JPS6265831U - - Google Patents
Info
- Publication number
- JPS6265831U JPS6265831U JP15819585U JP15819585U JPS6265831U JP S6265831 U JPS6265831 U JP S6265831U JP 15819585 U JP15819585 U JP 15819585U JP 15819585 U JP15819585 U JP 15819585U JP S6265831 U JPS6265831 U JP S6265831U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- semiconductor
- manufacturing device
- holding
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 2
- 210000000078 claw Anatomy 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15819585U JPS6265831U (id) | 1985-10-15 | 1985-10-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15819585U JPS6265831U (id) | 1985-10-15 | 1985-10-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6265831U true JPS6265831U (id) | 1987-04-23 |
Family
ID=31081456
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15819585U Pending JPS6265831U (id) | 1985-10-15 | 1985-10-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6265831U (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774114A (ja) * | 1993-09-03 | 1995-03-17 | Komatsu Electron Metals Co Ltd | 気相成長装置用バレル型サセプタ |
-
1985
- 1985-10-15 JP JP15819585U patent/JPS6265831U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774114A (ja) * | 1993-09-03 | 1995-03-17 | Komatsu Electron Metals Co Ltd | 気相成長装置用バレル型サセプタ |