JPH0253967U - - Google Patents
Info
- Publication number
- JPH0253967U JPH0253967U JP13260188U JP13260188U JPH0253967U JP H0253967 U JPH0253967 U JP H0253967U JP 13260188 U JP13260188 U JP 13260188U JP 13260188 U JP13260188 U JP 13260188U JP H0253967 U JPH0253967 U JP H0253967U
- Authority
- JP
- Japan
- Prior art keywords
- ozone gas
- etching solution
- aeration pipe
- oxygen supply
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000005273 aeration Methods 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- 239000002253 acid Substances 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 230000001172 regenerating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13260188U JPH0253967U (zh) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13260188U JPH0253967U (zh) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0253967U true JPH0253967U (zh) | 1990-04-18 |
Family
ID=31389713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13260188U Pending JPH0253967U (zh) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0253967U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014525680A (ja) * | 2011-08-26 | 2014-09-29 | アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | プラスチック基板を処理する方法及び処理溶液を少なくとも部分的に再生する装置 |
| JP5830807B2 (ja) * | 2013-10-22 | 2015-12-09 | 奥野製薬工業株式会社 | 樹脂材料のエッチング処理用組成物 |
-
1988
- 1988-10-11 JP JP13260188U patent/JPH0253967U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014525680A (ja) * | 2011-08-26 | 2014-09-29 | アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | プラスチック基板を処理する方法及び処理溶液を少なくとも部分的に再生する装置 |
| JP5830807B2 (ja) * | 2013-10-22 | 2015-12-09 | 奥野製薬工業株式会社 | 樹脂材料のエッチング処理用組成物 |
| US9657226B2 (en) | 2013-10-22 | 2017-05-23 | Okuno Chemical Industries Co., Ltd. | Composition for etching treatment of resin material |