JPH0250948A - Conjugated super hard material - Google Patents
Conjugated super hard materialInfo
- Publication number
- JPH0250948A JPH0250948A JP20000188A JP20000188A JPH0250948A JP H0250948 A JPH0250948 A JP H0250948A JP 20000188 A JP20000188 A JP 20000188A JP 20000188 A JP20000188 A JP 20000188A JP H0250948 A JPH0250948 A JP H0250948A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- composite
- ion
- compound layer
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 47
- 150000001875 compounds Chemical class 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 14
- 150000004767 nitrides Chemical class 0.000 claims abstract description 14
- 150000002739 metals Chemical class 0.000 claims abstract description 7
- 238000009684 ion beam mixing Methods 0.000 claims abstract description 5
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 5
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 3
- 229910052742 iron Inorganic materials 0.000 claims abstract 2
- 239000002131 composite material Substances 0.000 claims description 44
- 230000000737 periodic effect Effects 0.000 claims description 3
- 229910000601 superalloy Inorganic materials 0.000 claims 1
- 238000005520 cutting process Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 8
- 239000000203 mixture Substances 0.000 abstract description 8
- 230000003647 oxidation Effects 0.000 abstract description 8
- 238000007254 oxidation reaction Methods 0.000 abstract description 8
- 229910052735 hafnium Inorganic materials 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 2
- 229910052726 zirconium Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract 3
- 229910045601 alloy Inorganic materials 0.000 abstract 3
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 description 24
- 239000010410 layer Substances 0.000 description 22
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 13
- -1 nitrogen ions Chemical class 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000001659 ion-beam spectroscopy Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、複合超硬材料に関し、特に超硬合金の母材表
面に硬質の複合化合物層を被覆した切削・耐摩耗工具等
に有用な複合超硬材料に係わる。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a composite cemented carbide material, and in particular to a composite cemented carbide material useful for cutting and wear-resistant tools etc. in which the surface of a cemented carbide base material is coated with a hard composite compound layer. Related to composite carbide materials.
［従来の技術及び課題］
超硬合金の母材表面に耐摩耗性の優れたＴｉ１Ｚ ｒ
−、Ｈｆの窒化物を被覆した切削・耐摩耗工具は、該母
材のみからなる切削・耐摩耗工具に比べて更に寿命向上
を達成することかできる。しかしながら、工具の使用形
態の多様化等によりその使用条件がより苛酷になるに伴
い、更に高性能化、超寿命化が要望されてきている。[Prior art and problems] Ti1Z r with excellent wear resistance on the surface of the cemented carbide base material
A cutting/wear-resistant tool coated with -, Hf nitride can achieve a further improvement in life compared to a cutting/wear-resistant tool made only of the base material. However, as the usage conditions of tools become more severe due to the diversification of usage patterns, there is a demand for even higher performance and longer tool life.
このような要望から、最近、各種の耐摩耗性に富む炭化
物、窒化物及び酸化物の多層膜、複合膜のコーティング
技術か開発されている。その中で、特公昭６１−５４８
７２号公報にはＨｆ及びＴｉの複合化合物（Ｈｆ −Ｔ
ｉ ）Ｃ１（Ｈｆ −Ｔｉ ）Ｎ。In response to such demands, coating techniques for multilayer films and composite films of various types of highly wear-resistant carbides, nitrides, and oxides have recently been developed. Among them, Tokuko Sho 61-548
Publication No. 72 describes a composite compound of Hf and Ti (Hf-T
i) C1(Hf-Ti)N.
（Ｈｆ −Ｔｉ ）ＣＮ（７）被覆層を減圧ＣＶＤ法で
被覆することが開示されている。しかしながら、かかる
２種金属の窒化物複合被覆層では母材に対する密着性や
耐摩耗性等において必ずしも充分満足するものではなか
った。It is disclosed that a (Hf-Ti)CN(7) coating layer is coated by a low pressure CVD method. However, such two-metal nitride composite coating layers have not always been fully satisfactory in terms of adhesion to the base material, abrasion resistance, and the like.
また、特公昭６１−５７９０４号公報にはＴｉ 、 Ｚ
ｒ 。Also, in Japanese Patent Publication No. 61-57904, Ti, Z
r.
