JPH0252331U - - Google Patents
Info
- Publication number
- JPH0252331U JPH0252331U JP13017088U JP13017088U JPH0252331U JP H0252331 U JPH0252331 U JP H0252331U JP 13017088 U JP13017088 U JP 13017088U JP 13017088 U JP13017088 U JP 13017088U JP H0252331 U JPH0252331 U JP H0252331U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- furnace core
- core tube
- processing apparatus
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012774 insulation material Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13017088U JPH0252331U (un) | 1988-10-03 | 1988-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13017088U JPH0252331U (un) | 1988-10-03 | 1988-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252331U true JPH0252331U (un) | 1990-04-16 |
Family
ID=31385100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13017088U Pending JPH0252331U (un) | 1988-10-03 | 1988-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252331U (un) |
-
1988
- 1988-10-03 JP JP13017088U patent/JPH0252331U/ja active Pending