JPH0256915U - - Google Patents
Info
- Publication number
- JPH0256915U JPH0256915U JP13560288U JP13560288U JPH0256915U JP H0256915 U JPH0256915 U JP H0256915U JP 13560288 U JP13560288 U JP 13560288U JP 13560288 U JP13560288 U JP 13560288U JP H0256915 U JPH0256915 U JP H0256915U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- guide
- guide surfaces
- top plate
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
Landscapes
- Machine Tool Units (AREA)
- Support Of The Bearing (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135602U JPH0647135Y2 (ja) | 1988-10-18 | 1988-10-18 | エアスライド装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135602U JPH0647135Y2 (ja) | 1988-10-18 | 1988-10-18 | エアスライド装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0256915U true JPH0256915U (xx) | 1990-04-24 |
| JPH0647135Y2 JPH0647135Y2 (ja) | 1994-11-30 |
Family
ID=31395376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988135602U Expired - Lifetime JPH0647135Y2 (ja) | 1988-10-18 | 1988-10-18 | エアスライド装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0647135Y2 (xx) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0577126A (ja) * | 1991-09-18 | 1993-03-30 | Canon Inc | 移動ステージ装置および該装置の駆動方法 |
| JP2012152892A (ja) * | 2011-01-21 | 2012-08-16 | Fritz Studer Ag | 移動式キャリッジと直線ガイドを備えた装置 |
| KR101408056B1 (ko) * | 2012-11-16 | 2014-06-18 | 주식회사 에어로시스템 | 공기베어링을 이용한 위치 제어 시스템 |
| CN116972075A (zh) * | 2023-09-20 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | 一种磁预载结构及具有该结构的直线平台 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5929117B2 (ja) * | 2011-11-18 | 2016-06-01 | オイレス工業株式会社 | 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681219U (xx) * | 1979-11-21 | 1981-07-01 | ||
| JPS58196417U (ja) * | 1982-06-25 | 1983-12-27 | 石川島播磨重工業株式会社 | ガス軸受構造 |
| JPS63125820A (ja) * | 1986-11-13 | 1988-05-30 | Toshiba Corp | 静圧軸受 |
-
1988
- 1988-10-18 JP JP1988135602U patent/JPH0647135Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681219U (xx) * | 1979-11-21 | 1981-07-01 | ||
| JPS58196417U (ja) * | 1982-06-25 | 1983-12-27 | 石川島播磨重工業株式会社 | ガス軸受構造 |
| JPS63125820A (ja) * | 1986-11-13 | 1988-05-30 | Toshiba Corp | 静圧軸受 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0577126A (ja) * | 1991-09-18 | 1993-03-30 | Canon Inc | 移動ステージ装置および該装置の駆動方法 |
| JP2012152892A (ja) * | 2011-01-21 | 2012-08-16 | Fritz Studer Ag | 移動式キャリッジと直線ガイドを備えた装置 |
| KR101408056B1 (ko) * | 2012-11-16 | 2014-06-18 | 주식회사 에어로시스템 | 공기베어링을 이용한 위치 제어 시스템 |
| CN116972075A (zh) * | 2023-09-20 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | 一种磁预载结构及具有该结构的直线平台 |
| CN116972075B (zh) * | 2023-09-20 | 2023-12-19 | 无锡星微科技有限公司杭州分公司 | 一种磁预载结构及具有该结构的直线平台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0647135Y2 (ja) | 1994-11-30 |