JPH0256433U - - Google Patents
Info
- Publication number
- JPH0256433U JPH0256433U JP13602888U JP13602888U JPH0256433U JP H0256433 U JPH0256433 U JP H0256433U JP 13602888 U JP13602888 U JP 13602888U JP 13602888 U JP13602888 U JP 13602888U JP H0256433 U JPH0256433 U JP H0256433U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding table
- reaction chamber
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988136028U JPH0543471Y2 (id) | 1988-10-18 | 1988-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988136028U JPH0543471Y2 (id) | 1988-10-18 | 1988-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0256433U true JPH0256433U (id) | 1990-04-24 |
| JPH0543471Y2 JPH0543471Y2 (id) | 1993-11-02 |
Family
ID=31396161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988136028U Expired - Lifetime JPH0543471Y2 (id) | 1988-10-18 | 1988-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543471Y2 (id) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6066028U (ja) * | 1983-10-11 | 1985-05-10 | 関西日本電気株式会社 | 炉芯管 |
| JPS60119743U (ja) * | 1984-01-23 | 1985-08-13 | サンケン電気株式会社 | 化学的気相付着装置 |
-
1988
- 1988-10-18 JP JP1988136028U patent/JPH0543471Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6066028U (ja) * | 1983-10-11 | 1985-05-10 | 関西日本電気株式会社 | 炉芯管 |
| JPS60119743U (ja) * | 1984-01-23 | 1985-08-13 | サンケン電気株式会社 | 化学的気相付着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543471Y2 (id) | 1993-11-02 |