JPH0270618A - Air floating carrying device - Google Patents
Air floating carrying deviceInfo
- Publication number
- JPH0270618A JPH0270618A JP22324088A JP22324088A JPH0270618A JP H0270618 A JPH0270618 A JP H0270618A JP 22324088 A JP22324088 A JP 22324088A JP 22324088 A JP22324088 A JP 22324088A JP H0270618 A JPH0270618 A JP H0270618A
- Authority
- JP
- Japan
- Prior art keywords
- air
- pallet
- track
- rails
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 18
- 239000004020 conductor Substances 0.000 claims abstract description 13
- 238000005339 levitation Methods 0.000 claims description 11
- 239000012530 fluid Substances 0.000 abstract description 8
- 238000004140 cleaning Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000000428 dust Substances 0.000 description 3
- 238000005188 flotation Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Non-Mechanical Conveyors (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野〕
本発明は、例えば半導体製造工場のクリーニングルーム
等に設置される空気浮上搬送装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an air levitation conveyance device installed in, for example, a cleaning room of a semiconductor manufacturing factory.
クリーニングルーム等では、粉塵の発生を防止するため
、摩擦係数の低い搬送装置が使用されており、空気浮上
搬送装置はそのＳ擦係数μが０゜００１程度なので広く
使用されている。In cleaning rooms and the like, transport devices with a low coefficient of friction are used to prevent the generation of dust, and air floating transport devices are widely used because their S friction coefficient μ is about 0°001.
従来の空気浮上搬送装置は第９図及び第１０図に示され
るように、架台１上に中空状の軌道２を直線に敷設し、
該軌道２内にリニアモータの固定子３を適数個設置し、
パレット４に、軌道２の側面をカバーする案内壁５ａ、
５ａを有して軌道２を跨ぐリニアモータの２次導体５を
設け、軌道２内に送り込まれた圧縮空気を軌道２の上面
に穿設した空気噴出孔６から噴出させ、２次導体５の下
面に空気層を形成してパレット４を浮上させ、２次導体
５と軌道２とを非接触状態にしてパレット４を移動させ
ている。As shown in FIGS. 9 and 10, the conventional air levitation conveyance device has a hollow track 2 laid in a straight line on a pedestal 1.
Install an appropriate number of linear motor stators 3 within the track 2,
A guide wall 5a covering the side surface of the track 2 is provided on the pallet 4,
A secondary conductor 5 of the linear motor having a diameter of 5a and straddling the track 2 is provided, and the compressed air sent into the track 2 is ejected from an air outlet 6 drilled in the upper surface of the track 2, and the secondary conductor 5 is An air layer is formed on the lower surface to float the pallet 4, and the pallet 4 is moved with the secondary conductor 5 and the track 2 in a non-contact state.
ところが、上述の構造では、空気消費量が多く、また、
軌道が直線にしか敷設できないので、そのレイアウトに
限界があった。However, the above structure consumes a lot of air, and
Since the track could only be laid in a straight line, there were limits to its layout.
そこで本発明は、空気消費間が少なく、かつ曲線走行や
直角方向に進路変更可能にしてレイアウトの自由度を大
幅に向上させた空気浮上搬送装置を提供することを目的
としている。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an air levitation conveyance device that consumes less air and is capable of traveling around curves and changing course at right angles, thereby greatly improving the degree of freedom in layout.
