JPH0265044A - Charging beam drawing device - Google Patents

Abstract

PURPOSE:To restrain low the noise caused by the potential difference between the commons of an electrical unit and the change of the earth electrical potential and prevent the charge up of a liner tube by providing a conductive member for keeping the conducting condition with a liner tube at the outside of the liner tube and making it an earth terminal. CONSTITUTION:A stick shaped conductive member 30 made of the copper, etc., is located at the outside of a liner tube 12, along the longitudinal direction of the liner tube 12. The lower end of the conductive member 30 extends to the outside of an outer cylinder 11, and is connected to the first class standalone earth through an earth electric wire 31. Since the liner tube 12 is securely earthed by the conductive member 30, the charge up is restrained low, and since the common of an electrical part or an earth terminal is earthed by using the conductive member 30, the prescribed earth electrical potential can be kept and while the potential difference is almost not generated between the commons.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a charged beam lithography apparatus, and particularly relates to an improvement in lithography accuracy.

(Prior Art) As shown in FIGS. 4 and 5, a charged beam optical lens barrel of a charged beam lithography apparatus has a liner tube 12 concentrically provided within an outer cylinder 11, and a liner tube 12 arranged inside the liner tube 12. A high vacuum is created, and a beam generation source such as an electron gun (not shown), a blanking electrode, and a deflector 13, 14 (such as a multipolar electrostatic type shown) are installed in the vacuum, and the liner tube 12 and the outer cylinder 11 are placed in a high vacuum.
A coil for a magnetic lens (not shown) or the like is provided between the two.

Conventionally, the beam generation source, blanking electrode, and deflector 13
．． Electrical components such as 14 can be applied with a predetermined direct pressure by connecting their common terminals or ground terminals to the outer cylinder 11.

For example, the multi-pole electrostatic deflector 13 is
As shown, a stud 15 from each electrode extends insulated through and through the liner tube 12;
5 is connected to the core pin of the coaxial connector 17 via the electric wire 16, and is connected to the deflection amplifier 18 via the coaxial cable 19, and the shell of the coaxial connector 17 is electrically connected to the outer cylinder 11i, so that 1 is applied to each electrode. Is the pressure 11 in the outer cylinder? It was configured to be a common terminal.

(Problem to be solved by the invention@) The outer cylinder 11 is usually made of an iron alloy such as stainless steel, and therefore has poor alpha conductivity. Generally speaking, one common point is ideal, but if members with poor conductivity are connected apart from each other as shown in FIG.

According to the inventor's research, a potential difference (noise) of about 3 mV may be generated, which means that the deflection sensitivity is 8 μm/V.
This causes a beam position error of 0.024 μm in the electrostatic head direction device. This error is an amount that cannot be ignored when drawing a mask etc. with an accuracy of 0.1 μm or less.

Furthermore, as shown in FIG. 4, there is a difference in the common-to-common fIL between the multi-stage deflectors 13 and 14, and in particular, the conduction of the contact portion 11a of the outer cylinder 11 shown in FIG. 4 is poor. 'Easy to cause potential difference.

In this case, the liner tube 12 is usually made of a non-aluminum material such as copper and is kept at ground potential, but as shown in FIG.
A good electrical connection may not always be maintained;
Scattered electrons (charshear V) were scattered, which disturbed the direction of the beam and caused a decrease in drawing accuracy.

The present invention aims to further improve the drawing accuracy by suppressing the noise caused by the potential difference between the electric parts (σ) and the ground potential and changes in the ground potential of the electrical components described above, and by preventing the charge-up of the tube. The purpose is to

[Composition of foil cutting]

(Means for losing l'J!) In order to achieve the above object, the present invention maintains a conductive state with the outer side of the liner tube of the beam optical column and conducts the load W:. A member is provided, and this conductive member is used as a common or ground terminal for a single component that can be attached to a 4-beam amplifier.

In the case where the electric component is a multi-polar static T4 deflector, it is preferable that a ring-shaped part is provided on the conductive member, and this ring-shaped part is used as a common terminal for each electrode of the multi-polar static T4 deflector.

(Function) Since the liner tube is reliably grounded using a conductive member, charge-up can be suppressed to a minimum.Since the common or ground terminal of the electrical components is grounded using a conductive member, the specified ground potential can be kept to a minimum. The voltage is maintained at a constant voltage, and there is almost no potential difference between commons. Therefore, side control of the beam is performed accurately, and drawing accuracy is improved.

In addition, if the common terminal of the multi-pole static single deflector (for which a ring-shaped part is provided on the conductive member and the common terminal of each IA is connected to the conductive member under the same conditions), the common terminal potential difference? Since the ring-shaped portion is cut in the middle, no induced force is generated.

