JPH0256444U - - Google Patents

Info

Publication number
JPH0256444U
JPH0256444U JP13529688U JP13529688U JPH0256444U JP H0256444 U JPH0256444 U JP H0256444U JP 13529688 U JP13529688 U JP 13529688U JP 13529688 U JP13529688 U JP 13529688U JP H0256444 U JPH0256444 U JP H0256444U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
sides
lowest point
holding plate
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13529688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0711470Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988135296U priority Critical patent/JPH0711470Y2/ja
Publication of JPH0256444U publication Critical patent/JPH0256444U/ja
Application granted granted Critical
Publication of JPH0711470Y2 publication Critical patent/JPH0711470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1988135296U 1988-10-17 1988-10-17 半導体基板保持具 Expired - Lifetime JPH0711470Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988135296U JPH0711470Y2 (ja) 1988-10-17 1988-10-17 半導体基板保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988135296U JPH0711470Y2 (ja) 1988-10-17 1988-10-17 半導体基板保持具

Publications (2)

Publication Number Publication Date
JPH0256444U true JPH0256444U (enrdf_load_stackoverflow) 1990-04-24
JPH0711470Y2 JPH0711470Y2 (ja) 1995-03-15

Family

ID=31394791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988135296U Expired - Lifetime JPH0711470Y2 (ja) 1988-10-17 1988-10-17 半導体基板保持具

Country Status (1)

Country Link
JP (1) JPH0711470Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193877A (ja) * 1984-03-13 1985-10-02 信越半導体株式会社 輸送用半導体ウエーハケース
JPS6315042U (enrdf_load_stackoverflow) * 1986-07-16 1988-02-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193877A (ja) * 1984-03-13 1985-10-02 信越半導体株式会社 輸送用半導体ウエーハケース
JPS6315042U (enrdf_load_stackoverflow) * 1986-07-16 1988-02-01

Also Published As

Publication number Publication date
JPH0711470Y2 (ja) 1995-03-15

Similar Documents

Publication Publication Date Title
JPH0256444U (enrdf_load_stackoverflow)
JPH02133308U (enrdf_load_stackoverflow)
JPH0265331U (enrdf_load_stackoverflow)
JPS5950442U (ja) ウエハホルダ
JPS6362932U (enrdf_load_stackoverflow)
JPS6424824U (enrdf_load_stackoverflow)
JPS6336048U (enrdf_load_stackoverflow)
JPS5916162U (ja) 集光式太陽光発電装置
JPS6389248U (enrdf_load_stackoverflow)
JPH0256442U (enrdf_load_stackoverflow)
JPH0231154U (enrdf_load_stackoverflow)
JPH0289823U (enrdf_load_stackoverflow)
JPS6117732U (ja) 遠心乾燥機
JPS62152430U (enrdf_load_stackoverflow)
JPS6280336U (enrdf_load_stackoverflow)
JPH01137527U (enrdf_load_stackoverflow)
JPS6024789U (ja) 保持台
JPS6242242U (enrdf_load_stackoverflow)
JPH01165623U (enrdf_load_stackoverflow)
JPS59111040U (ja) 半導体製造用治具
JPH0272546U (enrdf_load_stackoverflow)
JPS6011445U (ja) 半導体ウエハ
JPH0241438U (enrdf_load_stackoverflow)
JPS62174808U (enrdf_load_stackoverflow)
JPH0213520U (enrdf_load_stackoverflow)