JPH0281460A - Ic chip - Google Patents

Ic chip

Info

Publication number
JPH0281460A
JPH0281460A JP23317988A JP23317988A JPH0281460A JP H0281460 A JPH0281460 A JP H0281460A JP 23317988 A JP23317988 A JP 23317988A JP 23317988 A JP23317988 A JP 23317988A JP H0281460 A JPH0281460 A JP H0281460A
Authority
JP
Japan
Prior art keywords
substrate
resin
electrode
semiconductor element
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23317988A
Other languages
Japanese (ja)
Inventor
Kiyoshi Takagi
清 高木
Susumu Fukuda
進 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP23317988A priority Critical patent/JPH0281460A/en
Publication of JPH0281460A publication Critical patent/JPH0281460A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PURPOSE:To obtain an IC chip having excellent radio frequency characteristics and airtight sealing property by a method wherein leadless type side electrodes are formed on the side surface of a substrate and, at the same time, electrodes electrically continuous with the side electrodes are formed on the top and bottom surfaces of the substrate and a semiconductor element is mounted on the top surface of the substrate and molded with sealing resin. CONSTITUTION:A plurality of metal electrodes are formed on a substrate 1 made of baked ceramic material by paste printing or the like. Each electrode is composed of an upper electrode 3, a side electrode 2 and a bottom electrode 6 which are formed into one piece. A semiconductor element 4 is mounted on the top surface of the substrate 1 and the electrodes of the element 4 are connected to the upper electrodes 3 by bonding with wires 7. Further, liquid sealing resin 5 is applied to the top surface of the substrate 1 and cured to seal the semiconductor element 4 airtightly. The applied sealing resin 5 has a low specific inductive capacity with which the deterioration of radio frequency characteristics are suppressed as possible. For instance, resin having a specific inductive capacity not higher than 3.5 at a frequency of 1MHz is most suitable. Further, in order to avoid drooping, high biscosity (not less than 50cps) resin, for instance resin mainly composed of epoxy resin, anhydride system curing resin and inorganic fillers, is employed.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ICチップに関し、特に高周波特性の良好な
リードレス型のICチップに係るものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an IC chip, and particularly to a leadless type IC chip with good high frequency characteristics.

〔背景技術〕[Background technology]

従来のクロスパッケージ型のICは、第3図に示すよう
な構造を有している。すなわち、アルミナ(A(h03
)基板lの下面に金属リード線11の端部をろう材14
等によって接合してあり、基板1の上面に半導体素子4
を搭載し、リード線11と導通した基板1上面の上面電
極(図示せず)と半導体素子4の間をワイヤーボンディ
ングしである。さらに、基板1の上面にアルミナ製のキ
ャップ12を被せて半導体素子4を覆い、接着樹脂やは
んだなどの接合手段13によってキャップ12の下面を
基板1の上面に接合して半導体素子4を気密的に封止し
ている。また、IG)Iz程度以上の周波数で使用され
る高周波回路部品では、寄生容量の影響を避けるため、
封止された半導体素子4の周囲に比較的大きな空洞15
が形成されている。
A conventional cross-package type IC has a structure as shown in FIG. That is, alumina (A(h03
) Connect the end of the metal lead wire 11 to the bottom surface of the substrate l using the brazing material 14.
The semiconductor element 4 is bonded to the upper surface of the substrate 1 by
is mounted, and wire bonding is performed between an upper surface electrode (not shown) on the upper surface of the substrate 1 that is electrically connected to the lead wire 11 and the semiconductor element 4. Furthermore, an alumina cap 12 is placed on the upper surface of the substrate 1 to cover the semiconductor element 4, and the lower surface of the cap 12 is bonded to the upper surface of the substrate 1 using a bonding means 13 such as adhesive resin or solder to seal the semiconductor element 4. It is sealed in. In addition, in high-frequency circuit components used at frequencies higher than IG)Iz, in order to avoid the effects of parasitic capacitance,
A relatively large cavity 15 is formed around the sealed semiconductor element 4.
is formed.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

高周波回路では、回路部品や部品間の接続要素などを分
布定数としてとらえ、回路設計を進める必要がある0例
えば、部品間の配線は使用する周波数帯を考慮し、その
材質や寸法を決定しなければならない、また、基板の材
質も低誘電率かつ低損失のものを使用する必要がある。
In high-frequency circuits, it is necessary to proceed with circuit design by considering circuit components and connection elements between components as distributed constants.For example, the material and dimensions of wiring between components must be determined by considering the frequency band to be used. It is also necessary to use a substrate material with low dielectric constant and low loss.

