JPH0254756A - Vacuum vapor deposition method for plastic film - Google Patents
Vacuum vapor deposition method for plastic filmInfo
- Publication number
- JPH0254756A JPH0254756A JP20333688A JP20333688A JPH0254756A JP H0254756 A JPH0254756 A JP H0254756A JP 20333688 A JP20333688 A JP 20333688A JP 20333688 A JP20333688 A JP 20333688A JP H0254756 A JPH0254756 A JP H0254756A
- Authority
- JP
- Japan
- Prior art keywords
- film
- cooling
- vapor deposition
- temperature
- vacuum vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- 229920006255 plastic film Polymers 0.000 title claims abstract description 17
- 239000002985 plastic film Substances 0.000 title claims abstract description 17
- 238000007740 vapor deposition Methods 0.000 title abstract description 13
- 238000001816 cooling Methods 0.000 claims abstract description 27
- 239000004734 Polyphenylene sulfide Substances 0.000 claims abstract description 12
- 229920000069 polyphenylene sulfide Polymers 0.000 claims abstract description 12
- 238000004804 winding Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000001771 vacuum deposition Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 55
- 239000011104 metalized film Substances 0.000 abstract description 13
- 238000005520 cutting process Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- XWUCFAJNVTZRLE-UHFFFAOYSA-N 7-thiabicyclo[2.2.1]hepta-1,3,5-triene Chemical compound C1=C(S2)C=CC2=C1 XWUCFAJNVTZRLE-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 230000037303 wrinkles Effects 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 6
- 239000011342 resin composition Substances 0.000 description 6
- 238000007738 vacuum evaporation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 229920006267 polyester film Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000010512 thermal transition Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- 101100074998 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) nmp-2 gene Proteins 0.000 description 1
- 229920006269 PPS film Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- CJZGTCYPCWQAJB-UHFFFAOYSA-L calcium stearate Chemical compound [Ca+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O CJZGTCYPCWQAJB-UHFFFAOYSA-L 0.000 description 1
- 239000008116 calcium stearate Substances 0.000 description 1
- 235000013539 calcium stearate Nutrition 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- WXMKPNITSTVMEF-UHFFFAOYSA-M sodium benzoate Chemical compound [Na+].[O-]C(=O)C1=CC=CC=C1 WXMKPNITSTVMEF-UHFFFAOYSA-M 0.000 description 1
- 235000010234 sodium benzoate Nutrition 0.000 description 1
- 239000004299 sodium benzoate Substances 0.000 description 1
- 229910052979 sodium sulfide Inorganic materials 0.000 description 1
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 238000004736 wide-angle X-ray diffraction Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、プラスチックフィルムの真空蒸着方法に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for vacuum deposition of plastic films.
[従来の技術]
ポリエステルフィルム、ポリプロピレンフィルムなどの
プラスチックフィルムにアルミニウムなどを真空蒸着し
て金属化フィルムとすること、およびその金属化フィル
ムをコンデンサなどの用途に用いることは広く知られて
いる。また、特開昭60−255978などに、ポリフ
ェニレンスルフィドフィルムにアルミニウムなどを真空
蒸着して金属化フィルムとすること、およびその金属化
フィルムをコンデンサなどの用途に用いることも開示さ
れている。また、金属化フィルムの製造に巻取式真空蒸
着機を用いることも広く知られている。[Prior Art] It is widely known that aluminum or the like is vacuum-deposited on a plastic film such as a polyester film or a polypropylene film to form a metallized film, and that the metallized film is used for applications such as capacitors. Further, Japanese Patent Laid-Open No. 60-255978 and other publications disclose that a polyphenylene sulfide film is vacuum-deposited with aluminum or the like to form a metallized film, and that the metallized film is used for applications such as capacitors. It is also widely known to use a winding type vacuum deposition machine to produce metallized films.
