JPH0282027U - - Google Patents
Info
- Publication number
- JPH0282027U JPH0282027U JP16141388U JP16141388U JPH0282027U JP H0282027 U JPH0282027 U JP H0282027U JP 16141388 U JP16141388 U JP 16141388U JP 16141388 U JP16141388 U JP 16141388U JP H0282027 U JPH0282027 U JP H0282027U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- group
- reaction
- tube
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 150000004678 hydrides Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16141388U JPH0282027U (id) | 1988-12-13 | 1988-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16141388U JPH0282027U (id) | 1988-12-13 | 1988-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282027U true JPH0282027U (id) | 1990-06-25 |
Family
ID=31444325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16141388U Pending JPH0282027U (id) | 1988-12-13 | 1988-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282027U (id) |
-
1988
- 1988-12-13 JP JP16141388U patent/JPH0282027U/ja active Pending