JPH0280308A - Production of boron nitride powder having low crystallinity - Google Patents
Production of boron nitride powder having low crystallinityInfo
- Publication number
- JPH0280308A JPH0280308A JP22750088A JP22750088A JPH0280308A JP H0280308 A JPH0280308 A JP H0280308A JP 22750088 A JP22750088 A JP 22750088A JP 22750088 A JP22750088 A JP 22750088A JP H0280308 A JPH0280308 A JP H0280308A
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- powder
- heating
- washing
- nitride powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 70
- 229910052582 BN Inorganic materials 0.000 title claims description 67
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 67
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000010438 heat treatment Methods 0.000 claims abstract description 52
- 238000005406 washing Methods 0.000 claims abstract description 31
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 24
- 239000011261 inert gas Substances 0.000 claims abstract description 11
- 229910052783 alkali metal Inorganic materials 0.000 claims description 18
- 150000001340 alkali metals Chemical class 0.000 claims description 18
- -1 alkaline earth metal borate Chemical class 0.000 claims description 18
- 239000003638 chemical reducing agent Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 25
- 239000002253 acid Substances 0.000 abstract description 22
- 229910052500 inorganic mineral Inorganic materials 0.000 abstract description 17
- 239000011707 mineral Substances 0.000 abstract description 17
- 150000001342 alkaline earth metals Chemical class 0.000 abstract description 14
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 7
- 239000003513 alkali Substances 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004202 carbamide Substances 0.000 abstract description 2
- 229910021538 borax Inorganic materials 0.000 abstract 1
- 235000010339 sodium tetraborate Nutrition 0.000 abstract 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 description 27
- 239000002994 raw material Substances 0.000 description 20
- 150000001642 boronic acid derivatives Chemical class 0.000 description 15
- 235000010755 mineral Nutrition 0.000 description 15
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 7
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000005121 nitriding Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 3
- 239000004327 boric acid Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052810 boron oxide Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052878 cordierite Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- MOWNZPNSYMGTMD-UHFFFAOYSA-N oxidoboron Chemical class O=[B] MOWNZPNSYMGTMD-UHFFFAOYSA-N 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000012254 powdered material Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 206010042772 syncope Diseases 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はニューセラミックスの一種である窒化ホウ素焼
結体の原料として好適な、窒化ホウ素扮末の製造方法に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for producing boron nitride powder, which is suitable as a raw material for boron nitride sintered bodies, which is a type of new ceramics.
(従来の技術及び発明が解決しようとする課題)窒化ホ
ウ素は化学的、熱的に安定で、優れた・l気絶様性を存
しているので、高温潤滑剤、fJ[型材などの用途の他
に、その焼結体はいわゆるニューセラミックスの一つで
あり、耐熱耐食材料や電気関係部材として、今後界4允
展が期待される材料である。(Problems to be solved by the prior art and the invention) Boron nitride is chemically and thermally stable and has excellent fainting properties. In addition, the sintered body is one of the so-called new ceramics, and is a material that is expected to be widely used in the future as a heat-resistant and corrosion-resistant material and electrical components.
窒化ホウ素焼結体は窒化ホウ素粉末を焼結して得られる
が、窒化ホウ″+:わ)末は焼結性のよい低結晶性のも
のが要求される。Boron nitride sintered bodies are obtained by sintering boron nitride powder, but the boron nitride powder is required to have good sinterability and low crystallinity.
窒化ホウ素粉末を工業的に製造する方法としてはt)ホ
ウ酸、ホウ酸塩、ホウ素酸化物等をアンモニアガスで還
元窒化する方法、2)ホウ酸、ホウ酸塩、ホウ素酸化物
等のホウ素化合物と含窒素化合物の混合物を、窒素ガス
、アンモニアガス等の不活性ガスまたは還元性ガス雰囲
気中で還元窒化する方法がある。Methods for industrially producing boron nitride powder include t) a method of reducing and nitriding boric acid, borates, boron oxides, etc. with ammonia gas; 2) boron compounds such as boric acid, borates, boron oxides, etc. There is a method of reducing and nitriding a mixture of nitrogen and nitrogen-containing compounds in an inert gas or reducing gas atmosphere such as nitrogen gas or ammonia gas.
これらの方法の中で低結晶性窒化ホウ素粉末を得る方法
としては、アルカリ金属またはアルカリ土類金属のホウ
酸塩と含窒素化合物との粉末を、650〜+100’C
という比較的低温で加熱する方法が好適である。しかし
ながら、この方法で得られた低結晶性窒化ホウ素粉末は
、原料ホウ酸塩に由来するアルカリ金属またはアルカリ
土類金属が多量に残存しているので、かかる粉末を焼結
体の原料とした場合には得られる焼結体の強度等が低下
するので問題である。Among these methods, a method for obtaining a low-crystalline boron nitride powder is to heat a powder of an alkali metal or alkaline earth metal borate and a nitrogen-containing compound at 650 to +100'C.