[発明が解決しようとする課題]
しかし従来、プラスチックフィルムに巻取式真空蒸着機
で金属蒸着を行なう時、特に5μ以下の薄いフィルムに
おいては、蒸着機の冷却キャン上でフィルムにしわが生
じやすく、蒸発金属の潜熱でしわが固定されて、金属化
フィルムにしわが残って平面性が悪くなる現象(以下「
熱負け」ということがある)が起こりやすいという欠点
があった。この「熱負け」が発生した金属化フィルムを
、切断してコンデンサ用テープなどを製造しようとする
と、寸法精度が悪くなり、例えばマージン部(非蒸着部
)の幅が変動して、コンデンサの不良の原因となるなど
の悪影響がおる。[Problems to be Solved by the Invention] Conventionally, however, when metal evaporation is performed on plastic films using a winding type vacuum evaporation machine, wrinkles tend to occur in the film on the cooling can of the evaporation machine, especially for thin films of 5μ or less. A phenomenon in which the wrinkles are fixed by the latent heat of the evaporated metal, leaving wrinkles on the metallized film and causing poor flatness (hereinafter referred to as "
The disadvantage was that it was easy to suffer from heat loss (sometimes referred to as heat loss). If you try to cut this metallized film that has suffered heat loss to make tape for capacitors, etc., the dimensional accuracy will deteriorate, and for example, the width of the margin part (non-evaporated part) will fluctuate, resulting in a defective capacitor. There are negative effects such as causing
本発明の目的は、上記の様な従来のプラスチックフィル
ムの真空蒸着時に生ずる欠点を解消し、巻取式真空蒸着
機で金属蒸着を行なう時に「熱負け」を生じ難いプラス
チックフィルムの蒸着方法を提供することにある。The purpose of the present invention is to eliminate the above-mentioned drawbacks that occur during vacuum evaporation of conventional plastic films, and to provide a method for evaporating plastic films that is less susceptible to "heat loss" when metal evaporation is performed using a winding type vacuum evaporation machine. It's about doing.
[課題を解決するための手段]
本発明は上記の目的を達成するため、(1)巻取式真空
蒸着機によって、プラスチックフィルムの少なくとも片
面に、金属を真空蒸着する方法において、冷却キャンに
接する直前のフィルムの温度を0℃以下とすることを特
徴とするプラスチックフィルムの真空蒸着方法としたも
のである。[Means for Solving the Problems] In order to achieve the above objects, the present invention provides (1) a method for vacuum-depositing metal on at least one side of a plastic film using a winding-type vacuum deposition machine; This is a method for vacuum vapor deposition of a plastic film, characterized in that the temperature of the film immediately before being deposited is 0° C. or less.
本発明において、プラスチックフィルムとは、任意の合
成高分子からなる薄葉体であって、厚さが5μ以下のも
のを言う。例えば、ポリエステルフィルム、ポリプロピ
レンフィルム、ポリフェニレンスルフィドフィルムなど
が例示できるが、ポリフェニレンスルフィドに対して効
果が大きい。In the present invention, the plastic film refers to a thin film made of any synthetic polymer and having a thickness of 5 μm or less. For example, polyester film, polypropylene film, polyphenylene sulfide film, etc. can be used, but polyphenylene sulfide is more effective.
本発明において、ポリフェニレンスルフィドフィルム(
以下、PPSフィルムと略称することがある)とは、ポ
リ−p−フェニレンスルフィドを主成分とする樹脂組成
物の二軸配向フィルムでおる。該フィルムの厚さは、0
.4〜25μmの範囲でおるが、0.4〜10umの範
囲が効果が大きい。該フィルムの平均表面粗さRaは、
巻回時の作業性および巻回後の加熱プレス時の密着性の
点から、0.03〜0.10の範囲が好ましい。In the present invention, polyphenylene sulfide film (
(Hereinafter, it may be abbreviated as PPS film) is a biaxially oriented film of a resin composition containing poly-p-phenylene sulfide as a main component. The thickness of the film is 0
.. Although the range is from 4 to 25 μm, a range from 0.4 to 10 μm is most effective. The average surface roughness Ra of the film is
In terms of workability during winding and adhesion during hot pressing after winding, the range is preferably from 0.03 to 0.10.
