JPH0261198U - - Google Patents
Info
- Publication number
- JPH0261198U JPH0261198U JP13975088U JP13975088U JPH0261198U JP H0261198 U JPH0261198 U JP H0261198U JP 13975088 U JP13975088 U JP 13975088U JP 13975088 U JP13975088 U JP 13975088U JP H0261198 U JPH0261198 U JP H0261198U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- stator
- blades
- blade
- multiple stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13975088U JPH0640955Y2 (ja) | 1988-10-26 | 1988-10-26 | 磁気軸受型ターボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13975088U JPH0640955Y2 (ja) | 1988-10-26 | 1988-10-26 | 磁気軸受型ターボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261198U true JPH0261198U (me) | 1990-05-07 |
| JPH0640955Y2 JPH0640955Y2 (ja) | 1994-10-26 |
Family
ID=31403301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13975088U Expired - Lifetime JPH0640955Y2 (ja) | 1988-10-26 | 1988-10-26 | 磁気軸受型ターボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640955Y2 (me) |
-
1988
- 1988-10-26 JP JP13975088U patent/JPH0640955Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640955Y2 (ja) | 1994-10-26 |