direction 5 are orthogonal, the side walls 11a and 1
1b is an ink liquid chamber 12b due to the piezoelectric thickness sliding effect.
It deforms rapidly inward. Due to this deformation, the volume of the ink liquid chamber 12b is reduced, the pressure of the ink 81 inside the ink liquid chamber 12b is rapidly increased, a pressure wave is generated, and the nozzle 32 (FIG. 4) communicating with the ink liquid chamber 12b is generated. A part of the ink 81 is ejected as an ink droplet. Also,
When the application of the drive voltage is stopped, the side walls 11a and 11b return to the positions before the deformation (see FIG. 2), so that the ink liquid chamber 12
The pressure of the ink 81 in the inside b is decreased, and the ink supply port 21
Ink 81 is supplied from (FIG. 4) through the manifold 22 (FIG. 4) into the ink liquid chamber 12b.

However, the above operation is only the basic operation of the conventional example, and when it is embodied as a product, first, a driving voltage is applied in the direction in which the volume of the ink liquid chamber 12b increases, and then the ink liquid is first applied. In some cases, after the ink is supplied to the chamber 12b, the application of the drive voltage is stopped, the side walls 11a and 11b are returned to the positions before the deformation (see FIG. 2), and the ink is ejected.

In the ink ejecting apparatus 1, since it is not possible to eject ink droplets simultaneously from two nozzles communicating with two adjacent ink liquid chambers, for example, ink is ejected from the nozzles communicating with the ink liquid chambers 12b and 12d. After ejecting the liquid droplets, the ink droplets are ejected from the nozzles communicating with the ink liquid chambers 12c, and then the ink liquid chambers 12b and 12d again.
The ink droplets are ejected by dividing the ink liquid chamber 12 and the nozzles 32 into a plurality of groups such that the ink droplets are ejected from the nozzles communicating with.

Next, the construction and manufacturing method of the conventional example will be described with reference to FIG. 4 showing a perspective view of the ink jetting apparatus 1. The parallel grooves 1 that form the ink liquid chamber 12 having the above-described shape are formed on the actuator plate 2 that has been subjected to the polarization treatment by grinding or the like using a thin disk-shaped diamond blade.
5 is produced. The groove 15 is a parallel groove having the same depth over almost the entire area of the actuator plate 2, but is gradually shallowed toward the end face 17, and is formed so as to be a shallow parallel groove 18 near the end face 17. Electrodes are formed on the inner surfaces of the groove 15 and the shallow groove 18 by vacuum vapor deposition, sputtering or the like. At the time of forming this electrode, an electrode is also formed on the zenith of the side wall 11, so it is necessary to separate the electrodes on both sides of the side wall 11, and therefore the electrode on the zenith of the side wall 11 is removed by lapping or the like. Thereby,
The electrode 13 is formed on the inner surface of the groove 15 only on the upper half of the side surface thereof, and the electrode 19 is formed on the entire surface of the side surface and the bottom surface of the shallow groove 18. The electrodes 13 are electrically connected to the electrodes 13 formed on the sidewalls 11 on both sides of the groove 15.

Further, the ink inlet 21 and the manifold 22 are formed in the cover plate 3 made of a ceramic material or a resin material by grinding or cutting.

Next, the groove 15 of the actuator plate 2
Each groove 15 forms the ink liquid chamber 12 having the above-mentioned shape by the bonding layer 4 (FIG. 2) made of an epoxy adhesive or the like on the surface on the processing side and the surface on the processing side of the manifold 22 of the cover plate 3. So that it adheres. Next, a nozzle plate 31 having nozzles 32 provided at positions corresponding to the positions of the ink liquid chambers 12 is adhered to the end faces 16 of the actuator plate 2 and the cover plate 3. Each shallow groove 18 is formed on the surface of the actuator plate 2 opposite to the groove 15 processing side.
The substrate 41 on which the pattern 42 of the conductive layer is provided at a position corresponding to the position is attached by an epoxy adhesive or the like.

Then, the electrode 19 on the bottom surface of the shallow groove 18 and the pattern 42 of the conductive layer are connected by a conductive wire 43. Usually, a well-known method such as wire bonding is used for such connection. Since the diameter of the conductive wire 43 is usually very small and the mechanical strength is small, in order to prevent contact between adjacent conductive wires 43 and disconnection, and corrosion due to moisture and dust in the atmosphere, a resin such as epoxy is generally used. A protective film (not shown) is formed (potting) using this. The protective film is cured by heating.