またX線回折法による結晶化度25%〜45%の結晶化
フィルムでおることが好ましい。さらに、広角X線回折
で20=20〜21℃の結晶ピークについて求めた配向
度OFがEnd方向およびEdge方向で0.07〜0
.5、lhrough方向で0.6〜1.0の範囲にあ
る二軸配向フィルムであることが好ましい。Further, it is preferable to use a crystallized film having a crystallinity of 25% to 45% as measured by X-ray diffraction. Furthermore, the orientation degree OF obtained for the crystal peak at 20 = 20 to 21°C by wide-angle X-ray diffraction is 0.07 to 0 in the End direction and Edge direction.
.. 5. It is preferable that the biaxially oriented film has an orientation in the range of 0.6 to 1.0 in the lrough direction.
ここでポリ−p−フェニレンスルフィドを主成分とする
樹脂組成物(以下、PPS系組成物と略称することがお
る)とは、ポリ−p−フェニレンスルフィドを70重量
%以上含む組成物を言う。Here, the resin composition containing poly-p-phenylene sulfide as a main component (hereinafter sometimes abbreviated as PPS-based composition) refers to a composition containing 70% by weight or more of poly-p-phenylene sulfide.
ボI、’ −p−フェニレンスルフィドの含有向が70
重量%未満では、組成物としての結晶性、熱転移温度等
が低くなり、該組成物からなるフィルムの特徴である耐
熱性、寸法安定性、機械的特性等を損なう。該組成物中
の残りの30重量%未満はポリ−p−フェニレンスルフ
ィド以外のポリマ、無機または有機のフィラー、滑剤、
着色剤、紫外線吸収剤などの添加物を含むことも差し支
えない。BoI, '-p-phenylene sulfide content direction is 70
If the amount is less than % by weight, the crystallinity, thermal transition temperature, etc. of the composition will be low, and the characteristics of the film made of the composition, such as heat resistance, dimensional stability, and mechanical properties, will be impaired. The remaining less than 30% by weight of the composition is a polymer other than poly-p-phenylene sulfide, an inorganic or organic filler, a lubricant,
It may also contain additives such as colorants and ultraviolet absorbers.
該樹脂組成物の溶融粘度は、温度300″C,vん断速
度2001/secのもとで、5.OO〜12000ポ
イズ(より好ましくは700〜10000ポイズ)の範
囲がフィルムの成形性の点で好ましい。The melt viscosity of the resin composition is in the range of 5.00 to 12,000 poise (more preferably 700 to 10,000 poise) at a temperature of 300''C and a shear rate of 2001/sec in terms of film formability. It is preferable.
該樹脂組成物の溶融粘度は、最終的に得られるポリフェ
ニレンスルフィドフィルムの、溶融粘度に等しい。The melt viscosity of the resin composition is equal to the melt viscosity of the polyphenylene sulfide film finally obtained.
本発明においてポリ−p−フェニレンスルフィド(以下
、PPSと略称することがある〉とは、繰り返し単位の
70モル%以上(好ましくは85モル%以上)が構造式
+S+ で示される構成単位からなる重合体をいう。In the present invention, poly-p-phenylene sulfide (hereinafter sometimes abbreviated as PPS) refers to a polymer in which 70 mol% or more (preferably 85 mol% or more) of repeating units are structural units represented by the structural formula +S+. It means merging.
係る成分が70モル%未満ではポリマの結晶性、熱転移
温度等が低くなりPPSを主成分とする樹脂組成物から
なるフィルムの特長である耐熱性、寸法安定性、機械的
特性等を損なう。If the content of such components is less than 70 mol%, the crystallinity, thermal transition temperature, etc. of the polymer will be low, impairing the heat resistance, dimensional stability, mechanical properties, etc., which are the characteristics of a film made of a resin composition containing PPS as a main component.
繰り返し単位の30モル%未満、好ましくは15モル%
未満であれば共重合可能なスルフィド結合を含有する単
位が含まれていても差し支えない。Less than 30 mol% of repeating units, preferably 15 mol%
If the amount is less than 1, there is no problem even if a unit containing a copolymerizable sulfide bond is included.
また本発明のフィルム中に、表面粗さを整える目的など
のために、無機の微粒子を含有することは好ましい。Further, it is preferable that inorganic fine particles be contained in the film of the present invention for the purpose of adjusting the surface roughness.
