JPH0284326U - - Google Patents

Info

Publication number
JPH0284326U
JPH0284326U JP16376288U JP16376288U JPH0284326U JP H0284326 U JPH0284326 U JP H0284326U JP 16376288 U JP16376288 U JP 16376288U JP 16376288 U JP16376288 U JP 16376288U JP H0284326 U JPH0284326 U JP H0284326U
Authority
JP
Japan
Prior art keywords
etching
container
semiconductor wafer
wafer
wall surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16376288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16376288U priority Critical patent/JPH0284326U/ja
Publication of JPH0284326U publication Critical patent/JPH0284326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Description

【図面の簡単な説明】
第１図は本考案の半導体ウエハエツチング装置
の一実施例を示す断面図、第２図は第１図の上面
図、第３図は動作説明図、第４図は他の実施例の
エツチング容器の断面図である。 １：エツチング容器、２：ウエハ、３：回転軸
、４：回転機構、５：エツチング液注入排出口。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハをエツチング液に浸漬させてエツ
    チングする半導体ウエハエツチング装置において
    、前記エツチング液を収容し且つ該エツチング液
    面よりも高い位置の内壁面に前記ウエハを貼付し
    て保持する多面体形の容器と、該容器を回転させ
    該容器内のエツチング液を遠心力により前記内壁
    面に貼付されたウエハの表面に接触させてエツチ
    ングする回転機構とよりなることを特徴とする半
    導体ウエハエツチング装置。
JP16376288U 1988-12-16 1988-12-16 Pending JPH0284326U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16376288U JPH0284326U (ja) 1988-12-16 1988-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16376288U JPH0284326U (ja) 1988-12-16 1988-12-16

Publications (1)

Publication Number Publication Date
JPH0284326U true JPH0284326U (ja) 1990-06-29

Family

ID=31448774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16376288U Pending JPH0284326U (ja) 1988-12-16 1988-12-16

Country Status (1)

Country Link
JP (1) JPH0284326U (ja)

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