上記目的達成のため本発明は、軌道より噴出する空気に
よりパレットを浮上させ、該パレットをリニアモータに
て移動させる空気浮上搬送装置において、前記リニアモ
ータの固定子の両側に一対のレールを敷設し、該レール
に、レールとの間に空気通路を形成するとともに、該空
気通路に連通してレールの上面と内側面に圧縮空気を噴
出する微細な中空孔を有する多孔質の流体透過性材を設
けて軌道を構成し、一方、前記パレットには、前記レー
ル上面から噴出する空気を受けてパレットを浮上させる
空気受は面と、レール内側面から噴出する空気を受けて
レール内側面と非接触状態でパレットを案内する案内部
と、リニアモータの２次導体とを設けたことを特徴とし
、これにより、空気消費ｍを従来よりも少なくしており
、また、前記パレットの案内部を直方体に形成すること
により、直線軌道からこれに直交する直線軌道への直角
方向の進路変更可能となり、さらに、前記パレットの案
内部を弾性部材で形成することにより、曲線路の走行も
可能となってレイアウトの自由度が向上する。To achieve the above object, the present invention provides an air levitation conveyance device in which a pallet is levitated by air ejected from a track and the pallet is moved by a linear motor, in which a pair of rails are laid on both sides of the stator of the linear motor. , a porous fluid-permeable material having fine hollow holes forming an air passage between the rail and the rail and communicating with the air passage to eject compressed air to the upper and inner surfaces of the rail. On the other hand, the pallet has an air receiver that receives air ejected from the upper surface of the rail to levitate the pallet, and an air receiver that receives air ejected from the inner surface of the rail and makes no contact with the inner surface of the rail. The invention is characterized in that it is provided with a guide part that guides the pallet in the state and a secondary conductor of the linear motor, thereby reducing air consumption m compared to the conventional one. By forming the pallet, it is possible to change the course in the right angle direction from a straight track to a straight track perpendicular to the straight track.Furthermore, by forming the guide part of the pallet with an elastic member, it is also possible to run on a curved road, which improves the layout. The degree of freedom is improved.
以下、本発明の実施例を第１図乃至第８図に基づいて説
明する。Embodiments of the present invention will be described below with reference to FIGS. 1 to 8.
第１図乃至第３図は本発明の第１実施例を示すもので、
空気浮上装置１０は、直角に屈曲して設置された軌道１
１と、該軌道１１上を移動するパレット１２とで構成さ
れており、軌道１１は、架台１３上にリニアモータの固
定子１４を適数個固設し、該固定子１４の両側に一対の
レール１５゜１５を敷設し、該レール１５に、レール１
５との間に空気通路１６を形成する多孔質の流体透過性
材１７を設けている。1 to 3 show a first embodiment of the present invention,
The air flotation device 10 has a track 1 bent at right angles.
1 and a pallet 12 that moves on the track 11.The track 11 has an appropriate number of linear motor stators 14 fixed on a frame 13, and a pair of linear motor stators 14 on both sides of the stators 14. Lay the rail 15°15, and attach the rail 1 to the rail 15.
A porous fluid permeable material 17 is provided which forms an air passage 16 between the porous material and the material.
該流体透過性材１７は、裏面から表面に連続する微細な
中空孔を有するセラミックス多孔体で、レール１５の側
面に形成された圧縮空気注入０１８から空気通路１６に
注入される空気をレール１５の上面及び内側面に噴出す
る。The fluid-permeable material 17 is a ceramic porous body having fine hollow holes continuous from the back side to the front side, and allows air to be injected into the air passage 16 from the compressed air injection 018 formed on the side surface of the rail 15. Sprays on top and inside surfaces.
尚、実験によれば、上記流体透過性材１７は、１０１角
で２００ Ｋｙの相聞物を１５抑浮上させる性能を有す
る。According to experiments, the fluid-permeable material 17 has the ability to depress and levitate a 200 Ky object by 15 degrees.
パレット１２は軌道１１と略同幅の正方形で、中央部に
下方へ突出する正方形の案内部１２ａが形成され、７ラ
ンジ状の周縁を前記レール１５゜１５の上面から噴出す
る空気を受ける空気受は而１２ｂとしており、案内部１
２ａの底面には、リニアモータの２次導体１２Ｃが設け
られている。The pallet 12 is a square with approximately the same width as the track 11, and has a square guide portion 12a projecting downward in the center thereof, and has seven flange-shaped peripheral edges that serve as air receivers for receiving air jetted from the upper surface of the rails 15. It is designated as 12b, and the guide part 1
A secondary conductor 12C of the linear motor is provided on the bottom surface of 2a.
