JPH0268108A - Automatic airflow monitoring device in dust collector - Google Patents
Automatic airflow monitoring device in dust collectorInfo
- Publication number
- JPH0268108A JPH0268108A JP21771788A JP21771788A JPH0268108A JP H0268108 A JPH0268108 A JP H0268108A JP 21771788 A JP21771788 A JP 21771788A JP 21771788 A JP21771788 A JP 21771788A JP H0268108 A JPH0268108 A JP H0268108A
- Authority
- JP
- Japan
- Prior art keywords
- way solenoid
- tube
- solenoid valve
- differential pressure
- detection tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims description 12
- 238000012806 monitoring device Methods 0.000 title claims description 7
- 238000001514 detection method Methods 0.000 claims description 23
- 238000005259 measurement Methods 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 2
- 230000003068 static effect Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 206010011224 Cough Diseases 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は集塵機の処理風量を監視する集塵機における自
動風量監視装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an automatic air volume monitoring device for a dust collector that monitors the processing air volume of the dust collector.
（従来の技術）
従来、集塵機においてその処理風量を常時監視する方式
としては、煙道中に配置したピトー管により全圧及び静
圧を得てその差圧を差圧変換器に取り込み、風量を検出
していた。(Conventional technology) Conventionally, the method for constantly monitoring the processing air volume of a dust collector is to obtain the total pressure and static pressure using a pitot tube placed in the flue, and capture the differential pressure into a differential pressure converter to detect the air volume. Was.
（発明が解決しようとする課題）
ところが、このような装置においては煙道ガス中の粉塵
がピトー管内に沈着し閉塞が生じるという問題があった
外、ガス中の水分や腐食性ガスがピトー管内において冷
却し、結露することにより閉塞、腐食が生じるという問
題があった。また、差圧を検出する差圧変換器は、周囲
の温度により温度ドリフトが発生して測定誤差が生ずる
という問題もあり、この問題を解決するには温度補償機
能付きの高価な差圧変換器が必要であるという問題もあ
った。(Problem to be Solved by the Invention) However, in this type of device, there is a problem in that dust in the flue gas settles inside the pitot tube and causes blockage, and in addition, moisture and corrosive gas in the gas can accumulate inside the pitot tube. There was a problem in that cooling and condensation caused clogging and corrosion. Additionally, differential pressure converters that detect differential pressure have the problem of temperature drift caused by the surrounding temperature, resulting in measurement errors.To solve this problem, an expensive differential pressure converter with temperature compensation function is required. There was also the problem that it was necessary.
帽１を解決するための手段）
本発明は前記のような問題点を解決した集塵機における
自動風量監視装置に関するもので、全圧検出管部と別の
検出管部とを有するピトー管を煙道内に配設して該全圧
検出管部および別の検出管部とを一方口が大気に開放さ
れた三方口電磁弁を介して差圧変換器に配管接続させ、
また、前記三方口電磁弁と全圧検出管部および別の検出
管部間の空圧配管には三方口電磁弁を介して圧縮空気源
と接続された枝管を接続する一方、該三方口電磁弁およ
び三方口電磁弁を制御する計測制御装置を設けたことを
特徴とするものである。Means for Solving Problem 1) The present invention relates to an automatic airflow monitoring device for a dust collector that solves the above-mentioned problems. and connecting the total pressure detection pipe section and another detection pipe section to a differential pressure converter via a three-way solenoid valve with one port open to the atmosphere,
Further, a branch pipe connected to a compressed air source via the three-way solenoid valve is connected to the pneumatic piping between the three-way solenoid valve, the total pressure detection pipe section, and another detection pipe section, while the three-way mouth The present invention is characterized by being provided with a measurement control device that controls the solenoid valve and the three-way solenoid valve.