本発明においては、フィルムの長手方向に断面積1平方
ミリメートル当り3Kyの張力を加えつつ25℃から5
0℃まで10℃/分の速さで昇温した時の、長手方向の
伸びが0.15%以下でおるプラスチックフィルムを用
いるのが「熱負け」の発生をより少なくする上で好まし
い。係る伸びの大きさは、0.12%以下であることが
より好ましい。また同様の条件で70℃まで昇温した時
の伸びが0.4%以下であれば好ましい。ざらに、同様
の条件で80℃まで昇温した時の伸びが0゜4%以下で
あればより好ましい。In the present invention, while applying a tension of 3 Ky per 1 square millimeter of cross-sectional area in the longitudinal direction of the film,
It is preferable to use a plastic film whose longitudinal elongation is 0.15% or less when the temperature is raised to 0°C at a rate of 10°C/min in order to further reduce the occurrence of "heat loss." The magnitude of such elongation is more preferably 0.12% or less. Further, it is preferable that the elongation when the temperature is raised to 70° C. under the same conditions is 0.4% or less. Generally speaking, it is more preferable if the elongation when heated to 80°C under the same conditions is 0°4% or less.
プラスチックフィルムの係る伸びを上記の範囲とする方
法は特に問わない。例えば、ポリフェニレンスルフィド
フィルムにおいては、特開昭55111235等に記載
された周知の方法でポリ−p−フェニレンスルフィドを
主成分とする樹脂組成物を、押出機などに供給して溶融
し、Tダイから冷却ドラム上に押し出して無配向シート
とし、該シートを95〜115°Cの温度で縦、横に同
時、もしくは逐次2軸延伸し、さらに200 ’C以上
、融点以下の温度で熱処理して、中間体を得、次に該中
間体を、30〜120℃(好ましくは30〜70℃)で
5秒〜10日間熱処理する方法が挙げられる。該熱処理
の時間は、温度によって適宜選定することができる。一
般に低温では長時間を要し、高温では短時間になる。該
熱処理は、フィルム製造ラインで中間体の製造と連続し
て行なうこともできるし、いったん巻取ってから、行な
うこともできる。1麦者では、フィルムを巻きだしなが
ら連続的に行なうこともできるし、ロール状で熱風オー
ブン中などに入れて行なうこともできる。There is no particular limitation on the method for controlling the elongation of the plastic film within the above range. For example, in the case of polyphenylene sulfide film, a resin composition containing poly-p-phenylene sulfide as a main component is supplied to an extruder or the like and melted using a well-known method described in JP-A-55111235, etc., and then passed through a T-die. The sheet is extruded onto a cooling drum to form a non-oriented sheet, and the sheet is biaxially stretched longitudinally and transversely simultaneously or sequentially at a temperature of 95 to 115 °C, and further heat-treated at a temperature of 200 °C or higher and below the melting point, Examples include a method of obtaining an intermediate and then heat-treating the intermediate at 30 to 120°C (preferably 30 to 70°C) for 5 seconds to 10 days. The time for the heat treatment can be appropriately selected depending on the temperature. In general, it takes a long time at low temperatures and a short time at high temperatures. The heat treatment can be carried out continuously with the production of the intermediate on a film production line, or can be carried out once the film has been wound up. In the case of a single barley, it can be carried out continuously while unrolling the film, or it can be carried out in a roll form in a hot air oven.
また、該熱処理を、異なる温度で二段階以上にわたって
行なうこともできる。このような、中間体を熱処理する
方法は、ポリエステルフィルムなど他のプラスチックフ
ィルムフィルムにも適用できる。Further, the heat treatment can be performed in two or more stages at different temperatures. This method of heat treating an intermediate can also be applied to other plastic films such as polyester films.
該フィルムに連続巻取式蒸着機によって、その少なくと
も片面に、金属を真空蒸着するが、この際、冷却キャン
に接する直前のフィルムの温度をO′C以下とする必要
がある。該温度が高過ぎると熱負けが発生し易くなる。A metal is vacuum-deposited on at least one side of the film using a continuous winding type evaporator. At this time, the temperature of the film immediately before it comes into contact with the cooling can must be kept below O'C. If the temperature is too high, heat loss is likely to occur.