したがって、このような回路においては、配線パターン
の寸法精度、部品の位置精度、部品と配線の接合方法な
どの要素が、設計した回路の性能を決定する重要な要因
となっている。
Therefore, in such circuits, factors such as the dimensional accuracy of the wiring pattern, the positional accuracy of components, and the method of joining components and wiring are important factors that determine the performance of the designed circuit.

しかるに、従来のIC部品16にあっては、上記のごと
くアルミナ基板1の下面にリード線11が設けられてい
るため、この基板1とリード線11間に接合部分が存在
し、ここに寄生インピーダンスが生じる。そして、この
寄生インピーダンスのために回路の高周波特性が劣化す
るという問題がある。さらに、プリント基板9に実装し
てリード線11の端部を配線導体10にはんだ付けした
場合、第4図に示すようにリード線11により配線長が
長くなるので、リードインダクタンスが大きくなり、こ
のためリード線11をはんだ付けする際の位置ずれやは
んだ17の付着の仕方のバラツキが回路特性に大きく影
響し、高周波特性が不安定になるという問題がある。
However, in the conventional IC component 16, since the lead wire 11 is provided on the bottom surface of the alumina substrate 1 as described above, a joint exists between the substrate 1 and the lead wire 11, and the parasitic impedance is generated here. occurs. Then, there is a problem that the high frequency characteristics of the circuit deteriorate due to this parasitic impedance. Furthermore, when the end of the lead wire 11 is soldered to the wiring conductor 10 after mounting on the printed circuit board 9, the lead wire 11 increases the wiring length as shown in FIG. 4, so the lead inductance increases. Therefore, there is a problem that misalignment when soldering the lead wires 11 and variations in the way the solder 17 is attached greatly affect the circuit characteristics, making the high frequency characteristics unstable.

また、従来のキャップ式の封止方法では、内部の空洞1
5のために封止部分の接触面積(キャップ12の下面の
面積)を大きくできず、封止状態の不良が生じ易くて確
実な気密封止を期待しえなかった。
In addition, in the conventional cap-type sealing method, the internal cavity 1
5, the contact area of the sealing portion (area of the lower surface of the cap 12) could not be increased, and a defective sealing condition was likely to occur, making it impossible to expect reliable hermetic sealing.

また、上記のような構造では、リード線11やキャップ
12等の部品が必要であり、材料費(部品コスト)が高
くついていた。加えて、複数本のリード線11を基板1
の下面にろう材14等で接合し、IC部品16をプリン
ト基板9に実装する前にリード線11の不要部分をカッ
トしなければならないので、製造段階及び実装段階での
工程数が多くなり、各工程の作業も複雑となっていた。
Furthermore, the above structure requires parts such as the lead wire 11 and the cap 12, resulting in high material costs (parts costs). In addition, a plurality of lead wires 11 are connected to the substrate 1.
Since the unnecessary portion of the lead wire 11 must be cut off before the IC component 16 is bonded to the bottom surface of the lead wire 11 with a brazing material 14 or the like and the IC component 16 is mounted on the printed circuit board 9, the number of steps in the manufacturing and mounting stages increases. The work in each process was also complicated.

また、キャップ12で半導体素子4を封止するためには
、キャップ12を基板1の上に供給し、キャップ12を
接着樹脂やはんだなどによって基板1に接合する作業が
必要であり、工程が複雑で工程数も多かった。
Furthermore, in order to seal the semiconductor element 4 with the cap 12, it is necessary to supply the cap 12 onto the substrate 1 and bond the cap 12 to the substrate 1 with adhesive resin, solder, etc., making the process complicated. There were many steps involved.

