JPH0252961B2 - - Google Patents
Info
- Publication number
- JPH0252961B2 JPH0252961B2 JP58089566A JP8956683A JPH0252961B2 JP H0252961 B2 JPH0252961 B2 JP H0252961B2 JP 58089566 A JP58089566 A JP 58089566A JP 8956683 A JP8956683 A JP 8956683A JP H0252961 B2 JPH0252961 B2 JP H0252961B2
- Authority
- JP
- Japan
- Prior art keywords
- detection
- edge
- output
- metal plate
- detection coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 82
- 239000002184 metal Substances 0.000 claims description 41
- 238000013459 approach Methods 0.000 description 11
- 239000000523 sample Substances 0.000 description 11
- 238000004804 winding Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000003708 edge detection Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Geophysics And Detection Of Objects (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58089566A JPS59214702A (ja) | 1983-05-20 | 1983-05-20 | 金属体のエツジ検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58089566A JPS59214702A (ja) | 1983-05-20 | 1983-05-20 | 金属体のエツジ検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59214702A JPS59214702A (ja) | 1984-12-04 |
| JPH0252961B2 true JPH0252961B2 (fr) | 1990-11-15 |
Family
ID=13974357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58089566A Granted JPS59214702A (ja) | 1983-05-20 | 1983-05-20 | 金属体のエツジ検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59214702A (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001267400A (ja) * | 2000-03-16 | 2001-09-28 | Kyocera Corp | ウエハ支持部材 |
| DE10335133A1 (de) * | 2003-07-31 | 2005-03-03 | Pepperl + Fuchs Gmbh | Vorrichtung und Verfahren zur Erfassung des Wegs eines Zielobjektes |
| US7116091B2 (en) * | 2004-03-04 | 2006-10-03 | Zircon Corporation | Ratiometric stud sensing |
| JP5836193B2 (ja) * | 2012-05-17 | 2015-12-24 | オリンパス株式会社 | 慣性駆動アクチュエータ |
| JP6042694B2 (ja) * | 2012-10-23 | 2016-12-14 | オリンパス株式会社 | 慣性駆動アクチュエータ |
-
1983
- 1983-05-20 JP JP58089566A patent/JPS59214702A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59214702A (ja) | 1984-12-04 |
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