JPH0262649U - - Google Patents
Info
- Publication number
- JPH0262649U JPH0262649U JP14154688U JP14154688U JPH0262649U JP H0262649 U JPH0262649 U JP H0262649U JP 14154688 U JP14154688 U JP 14154688U JP 14154688 U JP14154688 U JP 14154688U JP H0262649 U JPH0262649 U JP H0262649U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- source chamber
- microwave
- axial
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 230000004323 axial length Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14154688U JPH0644006Y2 (ja) | 1988-10-28 | 1988-10-28 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14154688U JPH0644006Y2 (ja) | 1988-10-28 | 1988-10-28 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0262649U true JPH0262649U (OSRAM) | 1990-05-10 |
| JPH0644006Y2 JPH0644006Y2 (ja) | 1994-11-14 |
Family
ID=31406705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14154688U Expired - Lifetime JPH0644006Y2 (ja) | 1988-10-28 | 1988-10-28 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644006Y2 (OSRAM) |
-
1988
- 1988-10-28 JP JP14154688U patent/JPH0644006Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644006Y2 (ja) | 1994-11-14 |
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