JPH0355841U - - Google Patents
Info
- Publication number
- JPH0355841U JPH0355841U JP1989117086U JP11708689U JPH0355841U JP H0355841 U JPH0355841 U JP H0355841U JP 1989117086 U JP1989117086 U JP 1989117086U JP 11708689 U JP11708689 U JP 11708689U JP H0355841 U JPH0355841 U JP H0355841U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- rotation
- laser beams
- combining
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 238000005224 laser annealing Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Description
第１図は本考案に係わるレーザアニール装置の
一実施例を示す構成図、第２図は1/2波長板と偏
光ビーム・スプリツタとを組み合わせた場合の偏
光による光の分離を示す図、第３図は1/2波長フ
レネルロムを示す図である。
１１，１２……レーザ光源、１３……試料（ア
ニーリング対象金属）、１４……光学系、１５，
１６……1/2波長フレネルロム、１７……出力測
定器、１８……偏光ビームスプリツタ。
Fig. 1 is a configuration diagram showing an embodiment of the laser annealing device according to the present invention, Fig. 2 is a diagram showing the separation of light by polarization when a 1/2 wavelength plate and a polarizing beam splitter are combined, and Fig. Figure 3 shows a 1/2 wavelength Fresnel ROM. 11, 12...Laser light source, 13...Sample (metal to be annealed), 14...Optical system, 15,
16... 1/2 wavelength Fresnel ROM, 17... Output measuring device, 18... Polarizing beam splitter.
Claims (1)
振されたレーザビームを合成してアニーリング対
象金属に同時に集光させることにより、前記金属
に熱的変化を与える光学系とを備え、この光学系
は２本のレーザビームの光軸にそれぞれ挿入され
て光軸廻りの回転機構を有する1/2波長フレネル
ロムと、このフレネルロムの回転をレーザ出力に
応じて制御するコントローラと、前記２本のレー
ザビームを合成させる偏光ビーム・スプリツタと
を具備することを特徴とするレーザアニール装置
。 This optical system includes two laser light sources and an optical system that thermally changes the metal by combining the laser beams oscillated from each laser light source and simultaneously focusing the beam on the metal to be annealed. A 1/2 wavelength Fresnel ROM inserted into each of the optical axes of the two laser beams and having a rotation mechanism around the optical axis, a controller that controls the rotation of the Fresnel ROM in accordance with the laser output, and a controller that controls the rotation of the two laser beams. A laser annealing device characterized by comprising a polarized beam splitter for combining.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989117086U JP2500196Y2 (en) | 1989-10-06 | 1989-10-06 | Laser annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989117086U JP2500196Y2 (en) | 1989-10-06 | 1989-10-06 | Laser annealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0355841U true JPH0355841U (en) | 1991-05-29 |
| JP2500196Y2 JP2500196Y2 (en) | 1996-06-05 |
Family
ID=31665325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989117086U Expired - Lifetime JP2500196Y2 (en) | 1989-10-06 | 1989-10-06 | Laser annealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2500196Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001145723A (en) * | 1999-11-19 | 2001-05-29 | Samii Kk | Slot machine |
| JP4581021B2 (en) * | 2009-08-27 | 2010-11-17 | 株式会社ソフイア | Game machine |
| JP2010284671A (en) * | 2009-06-10 | 2010-12-24 | Disco Abrasive Syst Ltd | Laser beam machining apparatus |
| WO2016203998A1 (en) * | 2015-06-19 | 2016-12-22 | 株式会社アマダミヤチ | Laser unit and laser device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246827A (en) * | 1988-03-28 | 1989-10-02 | Tokyo Electron Ltd | Beam annealing device |
-
1989
- 1989-10-06 JP JP1989117086U patent/JP2500196Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246827A (en) * | 1988-03-28 | 1989-10-02 | Tokyo Electron Ltd | Beam annealing device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001145723A (en) * | 1999-11-19 | 2001-05-29 | Samii Kk | Slot machine |
| JP2010284671A (en) * | 2009-06-10 | 2010-12-24 | Disco Abrasive Syst Ltd | Laser beam machining apparatus |
| JP4581021B2 (en) * | 2009-08-27 | 2010-11-17 | 株式会社ソフイア | Game machine |
| WO2016203998A1 (en) * | 2015-06-19 | 2016-12-22 | 株式会社アマダミヤチ | Laser unit and laser device |
| JPWO2016203998A1 (en) * | 2015-06-19 | 2017-06-29 | 株式会社アマダミヤチ | Laser unit and laser device |
| US10170892B2 (en) | 2015-06-19 | 2019-01-01 | Amada Miyachi Co., Ltd. | Laser unit and laser device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2500196Y2 (en) | 1996-06-05 |
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