また、案内部１２ａは、両側のレール１５．１５の内側
面と僅かな間隙を有する幅に形成され、２次導体１２Ｃ
と固定子１４との間も僅かな間隙が生ずる深さに形成さ
れている。Further, the guide portion 12a is formed to have a width that has a slight gap with the inner surfaces of the rails 15.15 on both sides, and the guide portion 12a
The stator 14 is also formed at a depth such that there is a slight gap between the stator 14 and the stator 14.
このように構成された空気浮上搬送装置１０は、レール
１５の側面に形成された圧縮空気注入口１８から空気通
路１６に圧縮空気を注入すると、レール１５の上面から
噴出する空気によりパレット１２が浮上し、リニアモー
タの固定子１４の磁極の切替えによりパレット１２が移
動する。In the air floating conveyance device 10 configured in this way, when compressed air is injected into the air passage 16 from the compressed air inlet 18 formed on the side surface of the rail 15, the pallet 12 is levitated by the air jetted from the upper surface of the rail 15. The pallet 12 is moved by switching the magnetic poles of the stator 14 of the linear motor.
この際に、両側のレール１５．１５の内側面から噴出す
る空気がパレット１２の案内部１２ａに噴きつけられる
ので、該案内部１２ａは両側のレール１５．１５の内側
面と非接触状態でパレット１２を移動させる。At this time, air ejected from the inner surfaces of the rails 15.15 on both sides is blown onto the guide portion 12a of the pallet 12, so that the guide portion 12a is not in contact with the inner surfaces of the rails 15.15 on both sides of the pallet. Move 12.
したがって、パレット１２はレール１５．１５と非接触
状態で移動するので、粉塵の発生を防止できる。Therefore, since the pallet 12 moves without contacting the rails 15.15, generation of dust can be prevented.
また、軌道１１の曲り角では、曲り角に設置された固定
子１４によりパレット１２を浮上状態で停止させ、曲る
ほうの固定子１４により移動させる。この際に、パレッ
ト１２の案内部１２ａが正方形なので、直進してきたと
きの案内部１２ａとは別の面に、両側のレール１５．１
５の内側面から噴出する空気がパレット１２の案内部１
２ａに噴きつけられ、パレット１２はレール１５．１５
と非接触状態で直角に進路を変更できる。Further, at a bend in the track 11, the pallet 12 is stopped in a floating state by a stator 14 installed at the bend, and is moved by the stator 14 on the side of the bend. At this time, since the guide part 12a of the pallet 12 is square, the rails 15.
The air ejected from the inner surface of the pallet 12
2a, the pallet 12 is on the rail 15.15
It is possible to change course at right angles without contacting the vehicle.
したがって、軌１１１のレイアウトの自由度が向上する
。また、流体透過性材１７の空気噴出孔が微細なところ
から、圧縮空気の消費量が少なくてすむ。Therefore, the degree of freedom in layout of the track 111 is improved. Furthermore, since the air ejection holes of the fluid permeable material 17 are minute, the amount of compressed air consumed can be reduced.
尚、直線の軌道とこれに直交する軌道のそれぞれのレー
ルの間隔が異なる場合には、パレットの案内部をそれぞ
れのレールの間隔に合わせた直方体に形成することによ
り、パレットはレールと非接触状態で直角に進路を変更
できる。In addition, if the distance between the rails of a straight track and a track perpendicular to this is different, the pallet can be kept in a non-contact state with the rails by forming the guide part of the pallet into a rectangular parallelepiped that matches the distance between the respective rails. You can change course at right angles.
