JPH0269332U - - Google Patents

Info

Publication number
JPH0269332U
JPH0269332U JP1988148479U JP14847988U JPH0269332U JP H0269332 U JPH0269332 U JP H0269332U JP 1988148479 U JP1988148479 U JP 1988148479U JP 14847988 U JP14847988 U JP 14847988U JP H0269332 U JPH0269332 U JP H0269332U
Authority
JP
Japan
Prior art keywords
double
sided adhesive
adhesive tape
pellicle
tape layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988148479U
Other languages
Japanese (ja)
Other versions
JPH0452751Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988148479U priority Critical patent/JPH0452751Y2/ja
Publication of JPH0269332U publication Critical patent/JPH0269332U/ja
Application granted granted Critical
Publication of JPH0452751Y2 publication Critical patent/JPH0452751Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案によるペリクルにおける支持枠
と両面粘着テープ層の部分の断面図、第2図は従
来のペリクルに使用している支持枠と両面粘着テ
ープの部分の断面図、第3図は一般的なペリクル
の説明図。 図中、1は光学的薄膜体、2は支持枠、3は接
着層、4は両面粘着テープ層、5は保護フイルム
、4a,4c,4mは両面粘着テープの粘着剤層
、4b,4d,4nは両面粘着テープの基材、4
xは弾性体を示す。
Figure 1 is a sectional view of the support frame and double-sided adhesive tape layer in a pellicle according to the present invention, Figure 2 is a sectional view of the support frame and double-sided adhesive tape layer used in a conventional pellicle, and Figure 3 is a sectional view of the support frame and double-sided adhesive tape layer used in a conventional pellicle. An explanatory diagram of a general pellicle. In the figure, 1 is an optical thin film body, 2 is a support frame, 3 is an adhesive layer, 4 is a double-sided adhesive tape layer, 5 is a protective film, 4a, 4c, 4m are adhesive layers of the double-sided adhesive tape, 4b, 4d, 4n is the base material of double-sided adhesive tape, 4
x indicates an elastic body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光学的薄膜体と、それを一側に有し、かつ、そ
の反対側の端面に両面粘着テープ層を有する支持
枠とを備えてなるペリクルにおいて、該両面粘着
テープ層は、弾性体を間にはさんだ2つの両面粘
着テープを1組として、1組以上の層構造をなす
ことを特徴とする易剥離性ペリクル。
In a pellicle comprising an optical thin film body and a support frame having the optical thin film body on one side and having a double-sided adhesive tape layer on the opposite end surface, the double-sided adhesive tape layer has an elastic body in between. An easily peelable pellicle characterized by having a layered structure of one or more sets of two double-sided adhesive tapes sandwiched in between.
JP1988148479U 1988-11-16 1988-11-16 Expired JPH0452751Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988148479U JPH0452751Y2 (en) 1988-11-16 1988-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988148479U JPH0452751Y2 (en) 1988-11-16 1988-11-16

Publications (2)

Publication Number Publication Date
JPH0269332U true JPH0269332U (en) 1990-05-25
JPH0452751Y2 JPH0452751Y2 (en) 1992-12-11

Family

ID=31419843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988148479U Expired JPH0452751Y2 (en) 1988-11-16 1988-11-16

Country Status (1)

Country Link
JP (1) JPH0452751Y2 (en)

Also Published As

Publication number Publication date
JPH0452751Y2 (en) 1992-12-11

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