（作用）
このような集塵機における自動風量監視装置は、煙道の
風量測定時には計測制御装置によって三方口電磁弁のピ
トー管と差圧変換器を結ぶ通路のみが開かれた状態とし
て風量の計測を行うものであるが、一定時間毎に設定さ
れる管内清掃時には、各三方口電磁弁はピトー管と差圧
変換器との連通を閉じるとともに差圧変換器を大気に連
通されるように開き、他方、三方口電磁弁は「開」の状
態とされるように計測制御装置により制御されるから、
圧縮空気源から吹き出される圧縮空気が三方口電磁弁、
空圧配管を通じてピトー管の全圧検出管部、別の検出管
部に吹き込まれ、該ピトー管の各部を自動的に清掃する
こととなる一方、差圧変換器は空圧配管、三方口電磁弁
を通じて大気に向は解放されて共に等しい圧力が与えら
れていることとなるので、温度変化によって生ずる温度
ドリフトは計測制御装置の自動ゼロ点チエツク部によっ
てチエツクされ、ゼロ点がずれていれば自動的に補正さ
れることとなる。(Function) When measuring the air volume in the flue, the automatic air volume monitoring device for such a dust collector uses the measurement control device to measure the air volume with only the passage connecting the pitot tube of the three-way solenoid valve and the differential pressure converter open. However, when cleaning the inside of the pipe, which is set at regular intervals, each three-way solenoid valve closes the communication between the pitot pipe and the differential pressure converter, and opens the differential pressure converter to communicate with the atmosphere. On the other hand, since the three-way solenoid valve is controlled by the measurement control device to be in the "open" state,
The compressed air blown out from the compressed air source is passed through a three-way solenoid valve,
The air is blown through the pneumatic piping to the total pressure detection tube part of the pitot tube and another detection tube part, and each part of the pitot tube is automatically cleaned. Since both sides are released to the atmosphere through the valve and the same pressure is applied to both sides, temperature drift caused by temperature changes is checked by the automatic zero point check section of the measurement control device, and if the zero point is shifted, an automatic zero point check is performed. This will be corrected accordingly.
（実施例） 次に、本発明を図示の実施例について詳細に説明する。(Example) Next, the present invention will be described in detail with reference to the illustrated embodiments.
（２）は、図示しないａｍ機の煙道（１）内に、その全
圧検出管部（３）及び別の検出管部（４）の各検出口（
３ａ）、（４ａ）が所用方向を臨むようにして位置させ
た双Ｒ型のピトー管であって、該ピトー管（２）の全圧
検出管部（３）、別の検出管部（４）の各他端部は各々
空圧配管（５）、（５ａ）を介して三方ロ１Ｔ６１弁（
６）、（６ａ）の一つの開口端部（７）、（７ａ）に接
続され、該三方口電磁弁（６）、（６ａ）の他の一つの
開口端部（８）、（８ａ）は、前記ピトー管（２）の検
出する全圧と静圧の差を・検出して電気信号に変換する
ための差圧変換器（９）の各入力端部Ｏω、（１０ａ）
に空圧配管００、（ｌｌａ）を介して接続されている。(2) is a total pressure detection tube section (3) and another detection tube section (4) each detection port (
3a) and (4a) are double R type pitot tubes positioned so as to face the desired direction, and the total pressure detection tube part (3) of the pitot tube (2) and the other detection tube part (4) are Each other end is connected to a three-way rotary 1T61 valve (
6), (6a) is connected to one open end (7), (7a) of the three-way solenoid valve (6), (6a), and the other open end (8), (8a) of the three-way port solenoid valve (6), (6a). are each input end Oω, (10a) of the differential pressure converter (9) for detecting the difference between the total pressure and static pressure detected by the pitot tube (2) and converting it into an electric signal.
It is connected to via pneumatic piping 00, (lla).
また０２１． （１２ａ）は三方口電磁弁（６）、（６
ａ）の残りの１つの開口端部であって、該開口端部０２
１、（１２ａ）は大気に向けて解放したものとする。Also 021. (12a) is a three-way solenoid valve (6), (6
The remaining one open end of a), the open end 02
1, (12a) is assumed to be released to the atmosphere.