第４図乃至第７図は本発明の第２実施例を示すもので、
空気浮上装＠２０は、曲線部分を有する軌道２１と、該
軌道２１上を移動するパレット２２とで構成されており
、軌道２１は、前記実施例と同様に、架台２３上に固設
されたりニアモータの固定子２４と、該固定子２４の両
側に敷設される一対のレール２５．２５と、該レール２
５との間に空気通路２６を形成してレール２５に設けら
れる多孔質の流体透過性材２７とで形成されている。4 to 7 show a second embodiment of the present invention,
The air flotation device @20 is composed of a track 21 having a curved portion and a pallet 22 that moves on the track 21.The track 21 is fixedly mounted on a frame 23, as in the previous embodiment. A stator 24 of the near motor, a pair of rails 25 and 25 laid on both sides of the stator 24, and the rail 2
5 and a porous fluid permeable material 27 provided on the rail 25 with an air passage 26 formed therebetween.
パレット２２はレール２５．２５と略同幅に形成され、
両側繰下面をレール２５．２５の上面より噴出する空気
の受は面２２ａとしており、中央部に設けられた４本の
ボルト２２ｂで略へ角形のりニアモータの２次導体２２
Ｇを吊持している。The pallet 22 is formed to have approximately the same width as the rail 25.25,
The receiving surface of the air ejected from the upper surface of the rail 25.25 is the surface 22a, and the secondary conductor 22 of the near rectangular motor is connected by four bolts 22b provided in the center.
He is holding G.
また、パレッｌ−２２の下面と２次導体２２ｃとの間に
は、薄い弾性部材で形成された案内部２２ｄが設けられ
ている。この案内部２２ｄは、断面略正方形で、各側面
に形成された長孔２２ｅに前記ボルト２２ｂを挿通して
いる。Further, a guide portion 22d made of a thin elastic member is provided between the lower surface of the pallet l-22 and the secondary conductor 22c. The guide portion 22d has a substantially square cross section, and the bolt 22b is inserted into a long hole 22e formed on each side surface.
このように構成された案内部２２ｄは、軌道２１の曲線
部分にさしかかると、第７図に示されるように、両側の
レール２５．２５の内側面から噴出する空気を受けて、
レール２５．２５の内側面とは非接触状態で変形し、パ
レット２２の移動を案内する。When the guide portion 22d configured in this way reaches a curved portion of the track 21, as shown in FIG.
It deforms without contacting the inner surface of the rail 25, 25, and guides the movement of the pallet 22.
したがって、曲線部分を含む軌道２１を有する空気浮上
搬送装置２０とすることができ、レイアウトの自由度が
向上する。Therefore, the air floating conveyance device 20 can have a track 21 including curved portions, and the degree of freedom in layout is improved.
第８図は本発明の第３実施例を示すもので、空気浮上搬
送装置３０は、架台３１上に固設されるリニアモータの
固定子３２と、該固定子３２の両側に敷設される中空状
でかつ上面の内側を下方に傾斜させた一対のレール３３
．３３と、該レール３３の傾斜面に設けられる多孔質の
流体透過性材３４とで軌道３５を構成し、レール３３内
部の空気通路３６に注入される空気を流体透過性材３４
からレール３３の上面及び内側面方向に噴出させている
。FIG. 8 shows a third embodiment of the present invention, in which an air floating conveyance device 30 includes a stator 32 of a linear motor fixedly installed on a pedestal 31, and a hollow space installed on both sides of the stator 32. A pair of rails 33 having a shape and having the inside of the upper surface inclined downward.
．． 33 and a porous fluid-permeable material 34 provided on the inclined surface of the rail 33 constitute a track 35, and the air injected into the air passage 36 inside the rail 33 is passed through the fluid-permeable material 34.
The liquid is ejected from the rail 33 toward the upper surface and inner surface.
