JPH0251077A - Turntable for conveying semiconductor element - Google Patents

Abstract

PURPOSE:To accomplish the replacement of an element inspected with an element yet to be inspected by only one operation of a handler by arranging a plurality of stages to carry semiconductor elements yet to be inspected placed on the circumference of a turntable at an equal interval. CONSTITUTION:A shuttle stage 6 reciprocates in the direction of the arrow 8 to be transferred to another conveying device and further moved in the direction of the arrow 4c to be carried onto a stage 3 for measuring elements. Then, an element 10 inspected is chucked with a handler and moved in the direction of the arrow 4b to be carried onto a preliminary stage 2b. Then, a slider door is opened to run air higher than outside air so that an element 10 yet to be inspected placed on the shuttle stage 6 beforehand is shucked with the handler and moved in the direction of the arrow 5a to be carried onto a stage 2a at an outlet/inlet position A. Upon the completion of this operation, the handler chucks the element 10 inspected to be placed on the shuttle stage 6. In this manner, repeating this operation enables a sequential inspection of elements.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a transport device for transporting and positioning semiconductor elements, and more particularly to a turntable for transporting semiconductor elements for transporting and positioning semiconductor elements in a thermostatic oven.

[Conventional technology]

Conventionally, this type of turntable was installed in a constant temperature bath.
This turntable is used to stabilize the temperature of a semiconductor element (hereinafter referred to as an element) by placing it on the turntable surface and rotating it, as well as to transport and position the element and measure the temperature characteristics of the element. FIG. 2 is a plan view of a turntable showing an example of a conventional turntable. This turntable 1 is arranged so as to be located in the center of the thermostatic bath 7, and a plurality of stages 2 for mounting elements are attached at equal intervals on the circumference of the turntable 1.

Further, at the center of rotation of the turntable 1, there is an element measurement stage 3 for measuring the characteristics of the element. Constant temperature bath 7
A shuttle stage 6 is arranged facing the entrance/exit of the element.

Next, to explain the operation of the peripheral equipment including the turntable 1 and the thermostatic oven 7, first, the sliding door of the thermostatic oven 7 (
(not shown) is opened and at the same time, air at a higher pressure than the outside air with the same temperature inside the thermostatic chamber is flowed to prevent outside air from entering. Next, a handler (not shown) picks up the inspected device 10 placed on the device mounting stage 2a at the entrance/exit position A with a vacuum chuck, moves it in the direction of the arrow 5b, and transfers it to the shuttle stage 6. I'll ride it. At the same time as the device 10 is loaded, the shuttle stage 6 reciprocates in the direction of the arrow 8 to transfer the tested device 10 to another transport device. Next, the shuttle stage 6 reciprocates in the direction of arrow 9 to transfer untested elements 10 from another transfer device to the shuttle stage 6.

Next, the device 10 is picked up by a handler equipped with a vacuum chuck, and the handler moves in the direction of the arrow 5a and places it on the device mounting stage 2a at the entrance/exit position A.Next, the slide door closes and the outside air is removed. The air flow blocking the device stops, the turntable 1 rotates in the direction of the arrow 10, an angle of 45° in this drawing, and the device mounting stage 2a on which the next device 2 is placed moves to the entrance/exit position A. Positioned. next,
This positioned element 10 is sucked by the handler and arrow 4
It is moved in the direction a and placed on the element measurement stage. Next, a plurality of measurement bottles (not shown) are placed from the top of the thermostatic chamber 7.
is lowered and contacts the measurement pad of the element to collect various measurement data. Next, when the measurement is completed, the measuring pin rises and leaves the measuring pad of the element, and the handler again picks up the element 10 and moves it in the direction of arrow 4b to place it at the entrance/exit position A. Place it on stage 2. Next, the sliding door is opened, air with higher pressure is allowed to flow, and the inspected element 10 is sucked by the handler and moved in the direction of the arrow 5b to be placed on the shuttle stage 6.

Next, the shuttle stage 6 reciprocates in the direction of arrow 8 to transfer the tested elements to another transport device. When this transfer is completed, the shuttle stage 6 reciprocates in the direction of arrow 9 to transfer the untested elements from another transfer device to the shuttle stage 6. Next, the handler picks up the untested element 10 from the shuttle stage 6, moves the handler in the direction of the arrow 5a, and moves the handler to the element mounting stage 2 at the entrance/exit position A.
Place it on a. The slide door closes again to stop the flow of high-pressure air, and the 45° turntable is moved by arrow 1 so that the next element mounting stage 2a is at the entrance/exit position A.
Rotate in direction 1 and position.

By repeating such operations, the tested elements are taken out of the tank one by one, and the untested elements are put into the tank and tested.

In addition, the untested elements are placed on the element mounting stage 2a at the entrance/exit position A, and are fed sequentially so that the temperature of the element 10 is stably obtained at the temperature measured when exactly one rotation is made. The rotation speed of the turntable is determined by taking into consideration the measurement time, the time for placing the element, etc.