Ｈｆ’等の金属蒸気雰囲気中にて母材表面に窒素イオン
を照射するイオンミキシング手法に似た方法により被膜
を被覆することが開示されている。しかしなから、かか
る公報の実施例には単独の金属の窒化物の事例しかなく
、複数金属の窒化物からなる複合化合物層の形成、及び
その物性については全く記載されていない。It has been disclosed that a coating is applied by a method similar to an ion mixing method in which the surface of a base material is irradiated with nitrogen ions in an atmosphere of metal vapor such as Hf'. However, the examples in this publication only include examples of nitrides of a single metal, and do not describe at all the formation of a composite compound layer consisting of nitrides of multiple metals and its physical properties.
本発明は、上記従来の課題を解決するためになされたも
ので、高硬質で耐酸化性に優れた三元系金属の窒化物か
らなる複合化合物層が母材としての超硬合金表面に密着
性よく被覆された複合超硬材料を提供しようとするもの
である。The present invention was made to solve the above-mentioned conventional problems, and a composite compound layer made of nitrides of ternary metals with high hardness and excellent oxidation resistance adheres to the surface of the cemented carbide as a base material. The present invention aims to provide a composite carbide material coated with good properties.
［課題を解決するための手段］
本発明は、周期律表のＩＶａ、Ｖａ、ＶＩａ族金属の炭
化物、窒化物、炭窒化物とＮＩ Ｃｏ及びＦＢの少な（
とも１種以上とからなる超硬合金の表面にイオンビーム
ミキシング法により下記式（Ｉ）にて表わされる複合化
合物層を被覆したことを特徴とする複合超硬材料である
。[Means for Solving the Problems] The present invention provides carbides, nitrides, and carbonitrides of metals from groups IVa, Va, and VIa of the periodic table, and small amounts of NI Co and FB (
This is a composite cemented carbide material characterized in that the surface of a cemented carbide made of one or more of the following compounds is coated with a composite compound layer represented by the following formula (I) by an ion beam mixing method.
Ｃ（Ｔｊ ） ｘ （Ｚｒ ） ｙ （Ｈｆ ）
ｚ ） （Ｎ） ｖ但し、式中のＸ、ｙＳＺ、ｖはＸ
＋ｙ＋Ｚ ＝ｌ、０．４ ≦Ｘ ≦０．９５．０
．０５≦ｙ ≦０．５ ．０．０５≦ｚ ≦０．５
．０．８≦ｖ≦１．０を満足するものである。C(Tj) x (Zr) y (Hf)
z ) (N) v However, in the formula, X, ySZ, and v are X
+y+Z =l, 0.4 ≦X ≦0.95.0
．． 05≦y≦0.5. 0.05≦z≦0.5
．． It satisfies 0.8≦v≦1.0.
上記複合化合物層を表わす式（Ｉ）中のＸ、ｙ１２及び
Ｖを限定したのは、次のような理由によるものである。The reasons for limiting X, y12 and V in formula (I) representing the composite compound layer are as follows.
即ち、Ｘの値を０．４未満にすると耐酸化性の優れた複
合化合物層を得ることができす、かといってＸの値が０
．９５を越えると複合化合物中の他の金属（Ｚｒ ＳＨ
ｆ’ ）の量が少なくなって硬度等か低下するからであ
る。ｙの値を０．０５未満すると、Ｚｒの固溶における
硬度向上効果が低下し、かといつとｙの値か０．５を越
えると耐酸化性や硬度か低下するからである。Ｚの値を
０．０５未満にすると、Ｈ「の固溶における硬度向上効
果が低下し、かといつとＺの値が０．５を越えると耐酸
化性や硬度が低下するからである。■の値を０．８未滴
にすると、複合化合物層の欠陥量が増大して硬度や靭性
が低下し、かといって■の値が１．０を越えると金属欠
陥による硬度低下を招くからである。That is, if the value of X is less than 0.4, a composite compound layer with excellent oxidation resistance can be obtained, but if the value of
．． When it exceeds 95, other metals (Zr SH
This is because the amount of f') decreases, resulting in a decrease in hardness, etc. This is because if the value of y is less than 0.05, the effect of improving hardness due to solid solution of Zr decreases, and if the value of y exceeds 0.5, the oxidation resistance and hardness decrease. This is because when the value of Z is less than 0.05, the hardness improving effect of solid solution of H is reduced, and when the value of Z exceeds 0.5, oxidation resistance and hardness are reduced. If the value of (■) is less than 0.8, the amount of defects in the composite compound layer will increase and the hardness and toughness will decrease.On the other hand, if the value of (■) exceeds 1.0, the hardness will decrease due to metal defects. be.
