JPH0256619B2 - - Google Patents

Info

Publication number
JPH0256619B2
JPH0256619B2 JP57180726A JP18072682A JPH0256619B2 JP H0256619 B2 JPH0256619 B2 JP H0256619B2 JP 57180726 A JP57180726 A JP 57180726A JP 18072682 A JP18072682 A JP 18072682A JP H0256619 B2 JPH0256619 B2 JP H0256619B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
vibrator
bending
bonded
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57180726A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5970923A (ja
Inventor
Tetsuji Fukada
Yukihiko Ise
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57180726A priority Critical patent/JPS5970923A/ja
Priority to EP83107244A priority patent/EP0100501B1/en
Priority to DE8383107244T priority patent/DE3379175D1/de
Publication of JPS5970923A publication Critical patent/JPS5970923A/ja
Publication of JPH0256619B2 publication Critical patent/JPH0256619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP57180726A 1982-07-28 1982-10-14 振動センサ Granted JPS5970923A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP57180726A JPS5970923A (ja) 1982-10-14 1982-10-14 振動センサ
EP83107244A EP0100501B1 (en) 1982-07-28 1983-07-23 Vibration sensor
DE8383107244T DE3379175D1 (en) 1982-07-28 1983-07-23 Vibration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57180726A JPS5970923A (ja) 1982-10-14 1982-10-14 振動センサ

Publications (2)

Publication Number Publication Date
JPS5970923A JPS5970923A (ja) 1984-04-21
JPH0256619B2 true JPH0256619B2 (US20100223739A1-20100909-C00005.png) 1990-11-30

Family

ID=16088227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57180726A Granted JPS5970923A (ja) 1982-07-28 1982-10-14 振動センサ

Country Status (1)

Country Link
JP (1) JPS5970923A (US20100223739A1-20100909-C00005.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618630A (ja) * 1984-06-22 1986-01-16 Matsushita Electric Ind Co Ltd 振動センサ
US5003824A (en) * 1989-12-26 1991-04-02 Matsushita Electric Industrial Co., Ltd. Vibration/acceleration sensor
US6111338A (en) * 1993-05-28 2000-08-29 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and method for producing the same

Also Published As

Publication number Publication date
JPS5970923A (ja) 1984-04-21

Similar Documents

Publication Publication Date Title
US4836023A (en) Vibrational angular rate sensor
EP0130705B1 (en) Beam structure for piezoelectric vibrating beam force or pressure sensors
KR100356695B1 (ko) 진동자이로
US5117148A (en) Vibrator
US4609844A (en) Piezoelectric vibrator
EP0641073B1 (en) Packaged piezoelectric resonator
JPH0256619B2 (US20100223739A1-20100909-C00005.png)
JPS62194720A (ja) 輪郭すべり水晶振動子
US7296467B2 (en) Angular velocity sensor
EP0100501B1 (en) Vibration sensor
JPH0257252B2 (US20100223739A1-20100909-C00005.png)
JPS6321518A (ja) 振動センサ
JPS6246266A (ja) 振動センサ
JPS6032588Y2 (ja) 振動検出器
JPS5970924A (ja) 振動センサ
JPS6342596Y2 (US20100223739A1-20100909-C00005.png)
EP0592987B1 (en) Vibratory gyroscope
JPS6030160B2 (ja) 共振型振動ピツクアツプ装置
JPH08114457A (ja) 圧電ジャイロ及びその製造方法
JPH0314824Y2 (US20100223739A1-20100909-C00005.png)
JPS6119554Y2 (US20100223739A1-20100909-C00005.png)
JPH07109970B2 (ja) 双音叉型圧電振動子の構造
JPS5924975Y2 (ja) 圧電式残量検知装置
JP2002372421A (ja) 角速度センサ及びその製造方法
JPH0641385Y2 (ja) 圧電振動子