JPH0258336U - - Google Patents

Info

Publication number
JPH0258336U
JPH0258336U JP13647588U JP13647588U JPH0258336U JP H0258336 U JPH0258336 U JP H0258336U JP 13647588 U JP13647588 U JP 13647588U JP 13647588 U JP13647588 U JP 13647588U JP H0258336 U JPH0258336 U JP H0258336U
Authority
JP
Japan
Prior art keywords
wafer
loading table
ring
movable
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13647588U
Other languages
English (en)
Other versions
JPH085553Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988136475U priority Critical patent/JPH085553Y2/ja
Publication of JPH0258336U publication Critical patent/JPH0258336U/ja
Application granted granted Critical
Publication of JPH085553Y2 publication Critical patent/JPH085553Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案の構成説明図、第２図は他の実
施例を示す説明図。 １……テーブル、２……円筒部、３……リング
、４……棚、６……ピン、１０……ウエハ、１１
……支持体、１２……支点、１３……レバー、１
４，１５……エアピストン、１６……垂直ロツド
。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハを載物用テーブルに受け渡す装置におい
    て、載物用テーブルに内蔵された上下動可能のリ
    ングと、テーブルに垂直にかつ上下動可能に設け
    られ、前記リングに下端を接触する載物用テーブ
    ル上でウエハを保持するピンと、ウエハ受渡位置
    に所在して載物用テーブルの上にウエハ移動機構
    が存在するときに上記リングに上下動を与える駆
    動源とから構成されるプロービング機のウエハ受
    渡装置。
JP1988136475U 1988-10-19 1988-10-19 ウエハの受渡装置 Expired - Lifetime JPH085553Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988136475U JPH085553Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988136475U JPH085553Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡装置

Publications (2)

Publication Number Publication Date
JPH0258336U true JPH0258336U (ja) 1990-04-26
JPH085553Y2 JPH085553Y2 (ja) 1996-02-14

Family

ID=31397022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988136475U Expired - Lifetime JPH085553Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡装置

Country Status (1)

Country Link
JP (1) JPH085553Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153930U (ja) * 1984-09-14 1986-04-11
JPS6214434A (ja) * 1985-07-12 1987-01-23 Canon Inc ウエハチヤツク

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153930U (ja) * 1984-09-14 1986-04-11
JPS6214434A (ja) * 1985-07-12 1987-01-23 Canon Inc ウエハチヤツク

Also Published As

Publication number Publication date
JPH085553Y2 (ja) 1996-02-14

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