上記複合化合物層の形成手段としては、■タゲットを用
いてイオンビームスパッタで蒸着と窒素イオンの照射を
同時に行なうイオンミキシング法、■電子ビーム蒸着源
による真空蒸着と窒素イオンの照射を同時に行なうイオ
ンミキシング法を採用することかできる。Methods for forming the above composite compound layer include: (1) ion mixing method in which vapor deposition and nitrogen ion irradiation are simultaneously performed by ion beam sputtering using a target; (2) Ion mixing method in which vacuum evaporation and nitrogen ion irradiation are simultaneously performed using an electron beam evaporation source. law can be adopted.
上記■のイオンミキシング法でのイオンビームスパッタ
においては、溶解法や粉末冶金法によりＴｊ ＳＺｒ、
Ｈｆ’を目的とする組成に容易かつ精度よく作製された
ターゲットを使用できるため、前記式（Ｉ）にて表わさ
れる複合化合物層を再現性よく形成することが可能とな
る。スパッタ用のイオンビームとしては、通常、Ａｒイ
オンが使用される。また、スパッタイオン源のイオン加
速電圧、イオン電流を制御することにより簡単かつ広範
囲でスパッタ速度を選択することが可能となる。In the ion beam sputtering using the ion mixing method mentioned above, Tj SZr,
Since it is possible to use a target that is easily and accurately produced with a composition intended for Hf', it becomes possible to form a composite compound layer represented by the above formula (I) with good reproducibility. Ar ions are usually used as the ion beam for sputtering. Furthermore, by controlling the ion acceleration voltage and ion current of the sputter ion source, it becomes possible to easily select the sputtering speed over a wide range.
一方、照射する窒素イオンは独立のイオン源から供給さ
れ、加速電圧、イオン電流の制御により照射量等を広い
範囲で調節することが可能である。On the other hand, the nitrogen ions to be irradiated are supplied from an independent ion source, and the irradiation amount etc. can be adjusted over a wide range by controlling the acceleration voltage and ion current.
更に、別のイオン源からイオンアシストを行なうこと、
母材である超硬合金を保持するホルダを回転すること、
窒素イオンを該母材に対して所定の角度を持たせて照射
すること等により複合化合物層における柱状結晶の防止
効果、結晶粒の微細化、結晶物性の向上等を達成するこ
とが可能となる。Furthermore, performing ion assist from another ion source,
Rotating the holder that holds the cemented carbide base material;
By irradiating nitrogen ions at a predetermined angle to the base material, it is possible to prevent columnar crystals in the composite compound layer, refine crystal grains, improve crystal physical properties, etc. .
上記■のイオンミキシング法での電子ビーム蒸着源によ
る真空蒸着においては、トリプルハース方式で電子ビー
ム溶解することによりＴｊ 、Ｚｒ、Ｈｒを目的とする
組成に容易かつ精度よく真空蒸着できるため、前記式（
Ｉ）にて表わされる複合化合物層を再現性よく形成する
ことが可能となる。In vacuum evaporation using an electron beam evaporation source in the ion mixing method described in (2) above, Tj, Zr, and Hr can be easily and accurately vacuum evaporated to the desired composition by electron beam melting using the triple hearth method. (
It becomes possible to form a composite compound layer represented by I) with good reproducibility.
一方、照射する窒素イオンは既述した■の場合と同様で
ある。On the other hand, the nitrogen ions to be irradiated are the same as in the case (2) described above.
［作用］
本発明によれば、周期律表の■ａ、Ｖａ、Ｖｌａ族金属
の炭化物、窒化物、炭窒化物とＮｉ 、 Ｃ。[Function] According to the present invention, carbides, nitrides, and carbonitrides of metals in Groups ■a, Va, and Vla of the periodic table, and Ni and C.