A method of heating at a relatively low temperature is suitable. However, the low-crystalline boron nitride powder obtained by this method still contains a large amount of alkali metal or alkaline earth metal derived from the raw material borate, so if such powder is used as a raw material for a sintered body, This is a problem because the strength etc. of the obtained sintered body decreases.
窒化ホウ素粉末中のアルカリ金属またはアルカリ土類金
属を除去する方法として、窒化ホウ素粉末を塩酸、硫酸
、硝酸等の希鉱酸水溶液で洗浄する方法が知られている
(特開昭61−63505号公報)。As a method for removing alkali metals or alkaline earth metals from boron nitride powder, a method is known in which boron nitride powder is washed with a dilute mineral acid aqueous solution such as hydrochloric acid, sulfuric acid, or nitric acid (Japanese Patent Laid-Open No. 61-63505). Public bulletin).
しかしながら本発明者等の実験では、この方法で窒化ホ
ウ素i5)末を希鉱酸で洗浄すると、原料ホウ酸塩に由
来する金属の残存量は6′αかに減少するものの十分で
はなく、なお原子IA算で1100011pp以上もの
金属が残存することを確認した。However, in experiments conducted by the present inventors, when boron nitride i5) powder is washed with dilute mineral acid using this method, the remaining amount of metal derived from the raw material borate is reduced by 6'α, but it is not sufficient. It was confirmed that more than 1,100,011 pp of metal remained based on atomic IA calculation.
一方、上記の方法において金属ホウ酸塩に替えてホウ酸
を原料とする方法もあるが、加熱温度が上記の範囲では
水に溶は易い無定形の窒化ホウ素粉末が多量に生成する
ので不都合であり、加熱温度を上y−させると結晶化度
が進み、低結晶性のものが得られないという問題がある
。On the other hand, there is a method in which boric acid is used as a raw material instead of metal borate in the above method, but this is inconvenient because a large amount of amorphous boron nitride powder, which is easily soluble in water, will be produced if the heating temperature is within the above range. However, when the heating temperature is raised, the degree of crystallinity increases and there is a problem that a product with low crystallinity cannot be obtained.
本発明者等はかかる状況に鑑み、窒化ホウ素焼結体の原
料として好適な、金属含有量の少ない低結晶性窒化ホウ
素粉末を得ることを目的として鋭意検討を重ねた結果、
アルカリ金属またはアルカリ土類金属のホウ酸塩と含窒
素化合物の粉末を、比較的低温度で加熱して得た低結晶
性窒化ホウ素粉末を、再び同程度の温度に加熱した後洗
浄すれば上記[1的が達成できることを見い出し、本発
明を完成するに至ったものである。In view of this situation, the present inventors have conducted extensive studies with the aim of obtaining low-crystalline boron nitride powder with a low metal content, which is suitable as a raw material for boron nitride sintered bodies.
The above can be obtained by heating low crystalline boron nitride powder obtained by heating a powder of an alkali metal or alkaline earth metal borate and a nitrogen-containing compound at a relatively low temperature, heating it again to the same temperature, and then washing it. [We have discovered that one objective can be achieved and have completed the present invention.
即ら本発明は、アルカリ金属またはアルカリ土類金属の
ホウ酸塩と含窒素化合物のむ)末を650〜1100℃
の温度に加熱したのち洗浄して得られる低結晶性窒化ホ
ウ素粉末を、不活性ガスまたは還元性ガス雰囲気下で、
あるいは差付き容器中で、再び500−1100″Cの
t−度に加熱したのら洗浄することを特徴とする低結晶
性窒化ホウ素粉末の製造方法を提1共するものである。That is, in the present invention, a powder containing an alkali metal or alkaline earth metal borate and a nitrogen-containing compound is heated at 650 to 1100°C.
The low-crystalline boron nitride powder obtained by heating to a temperature of
Alternatively, the present invention provides a method for producing a low-crystalline boron nitride powder, which is characterized in that the powder is heated again to 500-1100''C in a container with a stopper and then washed.
以下、本発明の詳細な説明する。 The present invention will be explained in detail below.
本発明において使用するアルカリ金属またはアルカリ土
類金属のホウ酸塩は、ナトリウム、カリウム、マグネシ
ウム、カルシウム等のホウ酸塩〔以下、これらを総称し
て原料ホウ酸塩類と記す〕が挙げられる。The borates of alkali metals or alkaline earth metals used in the present invention include borates of sodium, potassium, magnesium, calcium, etc. (hereinafter, these are collectively referred to as raw material borates).
原料ホウ酸塩類は特に高純度である必要はなく、通常重
版の工業用の品質のものが好適に使用される。また、原
料ホウ酸塩類には結晶水の有無によって、結晶水塩と無
水塩とがある0本発明においてはその何れも使用可能で
あるが、無水塩が好ましい、更に、原料ホウ酸塩類は、
含窒素化合物と良好に混合するためには粉末状のものが
好ましいが、特に微細化する必要はない。The raw material borates do not need to be of particularly high purity, and usually reprinted industrial quality ones are preferably used. In addition, depending on the presence or absence of crystallization water, the raw material borates can be either crystalline water salts or anhydrous salts.In the present invention, either of these can be used, but anhydrous salts are preferable.
