JPH0252431U - - Google Patents

Info

Publication number
JPH0252431U
JPH0252431U JP13242088U JP13242088U JPH0252431U JP H0252431 U JPH0252431 U JP H0252431U JP 13242088 U JP13242088 U JP 13242088U JP 13242088 U JP13242088 U JP 13242088U JP H0252431 U JPH0252431 U JP H0252431U
Authority
JP
Japan
Prior art keywords
substrate
temperature
vacuum container
outside
temperature signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13242088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13242088U priority Critical patent/JPH0252431U/ja
Publication of JPH0252431U publication Critical patent/JPH0252431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP13242088U 1988-10-11 1988-10-11 Pending JPH0252431U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13242088U JPH0252431U (enrdf_load_html_response) 1988-10-11 1988-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13242088U JPH0252431U (enrdf_load_html_response) 1988-10-11 1988-10-11

Publications (1)

Publication Number Publication Date
JPH0252431U true JPH0252431U (enrdf_load_html_response) 1990-04-16

Family

ID=31389364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13242088U Pending JPH0252431U (enrdf_load_html_response) 1988-10-11 1988-10-11

Country Status (1)

Country Link
JP (1) JPH0252431U (enrdf_load_html_response)

Similar Documents

Publication Publication Date Title
JPH0252431U (enrdf_load_html_response)
JPH0476946B2 (enrdf_load_html_response)
JPS6123185A (ja) 複写機等の定着装置の温度コントロ−ラ
JPS6399798U (enrdf_load_html_response)
JPS63149524U (enrdf_load_html_response)
JPH01145050U (enrdf_load_html_response)
JPS632845Y2 (enrdf_load_html_response)
JP2567127Y2 (ja) 冷陰極管の温度制御装置
JPH02119243U (enrdf_load_html_response)
JPH0350257B2 (enrdf_load_html_response)
JPS6293363U (enrdf_load_html_response)
JPH0339837U (enrdf_load_html_response)
JPS62127401U (enrdf_load_html_response)
JPS6410814U (enrdf_load_html_response)
JPS63178797U (enrdf_load_html_response)
JPH03100702U (enrdf_load_html_response)
JPS618919A (ja) 薄膜形成装置に於る半導体ウエハ温度検出方法
JPH0348850U (enrdf_load_html_response)
JPS63109498U (enrdf_load_html_response)
JPS6344437U (enrdf_load_html_response)
JPS61136214U (enrdf_load_html_response)
JPS61151254U (enrdf_load_html_response)
JPH03108271U (enrdf_load_html_response)
JPS60148511U (ja) 電気こたつの温度制御回路
JPS63199172U (enrdf_load_html_response)