及びＦＢの少なくとも１種以上とからなる超硬合金の表
面にイオンビームミキシング法により式（１）にて表わ
される複合化合物層を被覆することによって、高硬質で
耐酸化性に優れた三元系金属の窒化物からなる複合化合
物層が母材としての超硬合金表面に密着性よく被覆され
、切削・耐摩耗工具等に有用な複合超硬材料を得ること
かできる。By coating the surface of a cemented carbide consisting of at least one or more of FB and FB with a composite compound layer represented by formula (1) using an ion beam mixing method, a ternary system with high hardness and excellent oxidation resistance can be obtained. A composite compound layer made of metal nitride is coated on the surface of the cemented carbide as a base material with good adhesion, and a composite cemented carbide material useful for cutting, wear-resistant tools, etc. can be obtained.
［実施例］ 以下、本発明の実施例を詳細に説明する。[Example] Examples of the present invention will be described in detail below.
実施例］
まず、ｗｃ−ｅ％Ｃｏ超硬合金の母材をイオンビームス
パッタ蒸着機能を備えたイオン注入装置のチャンバ内に
設置した。つついて、チャンバ内のガスを真空排気して
該チャンバ内をｌＸｌ０−’ｔｏｒｒの窒素雰囲気とし
、スパッタイオン源よりＡｒイオンを引き出してＴ ｊ
ｏ、 ６ Ｚ ｒｏ、 ３Ｈｆｏ１組成のターゲットに
照射して前記母材表面に蒸着速度４．０人／ｓｅｅでス
パッタ蒸着しながら、別のイオン源から窒素イオンを該
母材表面に照射するイオンミキシングにより母材表面に
複合化合物層を被覆して複合超硬材料を製造した。なお
、前記Ａｒスパッタにあたっては加速電圧３ ｋ Ｖ
ｓ ビーム電流２Ａの条件で行ない、一方窒素イオンの
照射にあたっては加速電圧１０ｋ Ｖ、ビーム電流密度
０．２５ｍ Ａ ／ ｃｒＡの条件で行なった。Example] First, a base material of wc-e%Co cemented carbide was placed in a chamber of an ion implanter equipped with an ion beam sputter deposition function. Then, the gas in the chamber is evacuated to create a nitrogen atmosphere of lXl0-'torr, and Ar ions are extracted from the sputtering ion source to T j
Ion mixing in which nitrogen ions are irradiated onto the surface of the base material from another ion source while sputter deposition is performed on the base material surface at a deposition rate of 4.0 people/see by irradiating a target with a composition of: A composite cemented carbide material was manufactured by coating the surface of the base material with a composite compound layer. In addition, for the Ar sputtering, an accelerating voltage of 3 kV
The irradiation with nitrogen ions was carried out under the conditions of an acceleration voltage of 10 kV and a beam current density of 0.25 mA/crA.
比較例１
まず、ＷＣ−６％Ｃｏ超硬合金の母材をマグネトロンス
パッタ装置のチャンバ内に設置した。つついて、チャン
バ内のガスを真空排気して該チャンバ内をアルゴンと窒
素の混合雰囲気とし、スパッタ電圧８００■でＴ １ｏ
６Ｚ ｒｏ、 ３Ｈｆｏ、 ＋組成のタゲットを使用し
て前記母材表面にスパッタ蒸着して母材表面に厚さ７μ
ｍの複合化合物層を被覆して複合超硬材料を製造した。Comparative Example 1 First, a base material of WC-6% Co cemented carbide was placed in a chamber of a magnetron sputtering device. Then, the gas in the chamber was evacuated to create a mixed atmosphere of argon and nitrogen, and sputtering was performed at T 1o at a sputtering voltage of 800 cm.
Using a target with a composition of 6Z ro, 3Hfo, +, sputter deposition was performed on the base material surface to a thickness of 7μ.
A composite superhard material was manufactured by coating m composite compound layers.
なお、母材の温度は３００°Ｃとした。Note that the temperature of the base material was 300°C.
