JPH0255144U - - Google Patents

Info

Publication number
JPH0255144U
JPH0255144U JP13366588U JP13366588U JPH0255144U JP H0255144 U JPH0255144 U JP H0255144U JP 13366588 U JP13366588 U JP 13366588U JP 13366588 U JP13366588 U JP 13366588U JP H0255144 U JPH0255144 U JP H0255144U
Authority
JP
Japan
Prior art keywords
stem
substrate
piezoresistor
pressure sensor
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13366588U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13366588U priority Critical patent/JPH0255144U/ja
Publication of JPH0255144U publication Critical patent/JPH0255144U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第1図は、この考案の好適な実施例の要部を切
欠した斜視図である。第2図は、第1図に示す基
板の斜視図である。第3図は、従来の技術に於け
るステムの一部の断面図である。 1……ステム、2……基板、3……接着剤、4
……端子、6……ハーメチツクシール剤、7……
キヤツプ、8……パイプ、9……半田、21……
孔、23……ピエゾ抵抗体。

Claims (1)

    【実用新案登録請求の範囲】
  1. 中空円筒形状のステムと、該ステムの開口部に
    形成した被検出部位への接続部と、前記ステムの
    他端部に該他端部を封止すべく接着剤によつて固
    着するとともに表面にピエゾ抵抗体を印刷形成し
    た基板と、該基板を他の回路に電気的接続する端
    子と、前記ピエゾ抵抗体の露出面側を覆うキヤツ
    プとでなる半導体式圧力センサに於いて、前記ス
    テムに対する基板の接着面に複数の孔を穿設した
    ことを特徴とする半導体式圧力センサ。
JP13366588U 1988-10-13 1988-10-13 Pending JPH0255144U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13366588U JPH0255144U (ja) 1988-10-13 1988-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13366588U JPH0255144U (ja) 1988-10-13 1988-10-13

Publications (1)

Publication Number Publication Date
JPH0255144U true JPH0255144U (ja) 1990-04-20

Family

ID=31391738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13366588U Pending JPH0255144U (ja) 1988-10-13 1988-10-13

Country Status (1)

Country Link
JP (1) JPH0255144U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103632A (ja) * 2007-10-25 2009-05-14 Nippon Sharyo Seizo Kaisha Ltd 線状検出具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103632A (ja) * 2007-10-25 2009-05-14 Nippon Sharyo Seizo Kaisha Ltd 線状検出具

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