フィルムの両面を連続して蒸着するため2個の冷却キャ
ンを備えた蒸着機では、各冷却キャン毎に、上記の温度
条件を満たす必要がある。In a vapor deposition machine equipped with two cooling cans for continuously vapor-depositing both sides of a film, it is necessary to satisfy the above temperature conditions for each cooling can.
冷却キャンに接する直前のフィルムの温度を0°C以下
とする方法は特に問わないが、巻取式真空蒸着別内の巻
出し機と冷却キャンの間に、少なくとも1本の冷却ロー
ルを設けて、走行中のフィルムを冷却する方法が好まし
い。フィルムの両面を連続して蒸着するため2個の冷却
キャンを備えた蒸着機では、各冷却キャン毎に、キャン
の前に冷却ロールを設けるのが好ましい。もた、巻だし
機にセットする前に予めフィルムを充分冷却しておく方
法も用い得る。There is no particular method for keeping the temperature of the film just before it comes into contact with the cooling can below 0°C, but at least one cooling roll should be provided between the unwinding machine and the cooling can in the winding type vacuum evaporation unit. , a method of cooling the film while it is running is preferred. In a deposition machine equipped with two cooling cans for successively depositing both sides of a film, it is preferable to provide a cooling roll in front of each cooling can. Alternatively, a method may be used in which the film is sufficiently cooled before being set on the unwinding machine.
冷却キャン内を循環する冷媒は、−15℃以下にするこ
とが、熱負けをより少なくする上で好ましい。It is preferable that the temperature of the refrigerant circulating in the cooling can be -15° C. or lower in order to further reduce heat loss.
真空蒸着する金属については、その種類、を問わないが
、アルミニウム、亜鉛、錫、銅、金、銀などを例示でき
る。また、真空蒸着する金属を加熱する方法も、抵抗加
熱法、電子ビーム加熱法など特に問わない。The type of metal to be vacuum-deposited is not limited, but examples include aluminum, zinc, tin, copper, gold, and silver. Further, the method of heating the metal to be vacuum-deposited is not particularly limited, such as resistance heating method or electron beam heating method.
[特性の測定法および評価方法]
(1) 伸び 55o(もしくは5701s8Q>本
発明における、フィルムの長手方向に断面積1平方ミリ
メートル当り3Kyの張力を加えつつ25℃から50’
C(もしくは70’Cもしくは80 ’C)まで10℃
/分の速さで昇温した時の、長手方向の伸びを測定する
には、フィルム長手方向に長さ1100#、幅10mの
試験片を切り出し、該試験片の断面積1平方ミリメート
ル当り3KHに相当する荷重を下端に付けて、温度を2
5℃に保った熱風オーブンのなかに吊し、約1000m
の間隔でフィルムの両端付近に付けた標線の間隔Loを
2台の光学式位置検出機(ライセンサ−)で読み取り、
熱風オーブンの温度を10℃/分の速さで昇温して50
℃(もしくは70℃もしくは80℃)に達した瞬間の標
線の間隔りを再び読み取って、100X (L−Lo
)/Lo (単位%)として、伸び55o(もしくは
370もしくは58o)を算出する。[Measurement method and evaluation method of properties] (1) Elongation 55o (or 5701s8Q> In the present invention, from 25°C to 50' while applying a tension of 3 Ky per 1 square millimeter of cross-sectional area in the longitudinal direction of the film
10℃ to C (or 70'C or 80'C)
To measure the elongation in the longitudinal direction when the temperature is raised at a rate of /min, cut out a test piece with a length of 1100 # and a width of 10 m in the longitudinal direction of the film, and apply 3KH per square millimeter of cross-sectional area of the test piece. Attach a load equivalent to 2 to the lower end and raise the temperature to 2.
Suspended in a hot air oven maintained at 5℃ for approximately 1000m.
Two optical position detectors (licensors) read the interval Lo between marked lines placed near both ends of the film at intervals of .
Raise the temperature of the hot air oven at a rate of 10℃/min to 50℃.