Next, the configuration of the conventional control unit will be described with reference to FIG. 5, which shows a block diagram of the control unit. The conductive layer patterns 42 provided on the substrate 41 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54, and the ground line 55 are also connected to the LSI chip 51. Based on the continuous clock pulse supplied from the clock line 52, the LSI chip 51 determines from the data appearing on the data line 53
It is determined from which nozzle 32 the ink droplet should be ejected. Then, the LSI chip 51 applies the voltage V of the voltage line 54 to the pattern 42 of the conductive layer that is electrically connected to the electrode 13 in the ink liquid chamber 12 that ejects ink. In addition, the LSI chip 51 connects the ground line 55 to the pattern 42 of the conductive layer that is electrically connected to the electrodes 13 other than the ink liquid chamber 12.

Next, the construction and operation of the conventional example will be described with reference to FIG. 6 showing a perspective view of the printer. The ink ejecting device 1 and the nozzle plate 31 have the configurations and operations described in FIGS. 2, 3, 4, and 5. The ink ejecting apparatus 1 is fixed on the carriage 62, the ink supply tube 63 communicates with the ink supply port 21 (FIG. 4), and
The chip 51 (FIG. 5) is built in the carriage 62, and the flexible cable 64 is the clock line 5 shown in FIG.
2, corresponding to the data line 53, the voltage line 54 and the ground line 55. The carriage 62 has a slider 66.
Along the direction of arrow 65 over the entire width of the recording paper 71, and the ink ejecting device 61 holds the recording paper 7 held by the platen roller 72 while the carriage 62 is moving.
1, the nozzle 3 provided on the nozzle plate 31
Ink droplets are ejected from 2 (FIG. 4) to adhere the ink droplets onto the recording paper 71.

The recording paper 71 is stationary when the ink ejecting apparatus 1 ejects ink droplets, but the paper feeding rollers 73 and 7 are performed each time the carriage 62 performs a predetermined operation.
4, a constant amount is transferred in the direction of arrow 75. As a result, the ink ejecting apparatus 1 can form a desired character or image on the entire surface of the recording paper 71.

Next, another conventional ink ejecting apparatus disclosed in Japanese Unexamined Patent Publication No. 5-92561 is shown in FIGS.
Will be explained. The ink ejecting apparatus 101 is composed of actuator plates 102 and 103 and a nozzle plate (not shown). The actuator plate 102 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of the arrow 105, and has a plurality of grooves 11.
5 and a side wall 111 separating the groove 115. Side wall 1
Electrodes 113 for applying a driving voltage are formed on both side surfaces of 11 and a part of the zenith. The actuator plate 103 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of the arrow 106, and has a plurality of grooves 117 and side walls 116 separating the grooves 117.
Electrodes 114 for applying a driving voltage are formed on both side surfaces of the side wall 116 and a part of the zenith.

By joining the zenith of the side wall 111 of the actuator plate 102 and the zenith of the side wall 116 of the actuator plate 103 via the joining layer 104 made of an adhesive, the grooves 115 and 117 are laterally aligned with each other. A plurality of ink liquid chambers 112 are formed at intervals. Further, the electrode 113 and the side wall 11 formed on the zenith of the side wall 111
The electrode 114 formed on the zenith portion of No. 6 comes into contact with each other to form a conductive relationship. The ink liquid chamber 112 has an elongated shape with a rectangular cross section, and the side walls 111 and 116 have the ink liquid chamber 112.
Extends over the entire length of. In the ink liquid chamber 112,
Ink 181 is introduced from an ink supply port (not shown) through a manifold (not shown). The description of the electrical connection between the electrodes 113 and 114 and the drive circuit is omitted.

In the ink ejecting apparatus 101, a driving electric field acts on the side walls 111 and 116 by applying a driving voltage to the electrodes 113 and 114 on the surfaces of the side walls 111 and 116 on both sides of the ejected ink liquid chamber 112. At this time, since the driving electric field direction and the polarization directions 105 and 106 are orthogonal to each other, the side walls 111 and 116 are rapidly deformed toward the inside of the ink liquid chamber 112 due to the piezoelectric thickness sliding effect. Due to this deformation, the volume of the ink liquid chamber 112 is reduced, the pressure of the ink 181 inside the ink liquid chamber 112 is rapidly increased, a pressure wave is generated, and a nozzle (not shown) communicating with the ink liquid chamber 112 is generated. A part of the ink 181 is ejected as an ink droplet. Further, when the application of the drive voltage is stopped, the side walls 111 and 116 return to the positions before the deformation, so that the pressure of the ink 181 inside the ink liquid chamber 112 lowers, and the manifold (not shown) is supplied from the ink supply port (not shown). 18) through the ink 18 into the ink liquid chamber 112.
1 is supplied.