また、IC部品から複数本のリード線11が突出してい
るので、自動実装を行いにくい形状をしていた。
Furthermore, since a plurality of lead wires 11 protrude from the IC component, the shape makes automatic mounting difficult.

しかして、本発明の目的は、高周波特性が良好で半導体
素子の気密封止性にも優れたICチップを提供すると共
にそのコストダウンを図ることにある。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an IC chip that has good high frequency characteristics and excellent hermetic sealing of a semiconductor element, and to reduce the cost thereof.

〔課趙を解決するための手段〕[Means to solve the problem]

本発明のICチップは、基板の側面にリードレスタイプ
の側面電極を形成すると共に基板の上面及び下面にそれ
ぞれ前記側面電極と導通した上面電極及び下面電極を形
成し、この基板の上面に半導体素子を搭載して前記上面
電極と半導体素子との間を結線し、前記基板の上面に封
止樹脂をモールドすることによって前記半導体素子を気
密的に封止したことを特徴としている。
In the IC chip of the present invention, a leadless type side electrode is formed on the side surface of the substrate, and an upper surface electrode and a lower surface electrode are formed on the upper surface and the lower surface of the substrate, respectively, which are electrically connected to the side surface electrode, and a semiconductor element is formed on the upper surface of the substrate. The semiconductor device is characterized in that a wire is mounted between the upper surface electrode and the semiconductor element, and the semiconductor element is hermetically sealed by molding a sealing resin on the upper surface of the substrate.

〔作用〕[Effect]

本発明にあっては、基板の側面にリードレスタイプの側
面電極を設けたので、従来のようなリード線が不要にな
って基板とリード線との間の接合部分がなくなり、この
ため接合部分での寄生インピーダンスがなくなってIC
チップの高周波特性が良好になる。更に、リード線を用
いることなく、基板の側面に形成された側面電極を直接
プリント基板等にはんだ付けすることによって配線長を
短くできるので、配線インピーダンスが小さくなり、こ
のためはんだ付は時の位置ずれやはんだの付着の仕方に
よる回路特性への影響を小さくでき、安定した高周波特
性を得ることができる。
In the present invention, since a leadless type side electrode is provided on the side surface of the substrate, the conventional lead wire is no longer required and there is no joint between the board and the lead wire. The parasitic impedance at the IC is eliminated.
The high frequency characteristics of the chip are improved. Furthermore, the wiring length can be shortened by directly soldering the side electrodes formed on the side of the board to the printed circuit board, etc. without using lead wires, which reduces wiring impedance. The influence on circuit characteristics due to misalignment and solder attachment method can be reduced, and stable high frequency characteristics can be obtained.

また、封止樹脂をモールドすることによって半導体素子
を封止しているので、封止部分の接触面積が大きくて確
実に気密封止を行え、不良品の発生率を小さくすること
ができる。
Further, since the semiconductor element is sealed by molding the sealing resin, the contact area of the sealing portion is large, so that airtight sealing can be performed reliably, and the incidence of defective products can be reduced.

しかも、リードレスタイプの側面電極を設けて側面電極
を直接にはんだ付けするようにしたので、リード線が不
要になると共にリード線を基板に接合する作業やリード
線の不要部分を切断する作業等も不要になる。また、基
板上面の半導体素子を封止樹脂のモールドによって封止
しているので、例えば封止樹脂をボッティング等によっ
て基板上面に供給して簡単に封止を行うことができ、従
来のようなキャップが不要になると共にキャップを基板
の上に供給する作業やキャップを基板に接合する作業等
もなくすことができる。したがって、製造工程数及び実
装工程数を大幅に削減できると共に各工程の作業も簡単
になり、材料費も削減でき、ICチップのコストダウン
を図ることができるものである。
Moreover, since we have provided a leadless type side electrode and can directly solder the side electrode, there is no need for lead wires, and the work of joining the lead wires to the board and cutting the unnecessary parts of the lead wires is easier. will also become unnecessary. In addition, since the semiconductor element on the top surface of the substrate is sealed with a mold of sealing resin, it is possible to easily perform sealing by supplying the sealing resin to the top surface of the substrate by, for example, botting. This eliminates the need for a cap, and also eliminates the work of supplying the cap onto the substrate, the work of bonding the cap to the substrate, etc. Therefore, the number of manufacturing steps and the number of mounting steps can be significantly reduced, the work in each step can be simplified, the material cost can also be reduced, and the cost of the IC chip can be reduced.

