JPH0261956U - - Google Patents
Info
- Publication number
- JPH0261956U JPH0261956U JP13916588U JP13916588U JPH0261956U JP H0261956 U JPH0261956 U JP H0261956U JP 13916588 U JP13916588 U JP 13916588U JP 13916588 U JP13916588 U JP 13916588U JP H0261956 U JPH0261956 U JP H0261956U
- Authority
- JP
- Japan
- Prior art keywords
- sublimate
- block
- water
- cooled hearth
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13916588U JPH0336519Y2 (de) | 1988-10-27 | 1988-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13916588U JPH0336519Y2 (de) | 1988-10-27 | 1988-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261956U true JPH0261956U (de) | 1990-05-09 |
| JPH0336519Y2 JPH0336519Y2 (de) | 1991-08-02 |
Family
ID=31402169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13916588U Expired JPH0336519Y2 (de) | 1988-10-27 | 1988-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336519Y2 (de) |
-
1988
- 1988-10-27 JP JP13916588U patent/JPH0336519Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336519Y2 (de) | 1991-08-02 |