JPH0274371U - - Google Patents
Info
- Publication number
- JPH0274371U JPH0274371U JP15187188U JP15187188U JPH0274371U JP H0274371 U JPH0274371 U JP H0274371U JP 15187188 U JP15187188 U JP 15187188U JP 15187188 U JP15187188 U JP 15187188U JP H0274371 U JPH0274371 U JP H0274371U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- single crystal
- melt
- quartz boat
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 5
- 239000000470 constituent Substances 0.000 claims 2
- 230000009977 dual effect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15187188U JPH069025Y2 (ja) | 1988-11-22 | 1988-11-22 | 化合物半導体単結晶製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15187188U JPH069025Y2 (ja) | 1988-11-22 | 1988-11-22 | 化合物半導体単結晶製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0274371U true JPH0274371U (is) | 1990-06-06 |
| JPH069025Y2 JPH069025Y2 (ja) | 1994-03-09 |
Family
ID=31426295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15187188U Expired - Lifetime JPH069025Y2 (ja) | 1988-11-22 | 1988-11-22 | 化合物半導体単結晶製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069025Y2 (is) |
-
1988
- 1988-11-22 JP JP15187188U patent/JPH069025Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069025Y2 (ja) | 1994-03-09 |
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