However, the above operation is only the basic operation of the conventional example, and when it is embodied as a product, first, a drive voltage is applied in the direction in which the volume of the ink liquid chamber 112 increases, and then the ink liquid is first applied. In some cases, after the ink is supplied to the chamber 112, the application of the drive voltage is stopped, the side walls 111 and 116 are returned to the positions before the deformation, and the ink is ejected.

[0020]

However, in the conventional ink ejecting apparatus 1 as described above, only the upper half of the side wall 11 undergoes the piezoelectric thickness slip deformation due to the drive voltage applied to the electrode 13, and the lower half of the upper half is the upper half. Since the displacement is caused by the deformation, the amount of deformation of the side wall 11 is smaller than that of the electric energy applied to the electrode 13, and the amount of decrease in the volume of the ink liquid chamber 12 is small. Therefore, in order to form a character or an image on the paper surface or the like where the speed and volume of the ejected ink droplets face the ink ejecting apparatus 1, it is necessary to increase the driving voltage. For this reason, the driving circuit becomes complicated and large in size, so that there is a limit to cost reduction and downsizing of the device.

In the conventional ink ejecting apparatus 101 as described above, since both the side walls 111 and 116 are driven by the drive voltage applied to the electrode 113, ink is ejected at a driving voltage which is half that of the ink ejecting apparatus 1. The same ink pressure as the device 1 can be generated. Therefore, the drive voltage can be made lower than that of the injection device 1.

However, in the ink ejecting apparatus 101, the electrical connection between the electrode 113 formed on the side wall 111 and the electrode 114 formed on the side wall 116 joins the zenith part of the side wall 111 and the zenith part of the side wall 116. Since the electrical connection by this contact,
If the surface roughness and undulations of the zeniths of the side walls 111 and 116 are large, the connection is not assured and the reliability is low. Further, the zenith of the side wall 111 and the side wall 11
There was a problem that the electrode 113 and the electrode 114 were not connected due to the protrusion of the adhesive that adheres to the zenith portion of No. 6. In addition, ink 1 is applied to the contact surface between the electrodes 113 and 114.
81 enters to hinder electrical connection, and the side wall 111
And electrodes 116 and 114 due to vibration caused by driving
Wear on the contact surface with and electrical connection is broken,
There is a problem in that the ejection of ink droplets stops during use, resulting in low reliability.

The present invention has been made to solve the above-mentioned problems, and it is possible to eject ink droplets at a speed and volume sufficient to form characters and images with a low driving voltage. It is an object of the present invention to provide an ink ejecting apparatus having high reliability of electrical coupling and a manufacturing method thereof.

[0024]

In order to achieve this object, according to claim 1 of the present invention, a plurality of first grooves are separated from each other, and at least a part of the first grooves is made of a piezoelectric material. A first actuator plate having a wall, a plurality of second grooves provided corresponding to the first groove, and a second wall that is separated from the second groove and at least a part of which is made of a piezoelectric material. A second actuator plate having, a first electrode formed on a side surface of the first wall, and a second electrode formed on a side surface of the second wall, and the ceiling of the first wall of the first actuator plate. In an ink ejecting device that joins the top portion and the top portion of the second wall of the second actuator plate to form an ink liquid chamber composed of the first groove and the second groove, the ink liquid chamber is formed by plating in the ink liquid chamber. Formed, the first electrode and the second Having a third electrode connected to the poles.

According to a second aspect of the present invention, there is provided a first actuator plate having a plurality of first grooves and a first wall which is separated from the first grooves and at least a part of which is made of a piezoelectric material, and which corresponds to the first grooves. Formed on a side surface of the first wall, and a second actuator plate having a plurality of second grooves and a second wall at least a part of which is made of a piezoelectric material and which separates the second groove. A first electrode and a second electrode formed on a side surface of the second wall, a method of manufacturing an ink ejecting apparatus, comprising: a zenith portion of the first wall of the first actuator plate and the second actuator plate. A step of joining the zenith portion of the second wall to form an ink liquid chamber composed of the first groove and the second groove; and introducing a metal substance into the ink liquid chamber to introduce the first electrode and the second electrode. Form a third electrode that connects to two electrodes Characterized in that it consists of a degree.

[0026]

In the ink jet apparatus of the present invention having the above structure, the third electrode formed in the ink liquid chamber is formed on the first electrode and the second electrode by a plating method,
The first electrode and the second electrode are electrically connected.