しかして、上述した各装置がら取出した本実施例１及び
比較例１の複合超硬材料についてＥ Ｐ Ｍ Ａ （Ｅ
１ｅｃｔｒｏｎ ｐｒｏｂｅ Ｘ −ｒａｙｍｙｃｒ
ｏａｎａｌｙｓｅｒ ）により表面の複合化合物層の組
成を定量分析したところ、実施例１では（Ｔ ｊｏ、
６Ｚ ｒｏ、 ３Ｈｆｏ、 ＋） Ｎ Ｏ，９５、比較
例１では（Ｔ ｉｏ、 ６Ｚ ｒｏ、 ３Ｈｆｏ、 ＋
） Ｎ ｏ、 ｅｒであった。また、各複合超硬材料の
硬さを測定したところ、実施例１ではＨｖ＝３８００Ｋ
ｇ／ｍｍ２、比較例１ではＨｖ＝２８００／（ｇ／ ｍ
ｍ ２であった。更に、本実施例１の複合超硬材料によ
りＨＢ＝２８０のＳＮＣＭＢ鋼をＶ＝１８０ ｍ／ｍｉ
ｎ 、 ｆ ＝０．２５ｍｍ／ｒｅｖ Ｓｔ ＝１．５
ｍｍ（１回の切削時での切込み量）の条件で切削した
時の耐摩耗性を調べたところ、１０分間でＶＢ−０，１
２ｍｍであった。これに対し、比較例１の複合超硬材料
を用いて同様な耐摩耗性を調べたところ、表面の複合化
合物層が剥離して、その耐摩耗効果を発揮することかで
きなかった。Therefore, E P M A (E
1ectron probe X-raymycr
When the composition of the composite compound layer on the surface was quantitatively analyzed using an analyzer (T jo,
6Z ro, 3Hfo, +) N O,95, in Comparative Example 1 (T io, 6Z ro, 3Hfo, +
) No, it was er. In addition, when the hardness of each composite carbide material was measured, in Example 1, Hv = 3800K
g/mm2, Hv=2800/(g/m2 in Comparative Example 1)
It was m2. Furthermore, using the composite carbide material of Example 1, the SNCMB steel with HB=280 was heated to V=180 m/mi.
n, f = 0.25 mm/rev St = 1.5
We investigated the wear resistance when cutting under the conditions of mm (depth of cut in one cutting) and found that VB-0.1 in 10 minutes.
It was 2 mm. On the other hand, when similar wear resistance was investigated using the composite cemented carbide material of Comparative Example 1, the composite compound layer on the surface peeled off and the material could not exhibit its wear resistance effect.
実施例２
ます、ＷＣ−Ｂ％Ｃｏ超硬合金の母材を真空蒸着機能を
有するイオン注入装置のチャンバ内に設置し、真空引き
した後、ＥＢ蒸着法のトリプルハス方式により３個のル
ツボからＴｊを３．３人／ｓｅＣの蒸着速度で、Ｚｒを
２．２人／ｓｅｅの蒸着速度でＨｆを２．１人／ｓｅｃ
の蒸着速度で夫々母材表面に真空蒸着を行ないながら、
イオン源より窒素イオンを引出し該母材表面に照射する
イオンミキシングを行なった。同時に、別のイオン源か
ら窒素イオンを引出しイオンビームアンストを行ない、
母材表面に厚さ７．５μｍの複合化合物層を被覆して複
合超硬材料を製造した。なお、前記窒素イオン照射にあ
たっては加速電圧２０ｋＶ、イオンビム電流密度０．５
ｍＡ／ｃｍの条件で行ない、一方窒素イオンビームアシ
ストにあたっては加速電圧２００Ｖ、ビーム電流密度０
．３ｍＡ／ｃｒｊの条件で行なった。Example 2 First, a base material of WC-B%Co cemented carbide was placed in the chamber of an ion implanter with a vacuum evaporation function, and after being evacuated, it was deposited from three crucibles using the triple hash method of EB evaporation. Tj at a deposition rate of 3.3 people/sec, Zr at a deposition rate of 2.2 people/see, and Hf at 2.1 people/sec.
While performing vacuum deposition on the surface of each base material at a deposition rate of
Ion mixing was performed by extracting nitrogen ions from an ion source and irradiating them onto the surface of the base material. At the same time, nitrogen ions are extracted from another ion source and an ion beam strike is performed.
A composite superhard material was manufactured by coating the surface of the base material with a composite compound layer having a thickness of 7.5 μm. The nitrogen ion irradiation was performed at an acceleration voltage of 20 kV and an ion beam current density of 0.5.
mA/cm, while for nitrogen ion beam assist, the acceleration voltage was 200 V and the beam current density was 0.