また、パレット３７は、案内部３７ａの中央底部にリニ
アモータの２次導体３７ｂを有し、２次導体３７ｂの両
側壁を前記流体透過性材３４の傾斜と略同様に傾斜させ
て流体透過性材３４から噴出される空気の空気受は面３
７ｃ、３７ｃとしている。Further, the pallet 37 has a secondary conductor 37b of the linear motor at the center bottom of the guide portion 37a, and both side walls of the secondary conductor 37b are inclined in substantially the same manner as the inclination of the fluid permeable material 34 to provide fluid permeability. The air receiver for the air ejected from the material 34 is the surface 3.
7c and 37c.
このように構成することにより、曲線軌道の走行が可能
で、また、流体透過性材３４やパレット３７の寸法管理
が容易となり、コストダウンが計れる。With this configuration, it is possible to travel on a curved track, and the dimensions of the fluid permeable material 34 and the pallet 37 can be easily controlled, resulting in cost reduction.
本発明の空気浮上搬送装置は以上のように、リニアモー
タの固定子の両側に一対のレールを敷設し、該レールに
、レールとの間に空気通路を形成するとともに、該空気
通路に連通してレールの上面と内側面に空気を噴出する
微細な中空孔を有する多孔質の流体透過性材を設けて軌
道を構成し、該軌道上を移動するパレットには、前記レ
ール上面から噴出する空気を受けてパレットを浮上させ
る空気受は面と、レール内側面から噴出する空気を受け
てレール内側面と非接触状態でパレットを案内する案内
部と、リニアモータの２次導体とを設け、空気通路に注
入される圧縮空気をレールの上面と内側面から噴出させ
てパレットを浮上させ、リニアモータによりパレットを
移動させるので、パレットが軌道と非接触状態で移動し
、粉塵の発生を防止できる。また、圧縮空気が微細な中
空孔を有する多孔質の流体透過性材から噴出されるので
、空気消費量が少なくてすみ、さらに、パレットの案内
部を直方体に形成することにより、該パレットが直角に
屈曲した軌道と非接触状態で移動でき、また、パレット
の案内部を弾性部材で形成することにより、該パレット
を曲線部分を含む軌道と非接触状態で移動させることが
できるので、軌道のレイアウトの自由度を向上できる。As described above, the air levitation conveyance device of the present invention has a pair of rails laid on both sides of the stator of a linear motor, and an air passage is formed between the rails and the rails, and the air passage is connected to the air passage. A track is constructed by providing a porous fluid-permeable material with fine hollow holes that blows air out on the top and inside surfaces of the rail, and pallets moving on the track are exposed to the air that blows out from the top surface of the rail. The air receiver is equipped with a surface, a guide section that receives air ejected from the inner surface of the rail and guides the pallet without contacting the inner surface of the rail, and a secondary conductor of the linear motor. Compressed air injected into the passageway is ejected from the upper and inner surfaces of the rails to levitate the pallet, and the pallet is moved by a linear motor, so the pallet moves without contacting the track, preventing dust from being generated. In addition, since the compressed air is ejected from a porous fluid-permeable material with fine hollow holes, air consumption can be reduced.Furthermore, by forming the guide part of the pallet into a rectangular parallelepiped, the pallet can be rotated at right angles. The pallet can be moved in a non-contact state with a curved track, and by forming the guide part of the pallet with an elastic member, the pallet can be moved in a non-contact state with a track including curved portions, which improves the track layout. The degree of freedom can be improved.
