JPH0270431U - - Google Patents
Info
- Publication number
- JPH0270431U JPH0270431U JP15060388U JP15060388U JPH0270431U JP H0270431 U JPH0270431 U JP H0270431U JP 15060388 U JP15060388 U JP 15060388U JP 15060388 U JP15060388 U JP 15060388U JP H0270431 U JPH0270431 U JP H0270431U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnet
- rotatably installed
- sputtering device
- target stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060388U JPH0270431U (cs) | 1988-11-18 | 1988-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060388U JPH0270431U (cs) | 1988-11-18 | 1988-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270431U true JPH0270431U (cs) | 1990-05-29 |
Family
ID=31423897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15060388U Pending JPH0270431U (cs) | 1988-11-18 | 1988-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270431U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010090033A (ko) * | 2001-08-14 | 2001-10-18 | 손종역 | 박막의 레이저 증착에서 1축 제어방식의 멀티타겟홀터. |
-
1988
- 1988-11-18 JP JP15060388U patent/JPH0270431U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010090033A (ko) * | 2001-08-14 | 2001-10-18 | 손종역 | 박막의 레이저 증착에서 1축 제어방식의 멀티타겟홀터. |
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