JPH0278945U - - Google Patents
Info
- Publication number
- JPH0278945U JPH0278945U JP15853188U JP15853188U JPH0278945U JP H0278945 U JPH0278945 U JP H0278945U JP 15853188 U JP15853188 U JP 15853188U JP 15853188 U JP15853188 U JP 15853188U JP H0278945 U JPH0278945 U JP H0278945U
- Authority
- JP
- Japan
- Prior art keywords
- double
- adhesive tape
- sided adhesive
- pellicle
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002390 adhesive tape Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Description
第１図ａ〜ｃは本考案によるペリクルにおける
支持枠と両面粘着テープ層の部分の断面図、第２
図は従来のペリクルに使用している支持枠と両面
粘着テープの部分の断面図、第３図は一般的なペ
リクルの説明図。
図中、１は光学的薄膜体、２は支持枠、３は接
着層、４は両面粘着テープ、５は保護フイルム、
４ａ，４ｄ，４ｆ，４ｇは粘着剤層、４ｂ，４ｈ
，４ｉは両面粘着テープの基材、４ｃ，４ｅは弾
性の小さいテープを示す。
Figures 1 a to c are cross-sectional views of the support frame and double-sided adhesive tape layer in the pellicle according to the present invention;
The figure is a sectional view of the support frame and double-sided adhesive tape used in a conventional pellicle, and FIG. 3 is an explanatory diagram of a general pellicle. In the figure, 1 is an optical thin film body, 2 is a support frame, 3 is an adhesive layer, 4 is a double-sided adhesive tape, 5 is a protective film,
4a, 4d, 4f, 4g are adhesive layers, 4b, 4h
, 4i are double-sided adhesive tape base materials, and 4c and 4e are tapes with low elasticity.
Claims (1)
の反対側の端面に両面粘着テープを有する支持枠
とを備えてなるペリクルにおいて、該両面粘着テ
ープは、その基材が弾性の大きい両面粘着テープ
と、弾性の小さいテープとを少なくとも１以上有
する多層構造をなすことを特徴とする易剥離性ペ
リクル。 In a pellicle comprising an optical thin film body and a support frame having the optical thin film body on one side and having a double-sided adhesive tape on the opposite end surface, the double-sided adhesive tape has a base material with high elasticity. An easily peelable pellicle having a multilayer structure comprising at least one double-sided adhesive tape and a tape with low elasticity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15853188U JPH0278945U (en) | 1988-12-07 | 1988-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15853188U JPH0278945U (en) | 1988-12-07 | 1988-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0278945U true JPH0278945U (en) | 1990-06-18 |
Family
ID=31438946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15853188U Pending JPH0278945U (en) | 1988-12-07 | 1988-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278945U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6075835A (en) * | 1983-10-03 | 1985-04-30 | Hitachi Ltd | Pellicle |
-
1988
- 1988-12-07 JP JP15853188U patent/JPH0278945U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6075835A (en) * | 1983-10-03 | 1985-04-30 | Hitachi Ltd | Pellicle |