JPH027652U - - Google Patents

Info

Publication number
JPH027652U
JPH027652U JP8617888U JP8617888U JPH027652U JP H027652 U JPH027652 U JP H027652U JP 8617888 U JP8617888 U JP 8617888U JP 8617888 U JP8617888 U JP 8617888U JP H027652 U JPH027652 U JP H027652U
Authority
JP
Japan
Prior art keywords
mask
substrate
mask holder
exposure device
photosensitive resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8617888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8617888U priority Critical patent/JPH027652U/ja
Publication of JPH027652U publication Critical patent/JPH027652U/ja
Pending legal-status Critical Current

Links

JP8617888U 1988-06-29 1988-06-29 Pending JPH027652U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8617888U JPH027652U (US07922777-20110412-C00004.png) 1988-06-29 1988-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8617888U JPH027652U (US07922777-20110412-C00004.png) 1988-06-29 1988-06-29

Publications (1)

Publication Number Publication Date
JPH027652U true JPH027652U (US07922777-20110412-C00004.png) 1990-01-18

Family

ID=31310823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8617888U Pending JPH027652U (US07922777-20110412-C00004.png) 1988-06-29 1988-06-29

Country Status (1)

Country Link
JP (1) JPH027652U (US07922777-20110412-C00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6339232B2 (US07922777-20110412-C00004.png) * 1976-11-18 1988-08-04 Grace W R & Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6339232B2 (US07922777-20110412-C00004.png) * 1976-11-18 1988-08-04 Grace W R & Co

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