℃ (or 70℃ or 80℃), read the distance between the gauge lines again, and calculate 100X (L-Lo
)/Lo (unit: %) to calculate elongation of 55o (or 370 or 58o).
(2) 蒸着時の「熱負け」の程度
日本真空技研■製の連続巻取式片面蒸着機を用いて、幅
500mのフィルム試料にアルミニウムを蒸着した。こ
の時、冷却キャン内循環の冷媒温度は一30℃とし、9
m幅の蒸着部と1m幅の非蒸着部が交互に繰り返される
ストライプ状に蒸着した。(2) Degree of "heat loss" during vapor deposition Aluminum was vapor-deposited on a film sample with a width of 500 m using a continuous winding type single-sided vapor deposition machine manufactured by Nippon Shinku Giken ■. At this time, the temperature of the refrigerant circulating inside the cooling can is -30℃, and
The vapor deposition was carried out in a stripe pattern in which m-wide vapor-deposited areas and 1-m-wide non-evaporated areas were alternately repeated.
蒸着後の金属化フィルムを観察し、次の基準で「熱負け
」の程度を判定した。The metallized film after vapor deposition was observed, and the degree of "heat loss" was determined based on the following criteria.
○ : 金属化フィルムの縦方向に走るしわが見られな
い。○: No wrinkles running in the vertical direction of the metallized film were observed.
△ : 金属化フィルムの縦方向に走るしわが見られる
が、全体にうねりは見ら
れず、張力を加えている間しわが消
える。△: Wrinkles running in the longitudinal direction of the metallized film are observed, but no waviness is observed as a whole, and the wrinkles disappear while tension is applied.
× : 金属化フィルムの縦方向に走る十数本以上のし
わに加え、全体にうねり
が見られ、張力を加えてもしわが残
る。×: In addition to more than ten wrinkles running in the longitudinal direction of the metallized film, undulations were observed throughout the film, and the wrinkles remained even when tension was applied.
[発明の効果]
本発明の真空蒸着方法は、上記の構成としたことにより
、従来、プラスチックフィルムに巻取式真空蒸着機で金
属を真空蒸着する際の欠点であった蒸着時の「熱負け」
が起こり難くなり、その結果、1qられる金属化フィル
ムを切断してコンデンサ用テープとする時などに寸法精
度が向上し、コンデンサの不良率が小さくなるなどの効
果が得られる。また、いわゆるラッカーコーチングタイ
プの積層コンデンサを製造する目的などのために、得ら
れた金属フィルムにコーチングを行なう場合にも、コー
チングパターンとの寸法ずれが起こり難いという効果も
める。また、包装用など外観が問題になる用途において
、蒸着フィルムの外観が向上するという効果も期待でき
る。[Effects of the Invention] The vacuum evaporation method of the present invention has the above-mentioned configuration, thereby eliminating "heat loss" during evaporation, which was a drawback when metals were conventionally vacuum evaporated onto plastic films using a winding type vacuum evaporation machine. ”
As a result, when cutting 1q metallized film to make tape for capacitors, dimensional accuracy is improved and the defective rate of capacitors is reduced. Further, even when the obtained metal film is coated for the purpose of manufacturing a so-called lacquer coating type multilayer capacitor, it also has the effect that dimensional deviation from the coating pattern is less likely to occur. Furthermore, in applications where appearance is an issue, such as packaging, it can be expected that the appearance of the vapor-deposited film will be improved.
[実施例] 次に本発明の実施例を挙げて、ざらに詳細に説明する。[Example] Next, examples of the present invention will be given and explained in detail.
