JPH0392766U - - Google Patents
Info
- Publication number
- JPH0392766U JPH0392766U JP15294889U JP15294889U JPH0392766U JP H0392766 U JPH0392766 U JP H0392766U JP 15294889 U JP15294889 U JP 15294889U JP 15294889 U JP15294889 U JP 15294889U JP H0392766 U JPH0392766 U JP H0392766U
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- shutter
- vapor
- deposited
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15294889U JPH0392766U (de) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15294889U JPH0392766U (de) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392766U true JPH0392766U (de) | 1991-09-20 |
Family
ID=31699184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15294889U Pending JPH0392766U (de) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392766U (de) |
-
1989
- 1989-12-28 JP JP15294889U patent/JPH0392766U/ja active Pending