JPH0252252U - - Google Patents
Info
- Publication number
- JPH0252252U JPH0252252U JP13246688U JP13246688U JPH0252252U JP H0252252 U JPH0252252 U JP H0252252U JP 13246688 U JP13246688 U JP 13246688U JP 13246688 U JP13246688 U JP 13246688U JP H0252252 U JPH0252252 U JP H0252252U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- source chamber
- microwave
- introduction tube
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13246688U JPH0252252U (de) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13246688U JPH0252252U (de) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252252U true JPH0252252U (de) | 1990-04-16 |
Family
ID=31389452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13246688U Pending JPH0252252U (de) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252252U (de) |
-
1988
- 1988-10-11 JP JP13246688U patent/JPH0252252U/ja active Pending
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