実施例1
(1) 本発明に用いるPP5−BOの製造オートク
レーブに、硫化ナトリウム32.6KI(250モル、
結晶水40wt%を含む)、水酸化ナトリウム1009
、安息香酸ナトリウム36゜1 Kg(250モル〉、
及びN−メチル−2−ピロリドン(以下NMPと略称す
ることがある)79゜2KFlを仕込み205°Cで脱
水したのち、1.4ジクロルベンゼン(p−DCBと略
称する)37゜5Kff(255モル)、及びNMP2
0.ONgを加え、265°Cで4時間反応させた。反
応生成物を水洗、乾燥して、p−フェニレンスルフィド
100モル%からなり、溶融粘度3100ポイズのポリ
−p−フェニレンスルフィド21.1Ny(収率78%
)を得た。Example 1 (1) Production of PP5-BO used in the present invention 32.6 KI of sodium sulfide (250 mol,
(contains 40 wt% of water of crystallization), sodium hydroxide 1009
, sodium benzoate 36°1 Kg (250 mol),
After charging 79°2KFl of mole), and NMP2
0. ONg was added and reacted at 265°C for 4 hours. The reaction product was washed with water and dried to obtain poly-p-phenylene sulfide 21.1Ny (yield 78%) consisting of 100 mol% p-phenylene sulfide and having a melt viscosity of 3100 poise.
) was obtained.
この組成物に、平均粒子径0.7μmのシリカ微粉末Q
、’l*t%、ステアリン酸カルシウム00Q5vt%
を添加し、40m径のエクストルーダによって310℃
で溶融し、金属繊維を用いた95%カット孔径10μm
のフィルタでろ過したのち長さ400m、間隔1.5m
の直線状リップを有するTダイから押し出し、表面を2
5°Cに保った金属ドラム上にキャストして冷却固化し
、厚さ約20μmの未延伸フィルムを1qた。In this composition, fine silica powder Q with an average particle size of 0.7 μm is added.
,'l*t%, Calcium stearate 00Q5vt%
and heated to 310℃ using a 40m diameter extruder.
95% cut hole diameter 10 μm using metal fiber
After filtering with a filter, the length is 400m, and the interval is 1.5m.
extruded through a T-die with a straight lip of
It was cast on a metal drum kept at 5°C and cooled to solidify, yielding 1 q of unstretched film with a thickness of about 20 μm.
このフィルムをロール群から成る縦延伸装置によって、
フィルム温度100’C1延伸速度30000%/分で
3.6倍延伸し、続いてテンタを用いて、温度100℃
、延伸速度1000%/分で3.5倍延伸し、ざらに同
一テンタ内の後続する熱処理室で、270’Cで10秒
間緊張下に熱処理して、厚さ2μmの中間体(中間体−
1)を得た。This film is stretched by a longitudinal stretching device consisting of a group of rolls.
The film was stretched 3.6 times at a film temperature of 100'C and a stretching speed of 30,000%/min.
, stretched 3.5 times at a stretching speed of 1000%/min, and then heat treated under tension at 270'C for 10 seconds in a subsequent heat treatment chamber in the same tenter to obtain a 2 μm thick intermediate (intermediate -
1) was obtained.
該中間体を、ロール状に巻取り、該ロールを50℃のオ
ーブン中で72時間熱処理して、ポリフェニレンスルフ
ィドフィルム(フィルム−1)を1qだ。該フィルムの
本発明にいう「伸び」S5oは、0.11%であった。The intermediate was wound into a roll, and the roll was heat-treated in an oven at 50°C for 72 hours to obtain 1q of polyphenylene sulfide film (film-1). The "elongation" S5o of the film according to the present invention was 0.11%.
このフィルム−1に、日本真空技研■製の連続巻取式片
面蒸着機を用いて、幅500mのフィルム試料にアルミ
ニウムを蒸着した。この時、冷却キャン直前の2本のロ
ールに一30℃の冷媒を通し、冷却キャンに接する直前
のフィルム温度を一10℃(条件1)とした。また、冷
却キャン内循環の冷媒温度は一30’Cとし、9m幅の
蒸着部と1m幅の非蒸着部が交互に繰り返されるストラ
イブ状に蒸着した。また、冷却キャン直前の2本のロー
ルに通す冷媒の温度を適当に変えて、冷却キャンに接す
る直前のフィルム温度の異なる他の3種類の条件(条件
2〜4〉でも同様に蒸着した。On this film-1, aluminum was vapor-deposited onto a film sample having a width of 500 m using a continuous winding single-sided vapor deposition machine manufactured by Nippon Shinku Giken ■. At this time, a refrigerant at -30°C was passed through the two rolls immediately before the cooling can, and the temperature of the film immediately before contacting the cooling can was set to -10°C (condition 1). The temperature of the refrigerant circulating in the cooling can was set to -30'C, and the refrigerant was deposited in stripes in which 9 m wide deposited areas and 1 m wide undeposited areas were alternately repeated. In addition, by appropriately changing the temperature of the refrigerant passed through the two rolls immediately before the cooling can, vapor deposition was carried out in the same manner under three other conditions (conditions 2 to 4) in which the film temperature immediately before contacting the cooling can was different.