(Example) The following Figures 1 to 3 show one example of the f4 row of the present invention.
Refer to and explain. In FIG.
This is Lynati Ave. 21 is an electron gun which is a beam generation source, 22 is a blanking electrode, 23 is a beam shaping deflector, 24 is a sub-deflector for beam position control, and 25 is a main deflector for beam position control. the deflector 23,
24 and 25 are all electrostatic deflectors. In addition, 2
6 is a drawing room.

On the outside of the liner tube 12, a preferably rod-shaped conductive member 30 made of copper or the like is disposed along the longitudinal direction of the liner tube 12. The first part of the conductive member 30
In the figure, the lower end extends to the outside of the outer cylinder 11, and the ground wire 3
1 is preferably connected to an independent earth pot (not shown).

The anode (not shown) of the electron gun 21 and the ground side polarization of the blanking pole 22 are electrically connected to the conductive member 30 by conductors 32 and 33;
3 is electrically connected to the liner tube 12.

Near the portion where the terminals (not shown) of each deflector 23, 24, 25 of the conductor hookable member 30 protrude from the liner tube 12 (this is the ring-shaped portion 34, 3 as shown in Figure @2).
5.36 is provided. These ring-shaped parts 34
, 35 and 36 form a part of the conductive member 30, and a small portion (at least a portion thereof) is engaged with the outer peripheral surface of the liner tube 12 so as to be electrically conductive.

FIG. 3 shows the IJ 7 segment 34 corresponding to the deflector 23.
Although some parts are omitted in the figure, each polarization 23a is connected to the corresponding deflection amplifier 18, and the common 18a is connected to the ring-shaped part 34. has been done.

The IJ 7 tag-shaped parts 34, 35, and 36 have the code 34 in the middle.
They are cut as shown by a, 35a, and 36a to prevent induced force from being generated by a charged beam passing through the inside. Note that if the ring-shaped portions 34, 35, and 36 are electrically connected to the liner tube 12 over the entire length,
Cutting section 34a.

35a and 36a may not be provided.

Next, the operation of this device will be explained. 'The anode of the Seiko gun 21 and the grounding terminal of the planking 1 pole 22 are connected to the conductor 32, 33.4Et member 30 and the ground wire 31.
4, it is reliably grounded to a first type independent ground, etc., and a predetermined ground potential is maintained, and the potential of the outer cylinder 11 does not rise due to these grounds. Further, each deflector 23, 24, 25 is a ring-shaped portion 34, 35, 36' which is maintained at a stable ground potential such as a 14th independent ground via a coupled member 30 and 4 ground wires 31%.
? Because it is a common terminal, it is possible to keep the common establishment constant (there is almost no potential difference between these commons, and it is possible to reduce noise and direct the beam to the positive debris.Experiment 1 of the inventor According to this, we were able to suppress the noise level from the conventional 3 mV 1 star to 1 mV or less.Furthermore, since the liner tube 12 is electrically connected to the 4 region 1 member 30, the liner tube 12
The charge-up 9 can also be prevented, which also improves the drawing accuracy.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to suppress the difference between the commons of the air and air components of the load d-beam lens barrel by /j%, and it is also possible to keep the ground ti constant. It is also possible to prevent charge-up of the liner tube, resulting in the effect of significantly increasing drawing accuracy.

[Brief explanation of the drawing]

Fig. 1 is a schematic sectional view of main parts showing one embodiment of the present invention;
The figure is a perspective view of the interconnected member, Figure 3 is a sectional view taken along line 3-3 in Figure 1, Figure 4 is a partial sectional view of the conventional device, and Figure 5 is a sectional view taken along line 5-5 in Figure 4. It is a diagram. lO... Charged beam optical lens barrel, 11... Outer cylinder, 12
...liner tube, 21...beam source (1!
air parts), 22...Blanking' polarity (air parts)
, 23.24.25... 8-pole silent electrode deflector (α air component), 30... Interlocking member, 31... Earth wire,
32.33...Conductor, 34.35,36...Ring, most part, 34a%35a, 36a...Cut portion. Agent Patent Attorney Nori Chika M Udo Matsuyama Hikaru 2nd 1st
Ward diagram diagram diagram diagram diagram diagram 1/tube diagram

Claims (2)

[Claims] (1) In a charged beam lithography system, a conductive member is provided outside the liner tube of the charged beam optical barrel while keeping the conductive member in a conductive state, and this conductive member is used as an electrical component to be attached to the charged beam optical barrel. A charged beam lithography device characterized by having a common or ground terminal. (2) The electric component is a multipolar electrostatic deflector, the conductive member has a ring-shaped part, and the ring-shaped part is used as a common terminal for each electrode of the multipolar electrostatic deflector. A charged beam lithography apparatus according to claim 1.