In order to mix well with the nitrogen-containing compound, it is preferable to use powder, but it is not necessary to make it particularly fine.
含窒素化合物としては、尿素、メラミン等のようにN1
(2基を持つ有機化合物が使用される。この含窒素化合
物も原料ホウ酸塩類と同様に、通常重版の工業用の品質
のものが好適に使用される。また、原料ホウ酸塩!iと
同様に粉末状のものが好ましい。As nitrogen-containing compounds, N1 such as urea, melamine, etc.
(An organic compound having two groups is used. Similar to the raw material borates, industrial quality, usually reprinted, nitrogen-containing compounds are preferably used. Similarly, powdered materials are preferred.
原料ホウ酸塩類と含窒素化合物との混合割合は、N/B
原子比としζ1.0〜4,0、好ましくは1.5〜3.
0で実施される。The mixing ratio of raw material borates and nitrogen-containing compounds is N/B.
The atomic ratio is ζ1.0-4.0, preferably 1.5-3.
Implemented at 0.
次に本発明では、原料ホウ酸塩類と含窒素化合物との混
合物わ)末を650〜110(1℃、好ましくは750
〜1000℃の温度に加熱して、原料ホウ酸塩用中のホ
ウ素原子を還元反応により窒化させて、(l(結晶性窒
化ホウ素粉末を製造する。しかして、記原料ホウ酸塩類
と含窒素化合物との混合粉末の加熱は、従来公知の方法
である窒素ガス等の不活性ガスまたはアンモニアガス等
の還元性ガス雰U)1気下で行なうか、あるいは本発明
者等が先に出願した特願昭62−174751号の方法
である、蓋付き容器中で行なうか、何れかの方法で実h
fliする。Next, in the present invention, the powder of the mixture of the raw material borates and the nitrogen-containing compound is heated to 650 to 110°C (1°C, preferably 750°C).
By heating to a temperature of ~1000°C, the boron atoms in the raw material borate are nitrided by a reduction reaction to produce crystalline boron nitride powder. The mixed powder with the compound is heated by a conventionally known method under an atmosphere of an inert gas such as nitrogen gas or a reducing gas such as ammonia gas, or by a method previously proposed by the present inventors. The method of Japanese Patent Application No. 174751/1982 is to carry out the process in a container with a lid, or by any of the following methods.
fli.
尚、上記加熱を苦付き容器中で行なう場合には、雰囲気
を必ずしも不活性ガスまたは還元性ガスとする必要はな
い。その理由は、原料ホウ酸塩類の窒化反応及び過剰の
含窒素化合物の熱分解によりアンモニア(Nl+、)ガ
ス、炭酸ガス(Goり、水蒸気等が発生して苦付き容器
内が自ずと不活性ガスないし還元性ガス雰囲気となるか
らである。In addition, when the above-mentioned heating is performed in a fermenting container, the atmosphere does not necessarily have to be an inert gas or a reducing gas. The reason for this is that ammonia (Nl+) gas, carbon dioxide gas, water vapor, etc. are generated due to the nitriding reaction of the raw material borates and the thermal decomposition of excess nitrogen-containing compounds, which naturally causes the inside of the container to become inert gas. This is because a reducing gas atmosphere is created.
上記加熱において、加熱温度が650℃未満では窒化反
応が遅延し、未反応の原料ホウ酸塩類が残存するので不
都合である。逆に加熱温度が1100℃を越える温度で
は、得られる窒化ホウ素の結晶化が進み、低結晶性のも
のが得られないので、これまた不都合である。In the above heating, if the heating temperature is lower than 650° C., the nitriding reaction is delayed and unreacted raw material borates remain, which is disadvantageous. On the other hand, if the heating temperature exceeds 1100° C., crystallization of the resulting boron nitride will proceed, making it impossible to obtain a product with low crystallinity, which is also disadvantageous.
加熱時間は上記加熱温度によって異なる。加熱温度が6
50〜800℃では4〜7時間が必要であり、800−
1100℃では1〜4時間でよい、しかし、上記加熱を
蓋付き容器中で行う場合には、容器の大きさや原料ホウ
酸塩類と含窒素化合物の充填量によって、加熱時間を延
長する必要がある。The heating time varies depending on the heating temperature. Heating temperature is 6
At 50-800℃, 4-7 hours are required;
At 1100°C, 1 to 4 hours is sufficient. However, if the above heating is performed in a container with a lid, the heating time may need to be extended depending on the size of the container and the amount of raw material borates and nitrogen-containing compounds. .
