JPH0261044B2 - - Google Patents

Info

Publication number
JPH0261044B2
JPH0261044B2 JP56182910A JP18291081A JPH0261044B2 JP H0261044 B2 JPH0261044 B2 JP H0261044B2 JP 56182910 A JP56182910 A JP 56182910A JP 18291081 A JP18291081 A JP 18291081A JP H0261044 B2 JPH0261044 B2 JP H0261044B2
Authority
JP
Japan
Prior art keywords
temperature
thyristor
heater
power
thyristors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56182910A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5884314A (ja
Inventor
Takeshi Sakizaka
Akio Katayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sansha Electric Manufacturing Co Ltd
Original Assignee
Sansha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sansha Electric Manufacturing Co Ltd filed Critical Sansha Electric Manufacturing Co Ltd
Priority to JP56182910A priority Critical patent/JPS5884314A/ja
Publication of JPS5884314A publication Critical patent/JPS5884314A/ja
Publication of JPH0261044B2 publication Critical patent/JPH0261044B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
    • G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
    • G05D23/1932—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces
    • G05D23/1934—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces each space being provided with one sensor acting on one or more control means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Remote Sensing (AREA)
  • Control Of Electrical Variables (AREA)
  • Power Conversion In General (AREA)
JP56182910A 1981-11-13 1981-11-13 電力調整装置 Granted JPS5884314A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56182910A JPS5884314A (ja) 1981-11-13 1981-11-13 電力調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56182910A JPS5884314A (ja) 1981-11-13 1981-11-13 電力調整装置

Publications (2)

Publication Number Publication Date
JPS5884314A JPS5884314A (ja) 1983-05-20
JPH0261044B2 true JPH0261044B2 (de) 1990-12-19

Family

ID=16126517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56182910A Granted JPS5884314A (ja) 1981-11-13 1981-11-13 電力調整装置

Country Status (1)

Country Link
JP (1) JPS5884314A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2681631B2 (ja) * 1986-09-24 1997-11-26 国際電気株式会社 交流電力制御装置
JP6100672B2 (ja) * 2013-10-25 2017-03-22 東京エレクトロン株式会社 温度制御機構、温度制御方法及び基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5344853A (en) * 1976-10-06 1978-04-22 Hitachi Seiko Kk Energizing unit
JPS5399186A (en) * 1977-02-08 1978-08-30 Matsushita Electric Ind Co Ltd Temperature controller

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5344853A (en) * 1976-10-06 1978-04-22 Hitachi Seiko Kk Energizing unit
JPS5399186A (en) * 1977-02-08 1978-08-30 Matsushita Electric Ind Co Ltd Temperature controller

Also Published As

Publication number Publication date
JPS5884314A (ja) 1983-05-20

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