JPH0256626B2 - - Google Patents
Info
- Publication number
- JPH0256626B2 JPH0256626B2 JP16144081A JP16144081A JPH0256626B2 JP H0256626 B2 JPH0256626 B2 JP H0256626B2 JP 16144081 A JP16144081 A JP 16144081A JP 16144081 A JP16144081 A JP 16144081A JP H0256626 B2 JPH0256626 B2 JP H0256626B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- signal
- light receiving
- inspected
- photoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 44
- 230000003287 optical effect Effects 0.000 claims description 28
- 230000007547 defect Effects 0.000 claims description 17
- 238000007689 inspection Methods 0.000 claims description 13
- 230000004044 response Effects 0.000 claims description 6
- 230000003466 anti-cipated effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 25
- 238000010586 diagram Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 12
- 230000008859 change Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 10
- 239000007787 solid Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16144081A JPS5862543A (ja) | 1981-10-09 | 1981-10-09 | 欠陥検査装置 |
| US06/343,552 US4468120A (en) | 1981-02-04 | 1982-01-28 | Foreign substance inspecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16144081A JPS5862543A (ja) | 1981-10-09 | 1981-10-09 | 欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5862543A JPS5862543A (ja) | 1983-04-14 |
| JPH0256626B2 true JPH0256626B2 (US06623731-20030923-C00052.png) | 1990-11-30 |
Family
ID=15735149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16144081A Granted JPS5862543A (ja) | 1981-02-04 | 1981-10-09 | 欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5862543A (US06623731-20030923-C00052.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0369675U (US06623731-20030923-C00052.png) * | 1989-11-07 | 1991-07-11 | ||
| JPH0372672U (US06623731-20030923-C00052.png) * | 1989-11-17 | 1991-07-23 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE15965T1 (de) * | 1982-06-03 | 1985-10-15 | Hell Rudolf Dr Ing Gmbh | Abtastverfahren und abtasteinrichtung. |
| JPS60114749A (ja) * | 1983-11-28 | 1985-06-21 | Toyota Motor Corp | 表面欠陥計測装置 |
| JPS60114750A (ja) * | 1983-11-28 | 1985-06-21 | Toyota Motor Corp | 表面欠陥計測装置 |
| EP0162120B1 (de) * | 1984-05-14 | 1988-12-07 | Ibm Deutschland Gmbh | Verfahren und Einrichtung zur Oberflächenprüfung |
| JPH0629860B2 (ja) * | 1986-07-28 | 1994-04-20 | キヤノン株式会社 | 表面状態検査装置 |
| JPH04203956A (ja) * | 1990-11-29 | 1992-07-24 | Bando Chem Ind Ltd | 外観検査方法および装置 |
| JP2796906B2 (ja) * | 1992-02-03 | 1998-09-10 | 日立電子エンジニアリング株式会社 | 異物検査装置 |
| JP3314440B2 (ja) * | 1993-02-26 | 2002-08-12 | 株式会社日立製作所 | 欠陥検査装置およびその方法 |
-
1981
- 1981-10-09 JP JP16144081A patent/JPS5862543A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0369675U (US06623731-20030923-C00052.png) * | 1989-11-07 | 1991-07-11 | ||
| JPH0372672U (US06623731-20030923-C00052.png) * | 1989-11-17 | 1991-07-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5862543A (ja) | 1983-04-14 |
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