結果を表−1に示す。本発明の温度条件で蒸着すると、
蒸着時の「熱負け」が起こり難いことがわかる。The results are shown in Table-1. When deposited under the temperature conditions of the present invention,
It can be seen that "heat loss" during vapor deposition is less likely to occur.
実施例2
実施例1で1qだ中間体−1をロール状に巻取り、熱処
理の温度と時間を適当に変えて、実施例1と同様に熱処
理して、本発明にいうフィルムの長手方向に断面積1平
方ミリメートル当り3kgの張力を加えつつ25℃から
50’Cまで10’C/分の速さで昇温した時の、長手
方向の伸び370の異なる4種類のフィルム(フィルム
−2〜フィルム−5)を得た。ここれらのフィルムに実
施例1と同様にして、条件1でアルミニウムを真空蒸着
した。評価を表−2に示す。Example 2 1q of the intermediate 1 in Example 1 was wound up into a roll, and heat treated in the same manner as in Example 1, changing the heat treatment temperature and time appropriately, to form a film in the longitudinal direction of the present invention. Four types of films (Film-2 to Film-5) was obtained. Aluminum was vacuum-deposited on these films under Condition 1 in the same manner as in Example 1. The evaluation is shown in Table-2.
Claims (4)
ムの少なくとも片面に、金属を真空蒸着する方法におい
て、冷却キャンに接する直前のフィルムの温度を0℃以
下とすることを特徴とするプラスチックフィルムの真空
蒸着方法。(1) A method of vacuum-depositing metal on at least one side of a plastic film using a winding type vacuum deposition machine, wherein the temperature of the film immediately before contacting the cooling can is set to 0°C or less. vacuum evaporation method.
に、少なくとも1本の冷却ロールを設けて、走行中のフ
ィルムを冷却することを特徴とする請求項(1)記載の
プラスチックフィルムの真空蒸着方法。(2) The plastic according to claim (1), characterized in that at least one cooling roll is provided between the unwinding machine and the cooling can in the winding type vacuum deposition machine to cool the running film. Vacuum deposition method for film.
り3kgの張力を加えつつ25℃から50℃まで10℃
/分の速さで昇温した時の、長手方向の伸びが0.15
%以下であるプラスチックフィルムを用いることを特徴
とする請求項(1)又は(2)記載のプラスチックフィ
ルムの真空蒸着方法。(3) 10°C from 25°C to 50°C while applying a tension of 3 kg per square millimeter of cross-sectional area in the longitudinal direction of the film.
The elongation in the longitudinal direction is 0.15 when the temperature is raised at a rate of /min.
% or less.
ドフィルムであることを特徴とする請求項(1)〜(3
)のいずれかに記載のプラスチックフィルムの真空蒸着
方法。(4) Claims (1) to (3) characterized in that the plastic film is a polyphenylene sulfide film.
) The method for vacuum deposition of a plastic film according to any one of the above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20333688A JPH0254756A (en) | 1988-08-16 | 1988-08-16 | Vacuum vapor deposition method for plastic film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20333688A JPH0254756A (en) | 1988-08-16 | 1988-08-16 | Vacuum vapor deposition method for plastic film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0254756A true JPH0254756A (en) | 1990-02-23 |
Family
ID=16472329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20333688A Pending JPH0254756A (en) | 1988-08-16 | 1988-08-16 | Vacuum vapor deposition method for plastic film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0254756A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04110752U (en) * | 1991-03-12 | 1992-09-25 | 凸版印刷株式会社 | Vacuum deposition equipment |
-
1988
- 1988-08-16 JP JP20333688A patent/JPH0254756A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04110752U (en) * | 1991-03-12 | 1992-09-25 | 凸版印刷株式会社 | Vacuum deposition equipment |
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