JPH0279551U - - Google Patents
Info
- Publication number
- JPH0279551U JPH0279551U JP15975388U JP15975388U JPH0279551U JP H0279551 U JPH0279551 U JP H0279551U JP 15975388 U JP15975388 U JP 15975388U JP 15975388 U JP15975388 U JP 15975388U JP H0279551 U JPH0279551 U JP H0279551U
- Authority
- JP
- Japan
- Prior art keywords
- source chamber
- ion source
- generates
- microwaves
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 5
- 150000002500 ions Chemical group 0.000 claims 8
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15975388U JPH0279551U (es) | 1988-12-07 | 1988-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15975388U JPH0279551U (es) | 1988-12-07 | 1988-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279551U true JPH0279551U (es) | 1990-06-19 |
Family
ID=31441229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15975388U Pending JPH0279551U (es) | 1988-12-07 | 1988-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279551U (es) |
-
1988
- 1988-12-07 JP JP15975388U patent/JPH0279551U/ja active Pending
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