加熱装置としては、加熱を不活性ガスまたは還元性ガス
雰囲気下で行なう場合には、内部を上記ガス雰囲気とす
ることができる電気炉等が用いられるが、蓋付き容器中
で加熱する場合には、雰囲気を必ずしも不活性ガスまた
は還元性ガスとする必要はないので、電気炉等の外に、
シャトルキルンのような回分式の加熱炉や、1−ンネル
キルンのような連続式の加熱炉も使用することができる
。As a heating device, when heating is performed under an inert gas or reducing gas atmosphere, an electric furnace or the like that can create the above gas atmosphere inside is used, but when heating is performed in a container with a lid, an electric furnace or the like is used. Since the atmosphere does not necessarily have to be an inert gas or reducing gas,
Batch-type heating furnaces such as shuttle kilns and continuous heating furnaces such as 1-thin flannel kilns can also be used.
特に大量生産するためには、トンネルキルンのような連
続式の加熱炉が好ましい。Particularly for mass production, a continuous heating furnace such as a tunnel kiln is preferred.
しかして上記加熱をシャトルキルンやトンネル・1−ル
ン内で行なう場合には、加熱源は電気ヒーターでもよい
が、ブタンガス、灯油等のような燃料を!!A焼させて
得られる熱風で加熱するのが前便であるので更に好まし
い。However, when the above heating is performed in a shuttle kiln or tunnel/run, the heating source may be an electric heater, but a fuel such as butane gas, kerosene, etc. may be used as the heating source! ! It is more preferable to heat with the hot air obtained by A baking because it is a pre-heating method.
上記において蓋付き容器を使用する場合は、該蓋付き容
器は本発明の加熱温度である650〜1ion゛Cの温
度に耐え得る材質が要求され、かつ耐食111のあるも
のが好ましい、かかる耐食性を6rlえた容2=として
は、アルミナ、チタニア、ジルコニア、シリカ、マグネ
シア、カルシア及びシリカ、アルミナを主成分とするコ
ーディエライト質、ムライト質等の各種セラミックス焼
結体が好適であり、耐熱性ステンレス鋼も使用可能であ
る。When a container with a lid is used in the above, the container with a lid is required to be made of a material that can withstand temperatures of 650 to 1 ion°C, which is the heating temperature of the present invention, and preferably has a corrosion resistance of 111. Various ceramic sintered bodies such as alumina, titania, zirconia, silica, magnesia, calcia and silica, cordierite and mullite whose main component is alumina are suitable for the 6rl volume 2=, and heat-resistant stainless steel. Steel can also be used.
上記蓋付き容器の形状としては、蓋(=jき容器中で発
生した前記のNH3、Co□、水蒸気等のガスが、3K
Td’lき容器内をさほど加圧にすることなく自動的に
該蓋付き容器外に流出し、かつ外部の雰囲気ガスが2G
M付き容器内に流入しないような形状の容器でなければ
ならない。The shape of the container with a lid is such that the gases such as NH3, Co□, water vapor, etc. generated in the container with a lid (=j)
Automatically flows out of the container with a lid without significantly pressurizing the inside of the container, and the external atmospheric gas is 2G.
The container must be shaped so that it will not flow into the container with an M.
従って、該蓋付き容器にあっては蓋は容器本体に載せ置
く形状のものが好ましく、蓋はその自重により容器を密
閉し、しかも容器内に発生したガスは容器内をさほど加
圧にすることなく、その圧力により訛を僅かに上方に持
ら上げそのガスが容器外へtJj出される程度の重量で
ある必要がある。Therefore, in a container with a lid, it is preferable that the lid is placed on the container body, and the lid seals the container by its own weight, and the gas generated inside the container does not pressurize the container too much. The weight must be such that the pressure causes the gas to be lifted slightly upward and the gas to be discharged out of the container.
また、容器上部の蓋と接する面及び蓋の容器と接する面
は、蓋を容器に載せ置いた場合に密接するような面であ
る必要がある。更に、容器の形状は底付きの円筒形とか
重箱の如き方形等任意の形状から選択される。かかる形
状の容器としては例えば第1図〜第4図に示す形状のも
のが挙げられるが、必ずしもこれらに限定されるもので
はない。Further, the surface of the upper part of the container that comes into contact with the lid and the surface of the lid that comes into contact with the container need to be surfaces that come into close contact when the lid is placed on the container. Furthermore, the shape of the container may be selected from any shape, such as a cylindrical shape with a bottom or a rectangular shape like a box. Containers with such shapes include, for example, those shown in FIGS. 1 to 4, but are not necessarily limited thereto.
かくして生成した窒化ホウ素は低結晶性の白色粉末であ
り、これを加熱装置から取り出して洗浄する。The boron nitride thus produced is a white powder with low crystallinity, which is removed from the heating device and washed.
この洗浄は、希鉱酸で洗浄したのち水で洗浄する、特開
昭61−63505号記載の方法を採用するのが好まし
い。For this cleaning, it is preferable to adopt the method described in JP-A No. 61-63505, in which cleaning is performed with dilute mineral acid and then with water.
