JPH0262310B2 - - Google Patents
Info
- Publication number
- JPH0262310B2 JPH0262310B2 JP13205382A JP13205382A JPH0262310B2 JP H0262310 B2 JPH0262310 B2 JP H0262310B2 JP 13205382 A JP13205382 A JP 13205382A JP 13205382 A JP13205382 A JP 13205382A JP H0262310 B2 JPH0262310 B2 JP H0262310B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electric field
- dielectric layer
- exposed
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 14
- 150000002500 ions Chemical class 0.000 description 7
- 239000000758 substrate Substances 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13205382A JPS5923500A (ja) | 1982-07-30 | 1982-07-30 | フロ−テイング型電界カ−テン装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13205382A JPS5923500A (ja) | 1982-07-30 | 1982-07-30 | フロ−テイング型電界カ−テン装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5923500A JPS5923500A (ja) | 1984-02-06 |
| JPH0262310B2 true JPH0262310B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-25 |
Family
ID=15072414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13205382A Granted JPS5923500A (ja) | 1982-07-30 | 1982-07-30 | フロ−テイング型電界カ−テン装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5923500A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-07-30 JP JP13205382A patent/JPS5923500A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5923500A (ja) | 1984-02-06 |