また、リード線を無くしたことによってICチップの形
状が単純になり、また小形化されるので、ICチップを
テープに保持させてテーピングすることができ、自動実
装にも対応できる。そして、自動実装機によって自動実
装することによってチップの実装位置精度が向上し、回
路全体の特性バラツキを小さくでき、量産も可能になる
Furthermore, by eliminating the lead wire, the shape of the IC chip becomes simpler and smaller, so the IC chip can be held and taped with tape, and it can also be used for automatic mounting. Automatic mounting using an automatic mounting machine improves chip mounting position accuracy, reduces variations in characteristics of the entire circuit, and enables mass production.

〔実施例〕〔Example〕

以下、本発明の実施例を添付図に基づいて詳述する。 Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

基板1は、AQ203やS+02−Ba0−AQ20.
等のセラミック材料を焼成したものであり、第1図に示
すように、基板1には導電ペーストの印刷及び焼き付け
によって複数個の金属電極が形成されている。各電極は
、上面電極3と側面電極2と下面電極6とを一体に形成
されたものである。この基板1の上面には、半導体素子
4が搭載されており、半導体素子4の電極と上面電極3
との間はワイヤー7によりボンディングされている。さ
らに、基板1の上面にボッティング等の方法によって液
体状の封止樹脂5を付着させ、この封止樹脂5を硬化さ
せて半導体素子4を気密的に封止しである。
The substrate 1 is AQ203 or S+02-Ba0-AQ20.
As shown in FIG. 1, a plurality of metal electrodes are formed on a substrate 1 by printing and baking a conductive paste. Each electrode is formed by integrally forming a top electrode 3, a side electrode 2, and a bottom electrode 6. A semiconductor element 4 is mounted on the upper surface of the substrate 1, and an electrode of the semiconductor element 4 and an upper surface electrode 3 are mounted on the upper surface of the substrate 1.
A wire 7 is used for bonding. Furthermore, a liquid sealing resin 5 is attached to the upper surface of the substrate 1 by a method such as botting, and the sealing resin 5 is cured to airtightly seal the semiconductor element 4.

ここで用いられている封止樹脂5は低誘電率のものであ
り、これにより高周波特性の劣化を極力抑制している6
例えばIMI(zの周波数で3.5以下の比誘電率を持
つものが最適である。また、ボッティング成形時におけ
る封止樹脂5の垂れを防止するため、高粘度(50cp
s以上)の樹脂が用いられている。具体的には、エポキ
シ樹脂と酸無水物系硬化樹脂、無機質充填材を主成分と
する樹脂を封止樹脂5として用いている。
The sealing resin 5 used here has a low dielectric constant, thereby suppressing deterioration of high frequency characteristics as much as possible 6
For example, it is optimal to use a material with a dielectric constant of 3.5 or less at the frequency of IMI (z).Also, in order to prevent the sealing resin 5 from dripping during botting molding, a material with a high viscosity (50 cp
s or more) is used. Specifically, a resin whose main components are an epoxy resin, an acid anhydride-based cured resin, and an inorganic filler is used as the sealing resin 5.

しかして、上記のICチップ8は、リード線がないので
、第1図に示すように単純な形状を有しており、外形寸
法も小さくなっている。したがって、例えばテープ(図
示せず)の間に挟むようにして保持させ、連続的にテー
ピングされた表面実装用チップとすることができる。よ
って、実装時にはテーピングされたICチップ8を自動
実装機に連続的に供給し、自動実装することができる。
Since the IC chip 8 has no lead wire, it has a simple shape as shown in FIG. 1, and its external dimensions are small. Therefore, for example, it can be held between tapes (not shown) to form a continuously taped surface mounting chip. Therefore, at the time of mounting, the taped IC chips 8 can be continuously supplied to the automatic mounting machine, and the IC chips 8 can be automatically mounted.