ここで使用する希鉱酸とは塩酸、硫酸、lil’l酸ζ
りの水?8液であり、その濃度は0.1−10重四%(
以下!1吋%は単に%と記ず)、好ましくは1〜5%で
ある。そして上記でi)られた低結晶性窒化ホウ素粉末
は、希鉱酸で洗浄液のρ11が2以下となるまで洗浄し
た後、次いで水洗を行なうが、水洗は洗浄水のpHが5
以上になるまで行なう、上記希鉱酸による洗浄及び水洗
の方法は特に限定はなく、pHが上記の値になるように
洗浄すればよい。The dilute mineral acids used here are hydrochloric acid, sulfuric acid, lil'l acid ζ
Rino water? 8 liquid, its concentration is 0.1-10% (
below! (1 inch % is not simply written as %), preferably 1 to 5%. The low-crystalline boron nitride powder obtained in i) above is washed with dilute mineral acid until the ρ11 of the washing solution becomes 2 or less, and then washed with water.
There are no particular limitations on the method of washing with the dilute mineral acid and washing with water, which are carried out until the pH reaches the above value.
尚、」二記の希鉱酸による洗浄及び水洗は、常温でも構
わないが20〜80℃の温度で行なうのが好ましい。Note that the washing with dilute mineral acid and washing with water described in "2" may be carried out at room temperature, but is preferably carried out at a temperature of 20 to 80°C.
しかし、例えば低結晶性窒化ホウ素粉末を上記濃度の希
鉱酸中に懸濁させてよく撹1↑した後、濾過し、必要に
応じて更に希鉱酸でpHが2以下になるように洗浄した
後、次いで洗浄水のpHが5以上になるように水洗する
のが簡便である。However, for example, low-crystalline boron nitride powder is suspended in dilute mineral acid at the above concentration, stirred well, filtered, and washed with dilute mineral acid if necessary to bring the pH to 2 or less. After that, it is convenient to wash with water so that the pH of the washing water becomes 5 or more.
かくして洗浄された低結晶性窒化ホウ素粉末は次に乾燥
するが、乾燥は通常公知の乾燥装置を用いて常圧または
減圧で行なう、乾燥して得られた低結晶性窒化ホウ素t
51末は、比表面積が50〜450rrr/gのわ)末
であるものの、アルカリ金属またはアルカリ土類金属が
原子換算で1000重fitppm以上残存している。The thus washed low-crystalline boron nitride powder is then dried, and the drying is usually carried out at normal pressure or reduced pressure using a known drying device.
Although 51 powder is a powder with a specific surface area of 50 to 450 rrr/g, more than 1000 weight ppm of alkali metals or alkaline earth metals remain in terms of atoms.
従って、本発明ではこのアルカリ金属またはアルカリ土
類金属
このアルカリ金属またはアルカリ土類金属の除去は、上
記で得られた乾燥した低結晶性窒化ホウ素粉末を不活性
ガスまたは還元性ガス雰囲気下で、あるいは蓋付き容器
中で、再び500〜1100’Cの温度に加熱したのち
洗浄することで実施される。Therefore, in the present invention, the alkali metal or alkaline earth metal is removed by treating the dried low crystalline boron nitride powder obtained above in an inert gas or reducing gas atmosphere. Alternatively, it can be carried out by heating again to a temperature of 500 to 1100'C in a container with a lid and then washing.
この加夕,さ方法は、原料ホウ酸塩類と含窒素化合物の
混合わ》末を加熱して窒化ホウ素を得る際の加熱と同様
な方法で実施されるが、加熱温度は500〜1100’
C、好ましくは600〜800℃である.加熱温度が5
00゜C未満では、本発明の目的である低結晶性窒化ホ
ウ素粉末中のアルカリ金属またはアルカリ土類金属の除
去が十分でない.加熱温度が逆に1100゜Cを越える
温度では窒化ホウ素の結晶化が起きるので不都合である
.加熱時間は加熱温度によってS■なる.即ら、加熱温
度が500〜800℃では1〜2時間必要であるが、8
00〜1 100″Cの温度では30分間〜1時間で十
分である。This method is carried out in the same manner as in heating a mixture of raw material borates and nitrogen-containing compounds to obtain boron nitride, but the heating temperature is 500-1100'.
C, preferably 600 to 800°C. Heating temperature is 5
If the temperature is below 00°C, the removal of alkali metals or alkaline earth metals from the low-crystalline boron nitride powder, which is the object of the present invention, is not sufficient. Conversely, if the heating temperature exceeds 1100°C, crystallization of boron nitride will occur, which is disadvantageous. The heating time is S■ depending on the heating temperature. That is, when the heating temperature is 500 to 800°C, 1 to 2 hours is required, but 8
At a temperature of 0.00 to 1100"C, 30 minutes to 1 hour is sufficient.
