JPH027647Y2 - - Google Patents

Info

Publication number
JPH027647Y2
JPH027647Y2 JP11215484U JP11215484U JPH027647Y2 JP H027647 Y2 JPH027647 Y2 JP H027647Y2 JP 11215484 U JP11215484 U JP 11215484U JP 11215484 U JP11215484 U JP 11215484U JP H027647 Y2 JPH027647 Y2 JP H027647Y2
Authority
JP
Japan
Prior art keywords
tank
plasma
workpiece
processing apparatus
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11215484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125974U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11215484U priority Critical patent/JPS6125974U/ja
Priority to CA000483614A priority patent/CA1249926A/en
Priority to DE19853520924 priority patent/DE3520924A1/de
Priority to US06/744,061 priority patent/US4668479A/en
Priority to AU43492/85A priority patent/AU565026B2/en
Publication of JPS6125974U publication Critical patent/JPS6125974U/ja
Application granted granted Critical
Publication of JPH027647Y2 publication Critical patent/JPH027647Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Nozzles (AREA)
  • Coating By Spraying Or Casting (AREA)
JP11215484U 1984-06-12 1984-07-23 プラズマ処理装置 Granted JPS6125974U (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP11215484U JPS6125974U (ja) 1984-07-23 1984-07-23 プラズマ処理装置
CA000483614A CA1249926A (en) 1984-06-12 1985-06-11 Plasma processing apparatus
DE19853520924 DE3520924A1 (de) 1984-06-12 1985-06-11 Plasmaverfahrensanlage
US06/744,061 US4668479A (en) 1984-06-12 1985-06-12 Plasma processing apparatus
AU43492/85A AU565026B2 (en) 1984-06-12 1985-06-12 Plasma processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11215484U JPS6125974U (ja) 1984-07-23 1984-07-23 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6125974U JPS6125974U (ja) 1986-02-15
JPH027647Y2 true JPH027647Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-23

Family

ID=30671221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11215484U Granted JPS6125974U (ja) 1984-06-12 1984-07-23 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS6125974U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6125974U (ja) 1986-02-15

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