JPH0236833U - - Google Patents

Info

Publication number
JPH0236833U
JPH0236833U JP1988114035U JP11403588U JPH0236833U JP H0236833 U JPH0236833 U JP H0236833U JP 1988114035 U JP1988114035 U JP 1988114035U JP 11403588 U JP11403588 U JP 11403588U JP H0236833 U JPH0236833 U JP H0236833U
Authority
JP
Japan
Prior art keywords
double
sided adhesive
pellicle
adhesive tape
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988114035U
Other languages
Japanese (ja)
Other versions
JPH0449628Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988114035U priority Critical patent/JPH0449628Y2/ja
Publication of JPH0236833U publication Critical patent/JPH0236833U/ja
Application granted granted Critical
Publication of JPH0449628Y2 publication Critical patent/JPH0449628Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案によるペリクルにおける支持枠
と両面粘着テープの部分の断面図、第2図は従来
のペリクルに使用している支持枠と両面粘着テー
プの部分の断面図、第3図は一般的なペリクルの
説明図。 図中、1は光学的薄膜体、2は支持枠、3は接
着層、4は両面粘着テープ、5は保護フイルム、
4a,4c,4eは両面粘着テープの粘着剤層、
4b,4d,4fは両面粘着テープの基材を示す
Figure 1 is a sectional view of the support frame and double-sided adhesive tape in a pellicle according to the present invention, Figure 2 is a sectional view of the support frame and double-sided adhesive tape used in a conventional pellicle, and Figure 3 is a general pellicle. An explanatory diagram of a typical pellicle. In the figure, 1 is an optical thin film body, 2 is a support frame, 3 is an adhesive layer, 4 is a double-sided adhesive tape, 5 is a protective film,
4a, 4c, 4e are adhesive layers of double-sided adhesive tape,
4b, 4d, and 4f indicate the base materials of the double-sided adhesive tape.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光学的薄膜体と、それを一側に有し、かつ、そ
の反対側の端面に両面粘着テープを有する支持枠
とを備えてなるペリクルにおいて、該両面粘着テ
ープは、その基材が弾性の大きい両面粘着テープ
と、その基材が弾性の小さい両面粘着テープとを
交互に少くとも2個積層してなることを特徴とす
る剥離容易なペリクル。
In a pellicle comprising an optical thin film body and a support frame having the optical thin film body on one side and having a double-sided adhesive tape on the opposite end surface, the double-sided adhesive tape has a base material with high elasticity. An easily peelable pellicle comprising at least two double-sided adhesive tapes and at least two double-sided adhesive tapes whose base materials have low elasticity laminated alternately.
JP1988114035U 1988-09-01 1988-09-01 Expired JPH0449628Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988114035U JPH0449628Y2 (en) 1988-09-01 1988-09-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988114035U JPH0449628Y2 (en) 1988-09-01 1988-09-01

Publications (2)

Publication Number Publication Date
JPH0236833U true JPH0236833U (en) 1990-03-09
JPH0449628Y2 JPH0449628Y2 (en) 1992-11-24

Family

ID=31354414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988114035U Expired JPH0449628Y2 (en) 1988-09-01 1988-09-01

Country Status (1)

Country Link
JP (1) JPH0449628Y2 (en)

Also Published As

Publication number Publication date
JPH0449628Y2 (en) 1992-11-24

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