一方、０３）、 （１３ａ）は、前記空圧配管（５）、
（５ａ）の中間部から分岐させた枝管であって、該枝管
側、（１３ａ）は各々中間部に三方口電磁弁Ｏａ、（１
４ａ）を介在させたうえ配管０５１に一括して連通させ
、さらに、該配管０５）の先方部は、圧縮空気源００に
接続されている。他方、Ｑ７）は、前記三方口電磁弁（
６）、（６ａ）、二方ロ電磁弁圓、（１４ａ）の各ソレ
ノイドＱＱ１（１８ａ）、■、（１９ａ）に接続された
電磁弁制御部であって、該電磁弁制御部０１は、煙道（
１）の風量測定時には、三方口電磁弁（６）、（６ａ）
についてはピトー管（２）と差圧変換器（９）を結ぶ開
口端部（７）、（８）間及び開口端部（７ａ）、（８ａ
）間のみが開かれ、また、三方口電磁弁（財）、（１４
ａ）については「閉」の状態とされたものとなるよう該
各ソレノイドθ口、（１８ａ）、０９、（１９ａ）を制
御する一方、一定時間毎に中央制御部（２３）から数秒
間の清掃指令信号を受ける管内清掃時には、三方口電磁
弁（６）、（６ａ）については、二つの開口端部（７）
、（８）間、開口端部（７ａ）、（８ａ）間、開口端部
（７）、０２１間及び開口端部（７ａ）、（１２ａ）間
は各々「閉Ｊ、開口端部（８）、ＯＺ間及び開口端部（
８ａ）、（１２ａ）間は「開」とされ、三方口電磁弁（
ロ）、（１４ａ）は共にｒ開」の状態とされるよう該各
電磁弁（６）、（６ａ）、０４、（１４ａ）の各ソレノ
イド０ω、（１８ａ）、θつ、（１９ａ）に制御信号を
送り出すように構成されている。On the other hand, 03), (13a) is the pneumatic pipe (5),
A branch pipe branched from the middle part of (5a), on the branch pipe side, (13a) is a three-way solenoid valve Oa, (1
4a), the pipes 05) are connected to the pipe 051, and the front end of the pipe 05) is connected to the compressed air source 00. On the other hand, Q7) is the three-way solenoid valve (
6), (6a), a two-way solenoid valve ring, and a solenoid valve control unit connected to each solenoid QQ1 (18a), (1), (19a) of (14a), the solenoid valve control unit 01 is Flue (
When measuring the air volume in step 1), use the three-way solenoid valves (6) and (6a).
between the open ends (7) and (8) connecting the pitot tube (2) and the differential pressure converter (9), and between the open ends (7a) and (8a).
) is opened, and the three-way solenoid valve (Foundation), (14
Regarding a), each solenoid θ port (18a), 09, (19a) is controlled so that it is in the "closed" state, while the central control unit (23) periodically controls the solenoid θ port for several seconds. When cleaning the pipe in response to a cleaning command signal, the two open ends (7) of the three-way solenoid valves (6) and (6a)
, (8), between the open ends (7a) and (8a), between the open ends (7) and 021, and between the open ends (7a) and (12a), respectively. ), between OZ and open end (
8a) and (12a) are open, and the three-way solenoid valve (
(b), (14a) are both in the r-open state, so that the solenoids 0ω, (18a), θ, and (19a) of the respective solenoid valves (6), (6a), 04, and (14a) are The control signal is configured to send out a control signal.
また、該中央制御部（２３）から一定時間毎に数秒聞出
される清掃指令信号は、同時にゼロ点チエツク部（２１
）にも送られ、ピトー管（２）の清掃と、差圧変換器（
９）のゼロ点チエツクは自動的且つ同時に行われるよう
になっている。また、（２４）は、差圧変換器（９）の
出力信号即ち、全圧と静圧の差圧の差から算出され、煙
道（１）内の動圧に相当する電気信号を受けて図示しな
い集塵機の風量制御を行う計測制御装！ （２２）の風
量制御部である。なお、上記実施例では管内清掃時の制
御信号は、一定時間毎に出されるように設定されている
が、これに加えて随時行えるようにすることもでき、ま
た、三方日電磁弁（６）、（６ａ）の開口端部（７）、
（８）間または開口端部（７ａ）、（８ａ）間の一方の
みを開としてピトー管（２）の全圧検出管部（３）また
は別の検出管部（４）と差圧変換Ｈ（９）とを続かせて
全圧または静圧の一方を測定できるようにすることも可
能である。Further, the cleaning command signal which is outputted from the central control unit (23) for several seconds at regular time intervals is sent to the zero point check unit (21) at the same time.