In the method of manufacturing an ink jet device of the present invention, first, the zenith portion of the first wall of the first actuator plate and the zenith portion of the second wall of the second actuator plate are joined, and then A step of forming an ink liquid chamber composed of the first groove and the second groove, and introducing a metal substance into the ink liquid chamber to form a first electrode on the first electrode and the second electrode in the ink liquid chamber. Three electrodes are formed,
The first electrode and the second electrode are electrically connected.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The same members as those of the conventional technique are designated by the same reference numerals, and the description thereof will be omitted.

The construction of one embodiment of the present invention will be described in detail with reference to FIG. 1 which is a partial cross-sectional view of the ink ejecting apparatus 201. The ink ejecting apparatus 201 is composed of actuator plates 102 and 103 and a nozzle plate (not shown). Actuator plate 102
Is formed of a piezoelectric material having ferroelectricity, and the arrow 105
It is polarized in the direction (FIG. 7) and has a plurality of grooves 115 and side walls 111 separating the grooves 115. An electrode 113 for applying a driving voltage is formed on both side surfaces of the side wall 111 and a part of the zenith portion continuous with the both side surfaces. The actuator plate 103 is formed of a piezoelectric material having ferroelectricity and is polarized in the direction of arrow 106 (FIG. 7).
It has a plurality of grooves 117 and side walls 116 separating the grooves 117. Electrodes 114 for applying a driving voltage are formed on both side surfaces of the side wall 116 and a part of the zenith portion continuous with the both side surfaces.

The electrodes 113 and 114 are formed of a conductive material such as nickel, aluminum, gold or carbon after forming a resist layer or the like on a part of the zenith of the side wall 111 and a part of the zenith of the side wall 116 by patterning or the like. A thin layer is formed on the entire surface of the side walls 111 and 116 by vacuum vapor deposition, sputtering, plating, screen printing or the like, and the resist layer is removed by mechanical peeling or chemical dissolution.

Next, the zenith of the side wall 111 of the actuator plate 102 and the zenith of the side wall 116 of the actuator plate 103 are joined via the joining layer 104 made of an adhesive, so that the grooves 115 and 117 are laterally aligned. The plurality of ink liquid chambers 112 are spaced apart from each other. The ink liquid chamber 112 has an elongated shape with a rectangular cross section, and the side walls 111 and 116 extend over the entire length of the ink liquid chamber 112.

Next, a metal substance such as nickel, gold, copper, silver, or palladium is introduced into the ink liquid chamber 112, and the metal layer 213 is plated by a plating method such as electrolytic plating or electroless plating.
It is formed so as to cover the electrodes 113 and 114. Thus, the electrode 113 and the electrode 114 are electrically connected by the metal layer 213.

In the ink ejecting apparatus 201 of this embodiment, the electrodes 113 and 114 form a conductive relationship with the metal layer 213 formed so as to cover them, so that the surfaces of the zeniths of the side walls 111 and 116 are formed. A reliable electrical connection can be obtained irrespective of roughness and undulation, and the adhesive is squeezed out of the bonding layer 104 or the ink introduced into the ink liquid chamber 112 disturbs the electrical connection, and the side walls 111 and 116 are driven. The electrical connection will not be cut off due to wear due to vibration, and the reliability of the electrical connection will be significantly improved.

Further, since the ink is ejected by the deformation of the side wall 111 and the side wall 116, it is possible to eject ink droplets at a speed and volume sufficient to form characters and images with a low driving voltage.

Although the ink liquid chambers 112 are adjacent to each other in this embodiment, air chambers filled with air may be provided between the ink liquid chambers. In this case, ink droplets can be ejected simultaneously from two nozzles communicating with all ink liquid chambers.

Further, in this embodiment, after forming a resist layer or the like on a part of the zenith of the side wall 111 and a part of the zenith of the side wall 116, a thin layer of a conductive material is formed on the entire surfaces of the side walls 111 and 116. By removing the resist layer by mechanical peeling or chemical dissolution, the sidewall 1
The electrodes 113 and the sidewalls 11 are provided on both side surfaces of 11 and part of the zenith.
The electrodes 114 were formed on both side surfaces of 6 and a part of the zenith, but after a thin layer of a conductive material was formed on the entire surfaces of the sidewalls 111 and 116, the zenith of the sidewall 111 and the zenith of the sidewall 116 were formed. May be machined to remove some of the electrodes 113 and 114.

