JPH0272996U - - Google Patents
Info
- Publication number
- JPH0272996U JPH0272996U JP1988152362U JP15236288U JPH0272996U JP H0272996 U JPH0272996 U JP H0272996U JP 1988152362 U JP1988152362 U JP 1988152362U JP 15236288 U JP15236288 U JP 15236288U JP H0272996 U JPH0272996 U JP H0272996U
- Authority
- JP
- Japan
- Prior art keywords
- directions
- exposed
- moving
- exposure apparatus
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988152362U JPH0624799Y2 (ja) | 1988-11-22 | 1988-11-22 | 露光装置における被露光部材位置決め装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988152362U JPH0624799Y2 (ja) | 1988-11-22 | 1988-11-22 | 露光装置における被露光部材位置決め装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0272996U true JPH0272996U (cs) | 1990-06-04 |
| JPH0624799Y2 JPH0624799Y2 (ja) | 1994-06-29 |
Family
ID=31427221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988152362U Expired - Lifetime JPH0624799Y2 (ja) | 1988-11-22 | 1988-11-22 | 露光装置における被露光部材位置決め装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624799Y2 (cs) |
-
1988
- 1988-11-22 JP JP1988152362U patent/JPH0624799Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0624799Y2 (ja) | 1994-06-29 |