) is also sent to clean the pitot tube (2) and to clean the differential pressure transducer (
The zero point check (9) is performed automatically and simultaneously. (24) is calculated from the output signal of the differential pressure converter (9), that is, the difference between the total pressure and the static pressure, and receives an electrical signal corresponding to the dynamic pressure in the flue (1). A measurement control device that controls the air volume of the dust collector (not shown)! (22) is the air volume control section. In the above embodiment, the control signal for cleaning the inside of the pipe is set to be issued at regular intervals, but in addition to this, the control signal can also be issued at any time. , (6a) open end (7),
(8) Open only one side between the open ends (7a) and (8a) and connect it to the total pressure detection tube section (3) of the pitot tube (2) or another detection tube section (4) and the differential pressure conversion H It is also possible to continue with (9) so that either the total pressure or the static pressure can be measured.
このように構成されたものは、煙道（１）の風ｍ測定時
には、三方口電磁弁（６）、（６ａ）についてはピトー
管（２）と差圧変換器（９）を結ぶ開口端部（７）、（
８）及び開口端部（７ａ）、（８ａ）間のみが開かれ、
三方口電磁弁０４）、（１４ａ）については「閉」の状
態となるよう計測制御装置（２２）の電磁弁制御部θ′
Ｉ）の制御信号を受けているので、従来この種のものと
同様に使用すれば、差圧変換器（９）の各入力端部ｑω
、（１０ａ）には煙道（１）内の全圧及び静圧相当値が
入力され、該差圧変換器（９）の出力側には、全圧と静
圧の差即ちｖ１圧に相当する値の電気信号が取り出され
、計測制御装置（２２）の風量制御部（２４）において
風量信号に変換され、これを基礎とした風量制御信号が
図示しない集塵機に向は送信され、その制御下に集！１
機が運転されてゆくものである。然して、一定時間の通
常運転が継続すると、計測制御装置（２２）の電磁弁制
御部０７）から各電磁弁のソレノイドＯａ、（１８ａ）
、ｆｌｇｌ、 （１９ａ）に制御信号が出される結果、
圧縮空気源ＯＯから吹き出される圧縮空気が三方口電磁
弁（ロ）、（１４ａ） 、空圧配管（５）、（５ａ）を
通じてピトー管（２）の全圧検出管部（３）、別の検出
管部（４）に吹き込まれ、咳ピトー管（２）の各部を自
動的に清掃することとなる一方、差圧変換器（９）の再
入力端部０ω、（１０ａ）は空圧配管（１１）、（Ｉｌ
ａ）、三方口電磁弁（６）、（６ａ）を通じて、大気に
向は解放されて共に等しい圧力が与えられていることと
なるので、差圧変換器（９）の出力信号をうけ、計測制
御回路（２２）の自動ゼロ点チエツク部（２１）によっ
て該差圧変換器（９）の検出値がこの時ゼロとなってい
るかが自動的にチエツクされるものとなる。With this configuration, when measuring the wind m in the flue (1), the open end of the three-way solenoid valve (6), (6a) connects the pitot tube (2) and the differential pressure converter (9). Part (7), (
8) and only between the open ends (7a) and (8a) are opened,
The solenoid valve control unit θ′ of the measurement control device (22) is set so that the three-way solenoid valves 04) and (14a) are in the “closed” state.
Since it receives the control signal of
, (10a) are input with values equivalent to the total pressure and static pressure in the flue (1), and the output side of the differential pressure converter (9) is input with a value equivalent to the difference between the total pressure and the static pressure, that is, the v1 pressure. An electrical signal with a value of Gather together! 1
The machine is being operated. However, when normal operation continues for a certain period of time, the solenoid Oa, (18a) of each solenoid valve is
As a result of the control signal being issued to , flgl, (19a),
The compressed air blown from the compressed air source OO passes through the three-way solenoid valve (b), (14a), pneumatic piping (5), (5a) to the total pressure detection pipe section (3) of the pitot tube (2), and another. The air is blown into the detection tube part (4) and automatically cleans each part of the cough pitot tube (2), while the re-input end 0ω, (10a) of the differential pressure transducer (9) is blown into the air pressure Piping (11), (Il
a) Since the three-way solenoid valves (6) and (6a) are open to the atmosphere and the same pressure is applied to both, the output signal of the differential pressure converter (9) is received and the measurement is performed. The automatic zero point check section (21) of the control circuit (22) automatically checks whether the detected value of the differential pressure converter (9) is zero at this time.
