JPH0255900B2 - - Google Patents

Info

Publication number
JPH0255900B2
JPH0255900B2 JP57165369A JP16536982A JPH0255900B2 JP H0255900 B2 JPH0255900 B2 JP H0255900B2 JP 57165369 A JP57165369 A JP 57165369A JP 16536982 A JP16536982 A JP 16536982A JP H0255900 B2 JPH0255900 B2 JP H0255900B2
Authority
JP
Japan
Prior art keywords
scanning
electron beam
sample
signal
automatic focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57165369A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5954159A (ja
Inventor
Hironobu Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON DENSHI TEKUNIKUSU KK
Original Assignee
NIPPON DENSHI TEKUNIKUSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON DENSHI TEKUNIKUSU KK filed Critical NIPPON DENSHI TEKUNIKUSU KK
Priority to JP57165369A priority Critical patent/JPS5954159A/ja
Publication of JPS5954159A publication Critical patent/JPS5954159A/ja
Publication of JPH0255900B2 publication Critical patent/JPH0255900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57165369A 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置 Granted JPS5954159A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57165369A JPS5954159A (ja) 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57165369A JPS5954159A (ja) 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置

Publications (2)

Publication Number Publication Date
JPS5954159A JPS5954159A (ja) 1984-03-28
JPH0255900B2 true JPH0255900B2 (enrdf_load_html_response) 1990-11-28

Family

ID=15811058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57165369A Granted JPS5954159A (ja) 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置

Country Status (1)

Country Link
JP (1) JPS5954159A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5954159A (ja) 1984-03-28

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