JPH0252981B2 - - Google Patents
Info
- Publication number
- JPH0252981B2 JPH0252981B2 JP58192409A JP19240983A JPH0252981B2 JP H0252981 B2 JPH0252981 B2 JP H0252981B2 JP 58192409 A JP58192409 A JP 58192409A JP 19240983 A JP19240983 A JP 19240983A JP H0252981 B2 JPH0252981 B2 JP H0252981B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- laser
- lead
- inspection
- speckle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 25
- 230000005284 excitation Effects 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 230000005291 magnetic effect Effects 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 description 49
- 230000007547 defect Effects 0.000 description 32
- 238000000034 method Methods 0.000 description 30
- 230000002950 deficient Effects 0.000 description 21
- 238000009825 accumulation Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 238000005476 soldering Methods 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 4
- 235000014676 Phragmites communis Nutrition 0.000 description 3
- 238000007664 blowing Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 244000273256 Phragmites communis Species 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002907 paramagnetic material Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/269—Various geometry objects
- G01N2291/2697—Wafer or (micro)electronic parts
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58192409A JPS6085363A (ja) | 1983-10-17 | 1983-10-17 | 接合状態検出方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58192409A JPS6085363A (ja) | 1983-10-17 | 1983-10-17 | 接合状態検出方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6085363A JPS6085363A (ja) | 1985-05-14 |
| JPH0252981B2 true JPH0252981B2 (de) | 1990-11-15 |
Family
ID=16290833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58192409A Granted JPS6085363A (ja) | 1983-10-17 | 1983-10-17 | 接合状態検出方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6085363A (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS627200A (ja) * | 1985-07-03 | 1987-01-14 | 株式会社日立製作所 | 接合状態検出装置 |
| JPS62126346A (ja) * | 1985-11-28 | 1987-06-08 | Nippon Kokan Kk <Nkk> | 非接触超音波探傷方法 |
| JPS62133341A (ja) * | 1985-12-06 | 1987-06-16 | Hitachi Ltd | はんだ付部検査装置 |
| JPH01203966A (ja) * | 1988-02-10 | 1989-08-16 | Hitachi Constr Mach Co Ltd | 微小部材接合部の接合状態検査方法およびその装置 |
| JP3201046B2 (ja) * | 1993-02-19 | 2001-08-20 | 株式会社日立製作所 | 光音響信号検出方法及び装置 |
| JP3254465B2 (ja) * | 1993-04-21 | 2002-02-04 | 株式会社日立製作所 | 光熱変位信号検出方法とその装置 |
| CN115769071A (zh) * | 2021-01-21 | 2023-03-07 | 雅马哈智能机器控股株式会社 | 不良检测装置以及不良检测方法 |
-
1983
- 1983-10-17 JP JP58192409A patent/JPS6085363A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6085363A (ja) | 1985-05-14 |
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