（発明の効果）
本発明によれば、常時は通常の集塵機における自動風量
監視装置と同様、自動的に風量を監視制御されるもので
あるが、一定時間毎または随時ピトー管内が圧縮空気に
より自動的に清掃されるため該ピトー管内に粉塵が沈着
して閉塞したり、ガス中の水分や腐食性ガスが結露して
ピトー管を閉塞したり腐食したりすることがなくなるう
え、高価な温度補償機能付の変換機を用いなくとも自動
的にゼロ点のチエツクができ、上記の機能と相俟って安
価な装置で正確で耐久性のある集塵機における自動風量
監視装置を提供できたもので、産業の発展に寄与すると
ころは極めて大である。(Effects of the Invention) According to the present invention, the air volume is automatically monitored and controlled at all times like an automatic air volume monitoring device in a normal dust collector, but the inside of the pitot tube is automatically controlled by compressed air at regular intervals or at any time. This eliminates the possibility of dust depositing and clogging the pitot tube, or of moisture or corrosive gas in the gas condensing and clogging or corroding the pitot tube.In addition, expensive temperature compensation is required. It is possible to automatically check the zero point without using a converter with a function, and in combination with the above functions, we have been able to provide an accurate and durable automatic airflow monitoring device for dust collectors using an inexpensive device. The contribution to industrial development is extremely large.
第１図は本発明の実施例を示すブロック図である。
（１）：煙道、（２）：ピトー管、（３）：全圧検出管
部、（４）：別の検出管部、（５）、（５ａ） ：空圧
配管、（６）、（６ａ） ：三方口電磁弁、（９）：差
圧変換器、Ｑｌ、（１３ａ）：枝管、００、（１４ａ）
：三方口電磁弁、ａＱ＝圧縮空気源、（２２） ：計
測制御装置。FIG. 1 is a block diagram showing an embodiment of the present invention. (1): Flue duct, (2): Pitot tube, (3): Total pressure detection tube section, (4): Another detection tube section, (5), (5a): Pneumatic piping, (6), (6a): Three-way solenoid valve, (9): Differential pressure converter, Ql, (13a): Branch pipe, 00, (14a)
: Three-way solenoid valve, aQ=compressed air source, (22) : Measurement control device.
Claims (1)
トー管（２）を煙道（１）内に配設して該全圧検出管部
（３）および別の検出管部（４）とを一方口が大気に開
放された三方口電磁弁（６）、（６ａ）を介して差圧変
換器（９）に配管接続させ、また、前記三方口電磁弁（
６）、（６ａ）と全圧検出管部（３）および別の検出管
部（４）間の空圧配管（５）、（５ａ）には二方口電磁
弁（１４）、（１４ａ）を介して圧縮空気源（１６）と
接続された枝管（１３）、（１３ａ）を接続する一方、
該三方口電磁弁（６）、（６ａ）および二方口電磁弁（
１４）、（１４ａ）を制御する計測制御装置（２２）を
設けたことを特徴とする集塵機における自動風量監視装
置A pitot tube (2) having a total pressure detection tube section (3) and another detection tube section (4) is arranged in the flue (1) to detect the total pressure detection tube section (3) and another detection tube section. The pipe portion (4) is connected to the differential pressure converter (9) via a three-way solenoid valve (6), (6a) with one port open to the atmosphere, and the three-way solenoid valve (
6), (6a) and the pneumatic piping (5), (5a) between the total pressure detection tube section (3) and another detection tube section (4) are equipped with two-way solenoid valves (14), (14a). while connecting the branch pipes (13), (13a) connected to the compressed air source (16) via;
The three-way solenoid valve (6), (6a) and the two-way solenoid valve (
14), an automatic airflow monitoring device in a dust collector characterized by being provided with a measurement control device (22) for controlling (14a)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21771788A JP2680062B2 (en) | 1988-08-31 | 1988-08-31 | Automatic air flow monitoring device in dust collector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21771788A JP2680062B2 (en) | 1988-08-31 | 1988-08-31 | Automatic air flow monitoring device in dust collector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0268108A true JPH0268108A (en) | 1990-03-07 |