上記の方法で加熱された低結晶性窒化ホウ素粉末は、冷
却した後洗浄、濾過、乾燥する.この際の洗浄は水洗の
みでもよいが、より好ましくは原料ホウ酸塩類と含窒素
化合物との混合粉末を加熱して得られた際の、前記窒化
ホウ素粉末の洗浄と同様に、希鉱酸で洗浄した後水洗す
る方法で実施するのが好ましい.尚、この際の希3ノl
酸の濃度、洗浄時のpll、水洗時のpll、洗浄時の
温度等は、前記の洗浄時と同一の条件で行なうのが好ま
しい。The low-crystalline boron nitride powder heated in the above manner is cooled, then washed, filtered, and dried. At this time, washing may be carried out with water only, but it is more preferable to use dilute mineral acid as in the case of washing the boron nitride powder obtained by heating the mixed powder of the raw material borates and the nitrogen-containing compound. It is preferable to use a method of washing and then rinsing with water. In addition, Nozomi 3 Nol at this time
The acid concentration, PLL during washing, PLL during water washing, temperature during washing, etc. are preferably carried out under the same conditions as in the above-mentioned washing.
濾過、乾燥も同様である。The same applies to filtration and drying.
このようにして得られた窒化ホウ素は、比表面積が50
〜450rrr/gの低結晶性のむ}末である。The boron nitride thus obtained has a specific surface area of 50
It is a powder with low crystallinity of ~450rrr/g.
また、本発明では上記の低結晶性窒化ホウ素籾宋は、洗
浄、加熱、洗浄という工程を繰り返すので、アルカリ金
属またはアルカリ土類金属の含有値が原子換算で150
重量ρρ一以下と少量であり、焼結体の原料として好適
なものである。In addition, in the present invention, the above-mentioned low crystalline boron nitride powder is repeatedly washed, heated, and washed, so that the content of alkali metals or alkaline earth metals is 150% in terms of atoms.
It is small in weight, less than ρρ1, and is suitable as a raw material for a sintered body.
以下、実施例により本発明をより長体的に説明する.尚
、以下において%及びppmは重量75準を表わす。Hereinafter, the present invention will be explained in more detail with reference to Examples. In addition, below, % and ppm represent weight 75 standard.
また実施例において、アルカリ金属またはアルカリ土類
金属の含有量は、原子吸光分析装置により分析した.窒
化ホウ素粉末の比表面積の測定は、窒素吸着法(BET
法)によった。In the examples, the content of alkali metals or alkaline earth metals was analyzed using an atomic absorption spectrometer. The specific surface area of boron nitride powder can be measured using the nitrogen adsorption method (BET).
(According to the law).
実施例1〜4
第1表に示す無水のアルカリ金属またはアルカリ土類金
属のホウ酸塩粉末と含窒素化合物粉末を混合し、これを
内容積3p.のアルミナ質の蓋なしルツボに入れてこの
ルツボを電気炉内に静置し、電気炉内を第1表に示すガ
ス雰囲気及び加熱条件で加熱した後、該ルツボを電気炉
より取り出し自然放冷にて常温まで冷却して窒化ホウ素
を得た。Examples 1 to 4 Anhydrous alkali metal or alkaline earth metal borate powder and nitrogen-containing compound powder shown in Table 1 were mixed, and the mixture was mixed with an internal volume of 3 p. The crucible was placed in an alumina crucible without a lid, and the crucible was placed in an electric furnace. After heating the inside of the electric furnace under the gas atmosphere and heating conditions shown in Table 1, the crucible was taken out of the electric furnace and allowed to cool naturally. Boron nitride was obtained by cooling to room temperature.
この窒化ホウ素をルツボから取り出した後、これを第1
表に示す種類、濃度の鉱酸水溶液11中で撹{1゛シ濾
過した後、再び該鉱酸で洗浄液のpllが2以下になる
まで洗浄した。After taking out this boron nitride from the crucible, it is
After stirring and filtration in a mineral acid aqueous solution 11 of the type and concentration shown in the table, the mixture was washed with the mineral acid again until the pll of the washing solution became 2 or less.
次いで、この窒化ホウ素を洗浄水のpllが5以1にな
るまで水洗した後、乾燥して第1表に示す物性及び星の
窒化ホウ素を得た.乾燥して得られた窒化ホウ素の比表
面積は第1表に示す通りで粉末であった。Next, this boron nitride was washed with water until the pll of washing water became 5 to 1, and then dried to obtain boron nitride with the physical properties shown in Table 1. The specific surface area of the boron nitride obtained by drying was as shown in Table 1, and it was a powder.