Further, in this embodiment, the electrode 113 is provided on both side surfaces of the side wall 111 and a portion of the zenith portion continuous with the both side surfaces, and the electrode 114 is provided on both side surfaces of the side wall 116 and a portion of the zenith portion continuous with the both side surfaces. Formed, but electrodes 113 and 114
May be formed on all or part of the side surfaces 111 and 116, respectively, and may not be formed on the zenith.

In the present embodiment, the metal layer 213 is formed on the entire side surfaces of the side walls 111 and 116.
It may be formed on a part of the side surfaces of the side walls 111 and 116.

In this embodiment, the bonding layer 104 does not cover the electrodes 113 and 114, but the bonding layer 10
When 4 covers a part of the electrodes 113 and 114, the bonding layer 104 covered with a solvent or the like may be dissolved and removed. Further, by adding a powder of a conductive material such as metal to the adhesive forming the bonding layer 104, the formation of the metal layer 213 is promoted on the surface of the coated bonding layer 104 without removing the coated bonding layer 104. You may let me.

Further, in this embodiment, the side walls 111 and 11 are formed.
6 are each formed of one piezoelectric material member (actuator plates 102 and 103), a plurality of piezoelectric material members laminated in parallel to the polarization direction, or a non-piezoelectric material and a piezoelectric material in the polarization direction. It may be formed of members laminated in parallel.

In this embodiment, three ink liquid chambers 112 are shown, but any number such as 50 or 100 may be used.

[0042]

As is apparent from the above description, according to the present invention, the zenith of the first wall of the first actuator plate and the zenith of the second wall of the second actuator plate are joined together. After forming the ink liquid chamber, the third electrode is formed in the ink liquid chamber by the plating method,
The first electrode and the second electrode are electrically connected.
Therefore, a reliable electrical connection can be obtained regardless of the surface roughness and waviness of the zeniths of the first wall and the second wall, and the protrusion of the adhesive or the like for bonding, and the ink introduced into the ink liquid chamber can provide electrical connection. The connection is not hindered and the electrical connection is not broken due to the abrasion caused by the driving of the first wall and the second wall, and the reliability of the electrical connection is significantly increased. Further, since the ink is ejected by the deformation of the first wall and the second wall, it is possible to eject ink droplets of a speed and volume sufficient to form a character or an image with a low driving voltage.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional view of an ink ejecting apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a conventional ink ejecting apparatus.

FIG. 3 is an explanatory diagram showing an operation of a conventional ink ejecting apparatus.

FIG. 4 is a perspective view showing a conventional ink ejecting apparatus.

FIG. 5 is a block diagram showing a control unit of a conventional example.

FIG. 6 is a perspective view showing a conventional printer.

FIG. 7 is a cross-sectional view showing a conventional ink ejecting apparatus.

FIG. 8 is a partial cross-sectional view of a conventional ink ejecting apparatus.

[Explanation of symbols]

 201 Ink ejection device 111 Side wall 116 Side wall 112 Ink liquid chamber 113 Electrode 114 Electrode 213 Metal layer

Claims (2)

[Claims] 1. A first actuator plate having a plurality of first grooves and a first wall which is separated from the first grooves and at least a part of which is made of a piezoelectric material, and which is provided corresponding to the first grooves. A plurality of second grooves, a second actuator plate having a second wall at least a part of which is made of a piezoelectric material and which separates the second groove, and a first side formed on the side surface of the first wall. An electrode and a second electrode formed on the side surface of the second wall, and joining the zenith portion of the first wall of the first actuator plate and the zenith portion of the second wall of the second actuator plate. And an ink ejecting device that forms an ink liquid chamber composed of the first groove and the second groove, wherein a third electrode is formed in the ink liquid chamber by a plating method and connected to the first electrode and the second electrode. Ink jet characterized by having electrodes Apparatus. 2. A first actuator plate having a plurality of first grooves and a first wall which is separated from the first grooves and at least a part of which is made of a piezoelectric material, and which is provided corresponding to the first grooves. A plurality of second grooves, a second actuator plate having a second wall at least a part of which is made of a piezoelectric material and which separates the second groove, and a first side formed on the side surface of the first wall. An electrode and a second electrode formed on a side surface of the second wall, wherein a zenith portion of the first wall of the first actuator plate and a second electrode of the second actuator plate are provided. Join the zenith of the wall,
Forming an ink liquid chamber comprising the first groove and the second groove; and introducing a metal substance into the ink liquid chamber to form a third electrode connected to the first electrode and the second electrode. And a method for manufacturing an ink ejecting apparatus.