こうして自動実装すれば、部品の実装位置精度が向上し
、回路全体の特性バラツキを抑えることができる。さら
に、自動実装すれば、量産が可能となり、量産の効果と
してコストダウンを図ることができる。
Automatic mounting in this manner improves the accuracy of component mounting positions and suppresses variations in characteristics of the entire circuit. Furthermore, automatic mounting enables mass production, and as an effect of mass production, it is possible to reduce costs.

また、実装時には、ICチップ8は、配線導体10の上
に下面電極6を重ねるようにしてプリント基板9の上に
実装され、第4図に示すように側面電極2を直接配線導
体10にはんだ17により接合される。したがって、配
線長を最も短くでき、配線インピーダンスを小さくして
安定した高周波特性を得られるのである。なお、基板1
には、下面電極6も設けであるので、側面電極2だけで
なく下面電極6も配線導体10にはんだ付けされ、はん
だ付けが確実になる。
Furthermore, during mounting, the IC chip 8 is mounted on the printed circuit board 9 with the bottom electrode 6 overlapping the wiring conductor 10, and the side electrode 2 is soldered directly to the wiring conductor 10 as shown in FIG. 17. Therefore, the wiring length can be minimized, wiring impedance can be reduced, and stable high frequency characteristics can be obtained. In addition, substrate 1
Since the lower surface electrode 6 is also provided, not only the side electrode 2 but also the lower surface electrode 6 is soldered to the wiring conductor 10, thereby ensuring reliable soldering.

従来にあっては、封止樹脂を用いて封止した場合には高
周波特性の劣化が問題となり、実用性がないとされてい
たが、本発明にあっては、封止樹脂とリードレスタイプ
の側面電極とを組み合わせることにより封止樹脂を用い
ることが実用上可能になった。すなわち、封止樹脂によ
り高周波特性の劣化が見られても、リードレスタイプの
側面電極による高周波特性の改善効果のほうが大きいの
で、全体としては高周波特性が良好となっており、実用
化が可能になったものである。このため、封止樹脂を使
用することによる効果を実用化することも可能になった
のである。
In the past, when sealing was performed using a sealing resin, deterioration of high frequency characteristics was a problem and it was considered to be impractical, but in the present invention, the sealing resin and leadless type It has become practically possible to use sealing resin in combination with side electrodes. In other words, even if the high-frequency characteristics deteriorate due to the sealing resin, the improvement effect of the leadless type side electrodes on the high-frequency characteristics is greater, so the high-frequency characteristics are good overall, making it possible to put it into practical use. It has become. For this reason, it has become possible to put into practical use the effects of using sealing resin.

