JPH0260247U - - Google Patents
Info
- Publication number
- JPH0260247U JPH0260247U JP14042388U JP14042388U JPH0260247U JP H0260247 U JPH0260247 U JP H0260247U JP 14042388 U JP14042388 U JP 14042388U JP 14042388 U JP14042388 U JP 14042388U JP H0260247 U JPH0260247 U JP H0260247U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction surface
- vacuum tweezers
- zirconia
- opens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140423U JPH0731545Y2 (ja) | 1988-10-27 | 1988-10-27 | 真空ピンセット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140423U JPH0731545Y2 (ja) | 1988-10-27 | 1988-10-27 | 真空ピンセット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260247U true JPH0260247U (en, 2012) | 1990-05-02 |
| JPH0731545Y2 JPH0731545Y2 (ja) | 1995-07-19 |
Family
ID=31404578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988140423U Expired - Lifetime JPH0731545Y2 (ja) | 1988-10-27 | 1988-10-27 | 真空ピンセット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731545Y2 (en, 2012) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
| JPS60109859U (ja) * | 1983-12-28 | 1985-07-25 | 株式会社 デイスコ | 半導体ウエ−ハ表面研削装置 |
| JPS62287638A (ja) * | 1986-06-06 | 1987-12-14 | Hitachi Ltd | ウエハ保持具 |
| JPS6385046A (ja) * | 1986-09-29 | 1988-04-15 | 日産自動車株式会社 | ジルコニア質焼結体の製造方法 |
-
1988
- 1988-10-27 JP JP1988140423U patent/JPH0731545Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
| JPS60109859U (ja) * | 1983-12-28 | 1985-07-25 | 株式会社 デイスコ | 半導体ウエ−ハ表面研削装置 |
| JPS62287638A (ja) * | 1986-06-06 | 1987-12-14 | Hitachi Ltd | ウエハ保持具 |
| JPS6385046A (ja) * | 1986-09-29 | 1988-04-15 | 日産自動車株式会社 | ジルコニア質焼結体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731545Y2 (ja) | 1995-07-19 |