JPH0266670U - - Google Patents

Info

Publication number
JPH0266670U
JPH0266670U JP14193588U JP14193588U JPH0266670U JP H0266670 U JPH0266670 U JP H0266670U JP 14193588 U JP14193588 U JP 14193588U JP 14193588 U JP14193588 U JP 14193588U JP H0266670 U JPH0266670 U JP H0266670U
Authority
JP
Japan
Prior art keywords
free jet
receives
cylindrical lens
laser device
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14193588U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14193588U priority Critical patent/JPH0266670U/ja
Publication of JPH0266670U publication Critical patent/JPH0266670U/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例の構成図、第2図は
従来例の構成図である。 1……窒素ガスボンベ、2……ヨウ素セル、3
……ヨウ素、4……ノズル、5……自由噴流、6
……チヤンバー、7……真空ポンプ、8……Ar
イオンのレーザー、9……シリンドリカルレンズ
、10……コリメータレンズ、11……窓(ガラ
ス)。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional example. 1...Nitrogen gas cylinder, 2...Iodine cell, 3
...Iodine, 4...Nozzle, 5...Free jet, 6
...Chamber, 7...Vacuum pump, 8...Ar
Ion laser, 9...Cylindrical lens, 10...Collimator lens, 11...Window (glass).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 計測対象の自由噴流に光軸を向けるレーザ装置
と、同レーザ装置のビームを受けるシリンドリカ
ルレンズと、同シリンドリカルレンズの光を受け
平行平板状の光線を上記自由噴流に送るコリメー
タレンズとを備えてなることを特徴とする自由噴
流可視化装置。
It comprises a laser device that directs its optical axis toward the free jet to be measured, a cylindrical lens that receives the beam from the laser device, and a collimator lens that receives the light from the cylindrical lens and sends a parallel plate-shaped light beam to the free jet. A free jet visualization device characterized by:
JP14193588U 1988-11-01 1988-11-01 Pending JPH0266670U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14193588U JPH0266670U (en) 1988-11-01 1988-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14193588U JPH0266670U (en) 1988-11-01 1988-11-01

Publications (1)

Publication Number Publication Date
JPH0266670U true JPH0266670U (en) 1990-05-21

Family

ID=31407445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14193588U Pending JPH0266670U (en) 1988-11-01 1988-11-01

Country Status (1)

Country Link
JP (1) JPH0266670U (en)

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