上記実施例においては、エポキシ樹脂系材料の封止樹脂
について説明したが、封止樹脂としてはポリイミド樹脂
系材料のものを用いてもよい、また、基板材質と封止樹
脂との熱膨張係数の差により、ワイヤーの断線や封止樹
脂のクラックが発生する場合には、これらの封止樹脂を
多重に塗布して、この影響を防ぐことも可能である。
In the above embodiment, the sealing resin made of epoxy resin material was explained, but polyimide resin material may also be used as the sealing resin, and the coefficient of thermal expansion between the substrate material and the sealing resin If the difference causes wire breakage or cracks in the sealing resin, it is possible to prevent this effect by applying multiple layers of these sealing resins.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、リード線を不要にすることによって基
板との接合部分における寄生インピーダンスをなくすこ
とができ、ICチップの高周波特性を良好にすることが
できる。さらに、リードレスタイプの側面電極をプリン
ト基板等に直接はんだ付けすることによって配線インピ
ーダンスを小さくでき、−層ICチップの高周波特性が
向上する。また、封止樹脂のモールドによって半導体素
子を確実に気密封止することができ、不良品の発生を減
らすことができる。しかも、リード線やキャップが不要
で製造工程数及び実装工程数を大幅に低減することがで
きると共に材料費を削減でき、ICチップのコストダウ
ンを図ることができる。また、ICチップが小形化され
、形状も単純にできるので、テーピングが可能になり、
自動実装機による自動実装にも適した表面実装用の部品
となる。
According to the present invention, by eliminating the need for lead wires, parasitic impedance at the junction with the substrate can be eliminated, and the high frequency characteristics of the IC chip can be improved. Furthermore, by directly soldering the leadless type side electrodes to a printed circuit board or the like, the wiring impedance can be reduced, and the high frequency characteristics of the -layer IC chip are improved. Moreover, the semiconductor element can be reliably hermetically sealed by molding with the sealing resin, and the occurrence of defective products can be reduced. Moreover, since lead wires and caps are not required, the number of manufacturing steps and mounting steps can be significantly reduced, and material costs can be reduced, leading to a reduction in the cost of IC chips. In addition, IC chips have become smaller and have a simpler shape, making it possible to tape them.
It is a surface mount component suitable for automatic mounting using an automatic mounting machine.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す断面図、第2図は同上
の実装状態を示す説明図、第3図は従来例の部分断面図
、第4図は同上の実装状態を示す説明図である。 1・・・基板 3・・・上面電極 5・・・封止樹脂 2・・・側面電極 4・・・半導体素子 6・・・下面電極 特許出願人 株式会社 村田製作所 代理人  弁理士 中 野 雅 房 真 ワ
Fig. 1 is a sectional view showing an embodiment of the present invention, Fig. 2 is an explanatory view showing the mounting state of the above, Fig. 3 is a partial sectional view of the conventional example, and Fig. 4 is an explanatory drawing showing the mounting state of the same. It is a diagram. 1...Substrate 3...Top electrode 5...Sealing resin 2...Side electrode 4...Semiconductor element 6...Bottom electrode Patent applicant Murata Manufacturing Co., Ltd. Agent Patent attorney Masaru Nakano Fusamanwa

Claims (1)

【特許請求の範囲】[Claims] (1)基板の側面にリードレスタイプの側面電極を形成
すると共に基板の上面及び下面にそれぞれ前記側面電極
と導通した上面電極及び下面電極を形成し、この基板の
上面に半導体素子を搭載して前記上面電極と半導体素子
との間を結線し、前記基板の上面に封止樹脂をモールド
することによって前記半導体素子を気密的に封止したこ
とを特徴とするICチップ。
(1) A leadless type side electrode is formed on the side surface of the substrate, and an upper surface electrode and a lower surface electrode that are electrically connected to the side electrode are formed on the upper surface and the lower surface of the substrate, respectively, and a semiconductor element is mounted on the upper surface of this substrate. An IC chip characterized in that the semiconductor element is hermetically sealed by connecting the upper surface electrode and the semiconductor element and molding a sealing resin on the upper surface of the substrate.
JP23317988A 1988-09-18 1988-09-18 Ic chip Pending JPH0281460A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23317988A JPH0281460A (en) 1988-09-18 1988-09-18 Ic chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23317988A JPH0281460A (en) 1988-09-18 1988-09-18 Ic chip

Publications (1)

Publication Number Publication Date
JPH0281460A true JPH0281460A (en) 1990-03-22

Family

ID=16950969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23317988A Pending JPH0281460A (en) 1988-09-18 1988-09-18 Ic chip

Country Status (1)

Country Link
JP (1) JPH0281460A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668406A (en) * 1994-05-31 1997-09-16 Nec Corporation Semiconductor device having shielding structure made of electrically conductive paste
US5729437A (en) * 1994-06-22 1998-03-17 Seiko Epson Corporation Electronic part including a thin body of molding resin

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668406A (en) * 1994-05-31 1997-09-16 Nec Corporation Semiconductor device having shielding structure made of electrically conductive paste
US5729437A (en) * 1994-06-22 1998-03-17 Seiko Epson Corporation Electronic part including a thin body of molding resin

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