第１図乃至第３図は本発明を直角に屈曲した軌道を有す
る空気浮上搬送装置に適用した第１実施例を示し、第１
図は斜視図、第２図は平面図、第３図は第２図のＩＦ−
ＩＩ断面図、第４図乃至第７図は本発明を曲線軌道を有
する空気浮上搬送装置に適用した第２実施例を示し、第
４図は斜視図、第５図は断面図、第６図はパレットの断
面平面図、第７図は曲線部分を通過する際の案内部の変
形例を示すパレットの断面平面図、第８図は第３実施例
の空気浮上搬送装置の断面図、第９図は従来の空気浮上
搬送装置の斜視図、第１０図は同じく断面図である。
１０．２０．３０・・・空気浮上搬送装置 １１゜２
１．３５・・・軌道 １２．２２．３７・・・パレッ
ト １２ａ、２２ｄ、３７ａ−・・案内部 １２ｂ
、２２ａ３７Ｃ・・・空気量は面 １２ｃ、２２ｃ、
３７ａ・・・リニアモータの２次導体 １４゜２４
．３２・・・リニアモータの固定子 １５，２５．３
３・・・レール １６．２６．３６・・・空気通路
１７，２７．３４・・・流体透過性材特 許 出 願
人 日本車輌製造株式会社ｒ、７゜
代理人 弁理士 木 戸 傳一部 Ｌ同
筋５因
崩７円
第６０
崩８図1 to 3 show a first embodiment in which the present invention is applied to an air levitation conveyance device having a trajectory bent at right angles.
The figure is a perspective view, Figure 2 is a plan view, and Figure 3 is an IF-
II sectional view, FIGS. 4 to 7 show a second embodiment in which the present invention is applied to an air floating conveyance device having a curved trajectory, FIG. 4 is a perspective view, FIG. 5 is a sectional view, and FIG. 6 is a sectional view. 7 is a cross-sectional plan view of the pallet showing a modified example of the guide portion when passing through a curved portion; FIG. 8 is a cross-sectional view of the air floating conveyance device of the third embodiment; FIG. The figure is a perspective view of a conventional air floating conveyance device, and FIG. 10 is a sectional view of the same. 10.20.30... Air levitation conveyance device 11゜2
1.35...Trajectory 12.22.37...Pallet 12a, 22d, 37a-...Guiding part 12b
, 22a37C...Air amount is surface 12c, 22c,
37a... Secondary conductor of linear motor 14゜24
．． 32...Linear motor stator 15, 25.3
3...Rail 16.26.36...Air passage
17, 27. 34...Fluid permeable material patent Applicant Nippon Sharyo Manufacturing Co., Ltd. r, 7゜ Agent Patent attorney Denki Kido Part L Doshin 5 Yen 7 Yen 60 Figure 8
Claims (1)
該パレットをリニアモータにて移動させる空気浮上搬送
装置において、前記リニアモータの固定子の両側に一対
のレールを敷設し、該レールに、レールとの間に空気通
路を形成するとともに、前記空気通路に連通してレール
の上面と内側面に圧縮空気を噴出する微細な中空孔を有
する多孔質の流体透過性材を設けて軌道を構成し、一方
、前記パレットには、前記レール上面から噴出する空気
を受けてパレットを浮上させる空気受け面と、レール内
側面から噴出する空気を受けてレール内側面と非接触状
態でパレットを案内する案内部と、リニアモータの２次
導体とを設けたことを特徴とする空気浮上搬送装置。 ２、前記パレットの案内部を直方体に形成したことを特
徴とする請求項１記載の空気浮上搬送装置。 ３、前記パレットの案内部を弾性部材で形成したことを
特徴とする請求項１記載の空気浮上搬送装置。[Claims] 1. The pallet is levitated by air ejected from the orbit,
In an air levitation conveyance device in which the pallet is moved by a linear motor, a pair of rails are laid on both sides of the stator of the linear motor, an air passage is formed between the rails and the rail, and the air passage is A track is constructed by providing a porous fluid-permeable material having fine hollow holes that communicate with the upper surface and inner surface of the rail to eject compressed air from the upper surface and inner surface of the rail. An air receiving surface that receives air to levitate the pallet, a guide section that receives air ejected from the inner surface of the rail and guides the pallet without contacting the inner surface of the rail, and a secondary conductor of the linear motor are provided. An air levitation transport device featuring: 2. The air levitation conveyance device according to claim 1, wherein the pallet guide portion is formed into a rectangular parallelepiped. 3. The air levitation conveyance device according to claim 1, wherein the guide portion of the pallet is formed of an elastic member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22324088A JPH0270618A (en) | 1988-09-06 | 1988-09-06 | Air floating carrying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22324088A JPH0270618A (en) | 1988-09-06 | 1988-09-06 | Air floating carrying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270618A true JPH0270618A (en) | 1990-03-09 |