| JP2680062B2 JP2680062B2 (en) | 1997-11-19 |
Family
ID=16708633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21771788A Expired - Lifetime JP2680062B2 (en) | 1988-08-31 | 1988-08-31 | Automatic air flow monitoring device in dust collector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2680062B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2188405A1 (en) * | 2001-10-22 | 2003-06-16 | Servicio De Instrumentacion Ho | Portable peak spirometer |
| WO2004049940A1 (en) * | 2001-10-22 | 2004-06-17 | Servicio De Instrumentacion Hospitalaria, S.L. | Portable peak flow meter |
| WO2011090433A1 (en) * | 2010-01-19 | 2011-07-28 | R2Cd Holdings Pte Ltd | An auto-cleaning and auto-zeroing system used with a photo-ionization detector |
| CN103616050A (en) * | 2013-11-21 | 2014-03-05 | 辽宁毕托巴科技有限公司 | Pitot crude gas flow sensor |
| CN106092638A (en) * | 2016-06-13 | 2016-11-09 | 青岛容广电子技术有限公司 | A kind of Duplicate Samples sampling gun for stationary source particulate matter |
| JP2019152589A (en) * | 2018-03-06 | 2019-09-12 | エスペック株式会社 | Flow rate measuring device and environmental testing device |
| WO2019181061A1 (en) * | 2018-03-23 | 2019-09-26 | 株式会社Ｓｃｒｅｅｎホールディングス | Pitot-tube type flowmeter for substrate-treating apparatus, substrate-treating apparatus, and substrate treating method |
| JP2020056666A (en) * | 2018-10-02 | 2020-04-09 | 株式会社堀場製作所 | Flow rate measuring device and method for measuring flow rate |
-
1988
- 1988-08-31 JP JP21771788A patent/JP2680062B2/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2188405A1 (en) * | 2001-10-22 | 2003-06-16 | Servicio De Instrumentacion Ho | Portable peak spirometer |
| WO2004049940A1 (en) * | 2001-10-22 | 2004-06-17 | Servicio De Instrumentacion Hospitalaria, S.L. | Portable peak flow meter |
| WO2011090433A1 (en) * | 2010-01-19 | 2011-07-28 | R2Cd Holdings Pte Ltd | An auto-cleaning and auto-zeroing system used with a photo-ionization detector |
| US9645112B2 (en) | 2010-01-19 | 2017-05-09 | R2Cd Holdings Pte Ltd. | Auto-cleaning and auto-zeroing system used with a photo-ionization detector |
| CN103616050A (en) * | 2013-11-21 | 2014-03-05 | 辽宁毕托巴科技有限公司 | Pitot crude gas flow sensor |
| CN106092638A (en) * | 2016-06-13 | 2016-11-09 | 青岛容广电子技术有限公司 | A kind of Duplicate Samples sampling gun for stationary source particulate matter |
| JP2019152589A (en) * | 2018-03-06 | 2019-09-12 | エスペック株式会社 | Flow rate measuring device and environmental testing device |
| WO2019181061A1 (en) * | 2018-03-23 | 2019-09-26 | 株式会社Ｓｃｒｅｅｎホールディングス | Pitot-tube type flowmeter for substrate-treating apparatus, substrate-treating apparatus, and substrate treating method |
| JP2019169642A (en) * | 2018-03-23 | 2019-10-03 | 株式会社Ｓｃｒｅｅｎホールディングス | Pitot tube type flow meter for substrate processing apparatus, substrate processing apparatus, and substrate processing method |
| JP2020056666A (en) * | 2018-10-02 | 2020-04-09 | 株式会社堀場製作所 | Flow rate measuring device and method for measuring flow rate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2680062B2 (en) | 1997-11-19 |
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