この窒化ホウ素む)末を再び容積11の蓋なしルツボに
入れ、これを電気炉内に静置し、電気炉内を第1表に示
すガス雰囲気及び加夕3さ条件で加熱した.加熱終了後
は!hルルツを電気炉より取り出し自然数61にて常温
まで冷却し、該ルツボより窒化ホウ素粉末を取り出した
。This boron nitride powder was again put into an open crucible with a capacity of 11, and this was placed in an electric furnace, and the inside of the electric furnace was heated under the gas atmosphere and heat conditions shown in Table 1. After heating! The crucible was taken out from the electric furnace and cooled to room temperature at a natural number of 61, and the boron nitride powder was taken out from the crucible.
この窒化ホウ素粉末を第1表に示す種類、濃度の鉱酸水
溶液l2中で撹拌し濾過した後、再び該f.酸で洗浄液
のρ11が2以下になるまで洗浄した。This boron nitride powder was stirred and filtered in an aqueous mineral acid solution l2 of the type and concentration shown in Table 1, and then the f. It was washed with acid until the ρ11 of the washing solution became 2 or less.
次に、この窒化ホウ素粉末を洗浄水のpllが5以上に
なるまで水洗した後、乾燥して第1表に示す■の窒化ホ
ウ素粉末を得た。得られた窒化ホウ素粉末中のアルカリ
全屈またはアルカリ土類金属の含有量は、第1表に示す
通り何れも150ppm以下であった。Next, this boron nitride powder was washed with water until the pll of washing water became 5 or more, and then dried to obtain boron nitride powder shown in Table 1. As shown in Table 1, the total content of alkali or alkaline earth metal in the obtained boron nitride powder was 150 ppm or less.
実施例2〜4
第2表に示す無水のアルカリ金属またはアルカリ土類金
属のホウ酸塩粉末と含窟累化合物粉末を混合し、これを
第1図に示す形状で内容積が3e(1) :+ −ティ
エライ17の箆付きルツボに入れ、この益付きルツボを
トンネルキルン内で加熱した。Examples 2 to 4 Anhydrous alkali metal or alkaline earth metal borate powder shown in Table 2 and cave-containing compound powder were mixed, and this was mixed into a powder having an internal volume of 3e(1) in the shape shown in Fig. 1. :+ - The mixture was placed in a Thierai 17 crucible with a kettle, and this crucible with a kiln was heated in a tunnel kiln.
加熱はブクンガスを燃焼しζ得た熱風を用い、第2表に
示す条件で行なった。Heating was carried out under the conditions shown in Table 2 using hot air obtained by burning Bukun gas.
加熱終了後は咳蓋付きルツボをトンネルキルンより取り
出し、自然放冷にて常温まで冷却して窒化ホウ素を得た
。After heating, the crucible with a cough lid was taken out from the tunnel kiln and allowed to cool naturally to room temperature to obtain boron nitride.
この窒化ホウ素を苦付きルツボから取り出した後、これ
を実施例1〜4と同様に、第2表に示1種4式、濃度の
に酸水溶液Il中で撹拌し滅jθした後、再び該鉱酸で
洗浄液のpl+が2以下になるまで洗浄し、次に、この
窒化ホウ素を洗浄水のpHが5以上になるまで水洗した
後、乾燥して第2表に示す物性及びmの窒化ホウ素を得
た。乾燥して得られた窒化ホウ素の比表面積は第2表に
示す通りで粉末であった。After taking out this boron nitride from the crucible, it was stirred and sterilized in an acid aqueous solution Il with a concentration of 1 type 4 formula shown in Table 2, and then the boron nitride was sterilized again in the same manner as in Examples 1 to 4. The boron nitride is washed with mineral acid until the pl+ of the washing solution becomes 2 or less, and then the boron nitride is washed with water until the pH of the washing water becomes 5 or more, and then dried to form boron nitride with the physical properties and m shown in Table 2. I got it. The specific surface area of the boron nitride obtained by drying was as shown in Table 2, and it was a powder.
この窒化ホウ素粉末を内容積1p、の第1図に示す形状
のコーディエライト質の蓋付きルツボに入れ、この苫付
きルツボを上記で使用したトンネルキルン内で熱風を熱
源として、第2表に示す条件で再び加熱した。加熱終了
後は該ルツボをトンネルキルンより取り出し自然放冷に
て常温まで冷却し、該ルツボより窒化ホウ素粉末を取り
出した。This boron nitride powder was placed in a cordierite lidded crucible having an internal volume of 1 p and the shape shown in Figure 1, and the crucible with a lid was placed in the tunnel kiln used above using hot air as a heat source. It was heated again under the conditions shown. After heating, the crucible was taken out from the tunnel kiln and allowed to cool naturally to room temperature, and the boron nitride powder was taken out from the crucible.