Family
ID=16794996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22324088A Pending JPH0270618A (en) | 1988-09-06 | 1988-09-06 | Air floating carrying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270618A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0479827U (en) * | 1990-11-26 | 1992-07-13 | ||
| KR100798468B1 (en) * | 2006-06-08 | 2008-01-28 | 한국표준과학연구원 | Air Float transport system |
| JP2009220956A (en) * | 2008-03-17 | 2009-10-01 | Murata Mach Ltd | Floating conveyance device and floating conveyance method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5969317A (en) * | 1982-10-08 | 1984-04-19 | Seiko Instr & Electronics Ltd | Multi-function conveyer apparatus using linear step motor |
| JPS606523A (en) * | 1983-06-25 | 1985-01-14 | Hitachi Kiden Kogyo Ltd | Dustproof transport apparatus |
| JPS61116965A (en) * | 1984-11-09 | 1986-06-04 | Mitsubishi Electric Corp | Pneumatic levitation linear conveyer |
-
1988
- 1988-09-06 JP JP22324088A patent/JPH0270618A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5969317A (en) * | 1982-10-08 | 1984-04-19 | Seiko Instr & Electronics Ltd | Multi-function conveyer apparatus using linear step motor |
| JPS606523A (en) * | 1983-06-25 | 1985-01-14 | Hitachi Kiden Kogyo Ltd | Dustproof transport apparatus |
| JPS61116965A (en) * | 1984-11-09 | 1986-06-04 | Mitsubishi Electric Corp | Pneumatic levitation linear conveyer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0479827U (en) * | 1990-11-26 | 1992-07-13 | ||
| KR100798468B1 (en) * | 2006-06-08 | 2008-01-28 | 한국표준과학연구원 | Air Float transport system |
| JP2009220956A (en) * | 2008-03-17 | 2009-10-01 | Murata Mach Ltd | Floating conveyance device and floating conveyance method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4978253A (en) | Air cushion conveying device with magnetic guidance | |
| JPH0270618A (en) | Air floating carrying device | |
| JPH09222124A (en) | Static pressure gas bearing | |
| US5107981A (en) | Device with flow medium stratification for positioning and/or transporting unit loads | |
| JPS6231304A (en) | Magnetic levitation traveling vehicle | |
| US4729323A (en) | Transportation system of a floated-carrier type | |
| JPS5856358B2 (en) | Cursor guide mechanism in rail-type flexible parallel ruler devices, etc. | |
| JPS606523A (en) | Dustproof transport apparatus | |
| JPH0327454B2 (en) | ||
| JPH0322177Y2 (en) | ||
| JPS6221623A (en) | Transfer device | |
| JPS6334871Y2 (en) | ||
| JPH0431978Y2 (en) | ||
| JPH0611956Y2 (en) | Air levitation type carrier | |
| JPH0132750B2 (en) | ||
| JPS6274402U (en) | ||
| JPS62173907A (en) | Magnetic levitationary transporting facilities by use of linear motor | |
| JPH0431979Y2 (en) | ||
| JPS60199758A (en) | Transfer mechanism | |
| JPH04183208A (en) | Magnetic levitation conveyor | |
| JPH026006Y2 (en) | ||
| JPS5831320B2 (en) | Balance weight guide device for rail type flexible parallel ruler | |
| JPS61137091U (en) | ||
| JPS60151294U (en) | linear motor device | |
| JPS6152555U (en) |