JPH0269332U - - Google Patents
Info
- Publication number
- JPH0269332U JPH0269332U JP1988148479U JP14847988U JPH0269332U JP H0269332 U JPH0269332 U JP H0269332U JP 1988148479 U JP1988148479 U JP 1988148479U JP 14847988 U JP14847988 U JP 14847988U JP H0269332 U JPH0269332 U JP H0269332U
- Authority
- JP
- Japan
- Prior art keywords
- double
- sided adhesive
- adhesive tape
- pellicle
- tape layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002390 adhesive tape Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Description
第1図は本考案によるペリクルにおける支持枠
と両面粘着テープ層の部分の断面図、第2図は従
来のペリクルに使用している支持枠と両面粘着テ
ープの部分の断面図、第3図は一般的なペリクル
の説明図。
図中、1は光学的薄膜体、2は支持枠、3は接
着層、4は両面粘着テープ層、5は保護フイルム
、4a,4c,4mは両面粘着テープの粘着剤層
、4b,4d,4nは両面粘着テープの基材、4
xは弾性体を示す。
Figure 1 is a sectional view of the support frame and double-sided adhesive tape layer in a pellicle according to the present invention, Figure 2 is a sectional view of the support frame and double-sided adhesive tape layer used in a conventional pellicle, and Figure 3 is a sectional view of the support frame and double-sided adhesive tape layer used in a conventional pellicle. An explanatory diagram of a general pellicle. In the figure, 1 is an optical thin film body, 2 is a support frame, 3 is an adhesive layer, 4 is a double-sided adhesive tape layer, 5 is a protective film, 4a, 4c, 4m are adhesive layers of the double-sided adhesive tape, 4b, 4d, 4n is the base material of double-sided adhesive tape, 4
x indicates an elastic body.
Claims (1)
の反対側の端面に両面粘着テープ層を有する支持
枠とを備えてなるペリクルにおいて、該両面粘着
テープ層は、弾性体を間にはさんだ2つの両面粘
着テープを1組として、1組以上の層構造をなす
ことを特徴とする易剥離性ペリクル。 In a pellicle comprising an optical thin film body and a support frame having the optical thin film body on one side and having a double-sided adhesive tape layer on the opposite end surface, the double-sided adhesive tape layer has an elastic body in between. An easily peelable pellicle characterized by having a layered structure of one or more sets of two double-sided adhesive tapes sandwiched in between.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988148479U JPH0452751Y2 (en) | 1988-11-16 | 1988-11-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988148479U JPH0452751Y2 (en) | 1988-11-16 | 1988-11-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0269332U true JPH0269332U (en) | 1990-05-25 |
JPH0452751Y2 JPH0452751Y2 (en) | 1992-12-11 |
Family
ID=31419843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988148479U Expired JPH0452751Y2 (en) | 1988-11-16 | 1988-11-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0452751Y2 (en) |
-
1988
- 1988-11-16 JP JP1988148479U patent/JPH0452751Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0452751Y2 (en) | 1992-12-11 |
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