JPH0270439U - - Google Patents
Info
- Publication number
- JPH0270439U JPH0270439U JP1988087677U JP8767788U JPH0270439U JP H0270439 U JPH0270439 U JP H0270439U JP 1988087677 U JP1988087677 U JP 1988087677U JP 8767788 U JP8767788 U JP 8767788U JP H0270439 U JPH0270439 U JP H0270439U
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- detection means
- tool
- wire
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000008188 pellet Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Description
第1図は本考案の一実施例にかかるワイヤボン
デイング装置の概略説明図、第2図は同実施例に
おけるワイヤボンデイング前の状態の概略説明図
、第3図及び第4図はそれぞれ従来のワイヤボン
デイング装置の概略説明図である。 1……ボンデイングツール、3……駆動機構、
6……金属細線、22……圧力センサ(圧力検出
手段)、43……リード、42……半導体ペレツ
ト、42a……電極。
デイング装置の概略説明図、第2図は同実施例に
おけるワイヤボンデイング前の状態の概略説明図
、第3図及び第4図はそれぞれ従来のワイヤボン
デイング装置の概略説明図である。 1……ボンデイングツール、3……駆動機構、
6……金属細線、22……圧力センサ(圧力検出
手段)、43……リード、42……半導体ペレツ
ト、42a……電極。
補正 平1.12.20
図面の簡単な説明を次のように補正する。
明細書第10頁下から第8行の「及び第4図は
それぞれ」を、「は」に訂正する。
それぞれ」を、「は」に訂正する。
Claims (1)
- 【実用新案登録請求の範囲】 ボンデイングツールより供給される金属細線で
リードと半導体ペレツトの電極とを超音波ボンデ
イングするワイヤボンデイング装置において、 上記ボンデイングツールによるボンデイング時
のボンデイング圧を検出する圧力検出手段と、該
圧力検出手段によつて検出されるボンデイング圧
に対してボンデイングツールを上下動させる駆動
機構とを備えたことを特徴とするワイヤボンデイ
ング装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988087677U JPH0270439U (ja) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988087677U JPH0270439U (ja) | 1988-06-30 | 1988-06-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0270439U true JPH0270439U (ja) | 1990-05-29 |
Family
ID=31312278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988087677U Pending JPH0270439U (ja) | 1988-06-30 | 1988-06-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0270439U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008021839A (ja) * | 2006-07-13 | 2008-01-31 | Shinkawa Ltd | ワイヤボンディング装置 |
-
1988
- 1988-06-30 JP JP1988087677U patent/JPH0270439U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008021839A (ja) * | 2006-07-13 | 2008-01-31 | Shinkawa Ltd | ワイヤボンディング装置 |
JP4679454B2 (ja) * | 2006-07-13 | 2011-04-27 | 株式会社新川 | ワイヤボンディング装置 |
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