この窒化ホウ素粉末を実施例1〜4と同様に、第2表に
示す種類、濃度のFL酸水溶液1N中で撹拌し濾過した
後、再び咳鉱酸で洗浄液のpl+が2以下になるまで洗
浄し、次に洗浄水の1+11が5以上になるまで水洗し
た後、乾燥して第2表に示す量の窒化ホウ素粉末を得た
。得られた窒化ホウ素t5)束中のアルカリ金属または
アルカリ土類金属の含有量は、第2表に示す通り何れも
150ppm以下であった。This boron nitride powder was stirred and filtered in a 1N FL acid aqueous solution of the type and concentration shown in Table 2 in the same manner as in Examples 1 to 4, and then washed again with cough mineral acid until the pl+ of the washing solution became 2 or less. Then, the powder was washed with water until 1+11 of the washing water became 5 or more, and then dried to obtain boron nitride powder in the amount shown in Table 2. The content of alkali metal or alkaline earth metal in the obtained boron nitride t5) bundle was 150 ppm or less as shown in Table 2.
本発明は以上詳細に説明したように、アルカリ金属また
は7゛ルカリ土川金属のホウ酸塩と含窒素化合物から窒
化ホウ素粉末を製造する方法であって、該ホウ酸塩と含
窒素化合物を特定の温度に加り、すし洗浄して得られた
窒化ホウ素粉末を、不ンpr (’1ガスまたは還元性
ガス雰囲気下で、あるいはXi付き容器中で、再び特定
の温度に加熱したのち洗浄するという方法である。As explained in detail above, the present invention is a method for producing boron nitride powder from a borate of an alkali metal or 7-alkali Tsuchikawa metal and a nitrogen-containing compound, the method comprising: The boron nitride powder obtained by heating and washing is heated to a specific temperature again in an atmosphere of non-proprietary gas or reducing gas, or in a container with Xi, and then washed. It's a method.
本発明の方法はこのように、−旦得られた窒化ホウ素粉
末を再度加熱し洗浄するという方法であるので、得られ
る窒化ホウ素粉末は低結晶性で、か・つアルカリ金属ま
たはアルカリ土類金属の含有h1が少量であって、窒化
ホウ素焼結体の原す”1として(侃めて好適である。The method of the present invention is a method in which the previously obtained boron nitride powder is reheated and washed, so the obtained boron nitride powder has low crystallinity, and also contains alkali metals or alkaline earth metals. The amount of h1 contained in the boron nitride sintered body is small, and is therefore suitable as the raw material of the boron nitride sintered body.
第1図〜第4図は、本発明の実施に使用する2Iイ;1
き容器の形状を示す各継断面図である。
を示す。Figures 1 to 4 show 2I;
FIG. 3 is a cross-sectional view showing the shape of the container. shows.
Claims (2)
と含窒素化合物の粉末を650〜1100℃の温度に加
熱したのち洗浄して得られる低結晶性窒化ホウ素粉末を
、不活性ガスまたは還元性ガス雰囲気下で再び500〜
1100℃の温度に加熱したのち洗浄することを特徴と
する低結晶性窒化ホウ素粉末の製造方法。(1) Low-crystalline boron nitride powder obtained by heating a powder of alkali metal or alkaline earth metal borate and nitrogen-containing compound to a temperature of 650 to 1100°C and then washing it with an inert gas or a reducing agent. 500 ~ again under gas atmosphere
A method for producing low-crystalline boron nitride powder, which comprises heating to a temperature of 1100°C and then washing.
と含窒素化合物の粉末を650〜1100℃の温度に加
熱したのち洗浄して得られる低結晶性窒化ホウ素粉末を
、蓋付き容器中で再び500〜1100℃の温度に加熱
したのち洗浄することを特徴とする低結晶性窒化ホウ素
粉末の製造方法。(2) The low-crystalline boron nitride powder obtained by heating the alkali metal or alkaline earth metal borate and nitrogen-containing compound powder to a temperature of 650 to 1100°C and then washing it is re-injected into a container with a lid. A method for producing low-crystalline boron nitride powder, which comprises heating to a temperature of 500 to 1100°C and then washing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22750088A JP2635712B2 (en) | 1988-09-13 | 1988-09-13 | Method for producing low crystalline boron nitride powder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22750088A JP2635712B2 (en) | 1988-09-13 | 1988-09-13 | Method for producing low crystalline boron nitride powder |
Publications (2)
Publication Number | Publication Date |
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JPH0280308A true JPH0280308A (en) | 1990-03-20 |
JP2635712B2 JP2635712B2 (en) | 1997-07-30 |
Family
ID=16861866
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Application Number | Title | Priority Date | Filing Date |
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JP22750088A Expired - Lifetime JP2635712B2 (en) | 1988-09-13 | 1988-09-13 | Method for producing low crystalline boron nitride powder |
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JP (1) | JP2635712B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE41575E1 (en) | 1998-06-02 | 2010-08-24 | Osamu Yamamoto | Crystalline turbostratic boron nitride powder and method for producing same |
-
1988
- 1988-09-13 JP JP22750088A patent/JP2635712B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE41575E1 (en) | 1998-06-02 | 2010-08-24 | Osamu Yamamoto | Crystalline turbostratic boron nitride powder and method for producing same |
Also Published As
Publication number | Publication date |
---|---|
JP2635712B2 (en) | 1997-07-30 |
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