[Problem to be solved by the invention]

In the above-mentioned conventional turntable, the stage for mounting elements is also used as a stage for mounting untested elements and tested elements, so it is necessary to take the tested elements out of the thermostatic chamber before they are untested. The device cannot be placed in a thermostat. Therefore, there is a problem in that it takes a long waiting time from the end of testing an element to the start of testing the next untested element.

An object of the present invention is to provide a turntable for transporting semiconductor devices that reduces such waiting time.

[Means to solve the problem]

The turntable for transporting semiconductor elements of the present invention is a turntable for transporting and positioning semiconductor elements by placing them in a constant temperature oven, in which the uninspected semiconductor elements are arranged at equal intervals on the circumference of the turntable. a plurality of stages on which are placed a plurality of stages, a plate member fixedly arranged inside the turntable, and a plate member for measurement on the fixed member located on a straight line connecting the entrance/exit position of the turntable and the center of the turntable. It is composed of a stage and a preliminary stage.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a plan view of a turntable showing an embodiment of the present invention. The difference in the structure of this turntable 1 from the conventional example is that, as shown in the same figure, the inside of the conventional turntable 1 shown in FIG. The identification disk 12 which is a member is provided, and the element measurement stage 3 and the preliminary stage 2b are provided on this fixed disk 12 so as to be placed on a straight line connecting the entrance/exit position of the turntable 1 and the center of the turntable 1. be.

Next, to explain the operation of the peripheral equipment including the turntable 1 and the thermostatic chamber 7, as in the conventional example, first,
The sliding door of the thermostatic oven 7 is opened, and air at a pressure higher than that of the outside air having the same temperature inside the thermostatic oven flows to prevent outside air from entering. Next, unlike the conventional example, the untested element 10 that has been transferred to the shuttle stage 6 in advance is adsorbed, and the handler moves in the direction of the arrow 5a to the empty element mounting stage 2a located at the entrance/exit position A. Place it. At the same time as this operation is completed, the inspected element 10 on the preliminary stage 2b is moved by the handler in the direction of the arrow 5C, taken out of the tank, and placed on the shuttle stage 6. next,
The sliding door closes, blocking the outside air and stopping the flow of air.
Turntable 1 rotates 45° in the direction of arrow 11,
The element mounting stage 2a on which the next untested element is placed is positioned at the entrance/exit position A. At the same time as this operation, the inspected element 10 placed on the shuttle stage 6 is transferred to another transport device by reciprocating the shuttle stage 6 in the direction of arrow 8, and then reciprocating in the direction of arrow 9. Then, the untested element 10 is transferred to the shuttle stage 6 from another transfer device.

Next, the handler picks up the untested element 10, moves it in the direction of the arrow 4c, and places it on the element measurement stage 3. Next, measurement data is collected as in the conventional example. Next, the inspected element 10 is sucked by a handler, moved in the direction of the arrow 4b, and placed on the preliminary stage 2b. Next, the sliding door opens and air with a higher pressure than outside air flows through the untested elements 1 that have been placed on the shuttle stage 6 in advance.
0 by the handler, moves in the direction of the arrow 5a, and places it on the element mounting stage 2a at the entrance/exit position A. When this operation is completed, the inspected element 10 on the preliminary stage 2b is sucked by the handler, moved in the direction of arrow 5C, and placed on the shuttle stage 6. Such operations are repeated to sequentially test the elements.

In this embodiment, a circular fixing disk 12 is used as the fixing member inside the turntable 1, but instead of this fixing disk 12, a material with a size that does not interfere with the rotation of the turntable 1 may be used. A rectangular plate material may also be used.

〔Effect of the invention〕

As explained above, in the present invention, since a preliminary stage is additionally provided on the fixed disk inside the turntable, it is possible to replace the tested elements and untested elements with a single handler operation. This has the effect of shortening the time required to start measurement.

FIG. 2 is a plan view of an exemplary turntable.

DESCRIPTION OF SYMBOLS 1... Turntable, 2a... Stage for mounting elements, 2b... Preliminary stage, 3... Stage for element measurement, 4a, 4b, 4 c-Arrow, 5a, 5b, 5c.
...Arrow, 6...Shuttle stage, 7...Thermostat, 8.9.11...Arrow, 10...Element, 12...
・Fixed disc.

Claims (1)

[Claims] A turntable for transporting and positioning semiconductor devices placed in a thermostatic chamber includes a plurality of stages on which untested semiconductor devices are placed, arranged at equal intervals on the circumference of the turntable; It is characterized by comprising a plate member fixedly arranged inside the turntable, and a measuring stage and a preliminary stage located on the fixed member on a straight line connecting the entrance/exit position of the turntable and the center of the turntable. A turntable for transporting semiconductor devices.