JPH0272996U

JPH0272996U -

Info

Publication number: JPH0272996U
Application number: JP1988152362U
Authority: JP
Priority date: 1988-11-22
Filing date: 1988-11-22
Publication date: 1990-06-04
Anticipated expiration: 2003-11-22
Also published as: JPH0624799Y2

Description

[Brief explanation of drawings]

第１図この考案の一実施例を示す平面図、第２
図は第１図の要部を拡大した平面図、第３図は第
２図の正面図、第４図及び第５図はそれぞれＸ方
向固定スケールを示す平面図及び正面図、第６図
及び第７図はそれぞれ第２図の―線及び―
線断面図、第８図は第７図の端面図、第９図ａ
及びｂはそれぞれチヤツク本体の一例を示す平面
図及び断面図、第１０図は閉塞具の一例を示す断
面図、第１１図はチヤツク本体を倒立させた状態
の断面図、第１２図はこの考案を適用し得る縮小
投影露光装置を示す概略構成図、第１３図は従来
例を示す平面図である。図中、１１は縮小投影露光装置、１２は被露光
部材、１３はＸＹＺステージ、１４は縮小レンズ
、１５はレチクル、１６はレチクル載置台、１７
は光源部、３０は載置台、３１は被露光部材保持
装置、３７はチヤツク本体、３８は閉塞具、４１
は被露光部材位置決め装置、４３ＸはＸ方向固定
スケール、４３ＹはＹ方向固定スケール、４４Ｘ
はＸ方向移動スケール、４４ＹはＹ方向移動スケ
ール、５０ａはインチ目盛り、５０ｂはセンチメ
ートル目盛り、５５はストツパねじである。 Figure 1: A plan view showing an embodiment of this invention; Figure 2:
The figure is an enlarged plan view of the main part of Figure 1, Figure 3 is a front view of Figure 2, Figures 4 and 5 are a plan view and front view showing the fixed scale in the X direction, Figures 6 and 5. Figure 7 shows the lines and lines in Figure 2, respectively.
Line sectional view, Figure 8 is an end view of Figure 7, Figure 9a
10 is a sectional view showing an example of an obturator, FIG. 11 is a sectional view of the chuck body in an inverted state, and FIG. 12 is a sectional view showing an example of the chuck body. FIG. 13 is a plan view showing a conventional example. In the figure, 11 is a reduction projection exposure device, 12 is a member to be exposed, 13 is an XYZ stage, 14 is a reduction lens, 15 is a reticle, 16 is a reticle mounting table, and 17
30 is a light source part, 30 is a mounting table, 31 is an exposed member holding device, 37 is a chuck body, 38 is an obturator, 41
is an exposed member positioning device, 43X is a fixed scale in the X direction, 43Y is a fixed scale in the Y direction, 44X
is a moving scale in the X direction, 44Y is a moving scale in the Y direction, 50a is an inch scale, 50b is a centimeter scale, and 55 is a stopper screw.

Claims

[Claims for Utility Model Registration] (1) In an exposure apparatus that exposes a predetermined pattern by placing a member to be exposed on a movable table movable in the X and Y directions, on the member-to-be-exposed surface of the movable table, fixed scales in the X and Y directions that extend along both moving directions of the movable table and are positioned relative to the exposure center; and fixed scales in the X and Y directions that are individually movable in their longitudinal directions; 1. A positioning device for a member to be exposed in an exposure apparatus, comprising an X-direction moving scale and a Y-direction moving scale that is held at the top of the moving table and extends perpendicularly to the longitudinal direction of the moving table. (2) The exposed member positioning device in the exposure apparatus according to claim (1), wherein the fixed scales in the X direction and the Y direction are provided with scales from the center of exposure. (3) The X-direction and Y-direction fixed scale is formed in the shape of a rectangular frame having a pair of side plate parts that maintain a predetermined interval and a connecting rod part that connects the side plate parts at both ends thereof. An exposed member positioning device in the exposure apparatus according to (1) or (2).