JPH0175957U - - Google Patents
Info
- Publication number
- JPH0175957U JPH0175957U JP1987171056U JP17105687U JPH0175957U JP H0175957 U JPH0175957 U JP H0175957U JP 1987171056 U JP1987171056 U JP 1987171056U JP 17105687 U JP17105687 U JP 17105687U JP H0175957 U JPH0175957 U JP H0175957U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- rotating shaft
- implantation device
- support plate
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171056U JPH0175957U (cs) | 1987-11-09 | 1987-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171056U JPH0175957U (cs) | 1987-11-09 | 1987-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0175957U true JPH0175957U (cs) | 1989-05-23 |
Family
ID=31462540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171056U Pending JPH0175957U (cs) | 1987-11-09 | 1987-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0175957U (cs) |
-
1987
- 1987-11-09 JP JP1987171056U patent/JPH0175957U/ja active Pending