．． The test was carried out under the condition of 3 mA/crj.
比較例２
まず、ＷＣ−Ｇ％Ｃｏ超硬合金の母材を市販のＡＲＥイ
オンブレーティング装置のチャンバ内に設置した。つづ
いて、チャンバ内のガスを真空排気し、実施例２と同様
にトリプルハース方式による３個のルツボからＴｉ Ｘ
Ｚｒ、Ｈｆを蒸着させながら窒素雰囲気中でイオンブレ
ーティングを行なって前記母材表面に厚さ７５μｍの複
合化合物層を被覆して複合超硬材料を製造した。Comparative Example 2 First, a base material of WC-G%Co cemented carbide was placed in the chamber of a commercially available ARE ion blating device. Next, the gas in the chamber was evacuated, and Ti
Ion blating was performed in a nitrogen atmosphere while Zr and Hf were being vapor-deposited to coat the surface of the base material with a composite compound layer having a thickness of 75 μm to produce a composite superhard material.
しかして、上述した各装置から取出した本実施例２及び
比較例２の複合超硬材料についてＥＰＭＡにより表面の
複合化合物層の組成を定量分析したところ、実施例２て
は（Ｔ ｊｏ６Ｚ ｒｏ、 ３］ ０
Ｈｆｏ、 ＋） Ｎ Ｏ，９５比較例２ては（Ｔ ｉｏ
、 ６Ｚ ｒｏ、 ３Ｈｆｏ、 ＋） Ｎ Ｏ，９であ
った。また、各複合超硬材料の硬さを測定したところ、
実施例２ではＨｖ−３８５０／（９／ ｍｍ ” 、比
較例２ではＨｖ ＝ ２５００／（ｇ／ ｍｍ ２であ
った。更に、本実施例２の複合超硬材料によりＨＢ＝２
８０のＳＮＣＭＳ鋼をＶ＝１８０ ｍ／ｍｉｎ 。When the composition of the composite compound layer on the surface of the composite carbide materials of Example 2 and Comparative Example 2 taken out from each of the above-mentioned devices was quantitatively analyzed by EPMA, it was found that Example 2 was (T jo6Z ro, 3 ] 0 Hfo, +) N O, 95 Comparative Example 2 (T io
, 6Z ro, 3Hfo, +) NO,9. In addition, when we measured the hardness of each composite carbide material,
In Example 2, Hv = 2500/(g/mm 2), and in Comparative Example 2, Hv = 2500/(g/mm 2).
80 SNCMS steel at V=180 m/min.
ｆ ＝ ０．２５ｍｍ／ ｒｅｖ 、 ｔ ＝ １．５
Ｍの条件で切削した時の耐摩耗性を調べたところ、１
０分間でＶＢ−０，１０Ｍであった。これに対し、比較
例２の複合超硬材料を用いて同様な耐摩耗性を調べたと
ころ、１０分間でＶ Ｂ ＝ ０．２５ｍｍと耐摩耗性
か劣るばかりか、試験後の複合化合物層の一部に剥離が
認められた。f = 0.25mm/rev, t = 1.5
When we investigated the wear resistance when cutting under the conditions of M, we found that 1
It was VB-0.10M in 0 minutes. On the other hand, when similar abrasion resistance was investigated using the composite cemented carbide material of Comparative Example 2, not only was the abrasion resistance inferior with V B = 0.25 mm after 10 minutes, but the composite compound layer after the test Peeling was observed in some parts.
［発明の効果］
以上詳述した如く、本発明によれば高硬質で耐酸化性に
優れた三元系金属の窒化物からなる複合化合物層が母材
としての超硬合金表面に密着性よく被覆された切削・耐
摩耗工具等に有用な複合超硬材料を提供できる。[Effects of the Invention] As detailed above, according to the present invention, a composite compound layer made of a nitride of a ternary metal that is highly hard and has excellent oxidation resistance has good adhesion to the surface of a cemented carbide as a base material. A composite carbide material useful for coated cutting and wear-resistant tools can be provided.
出願人代理人 弁理士 鈴江武彦 ］ １Applicant's agent: Patent attorney: Takehiko Suzue ] 1
Claims (1)
炭窒化物とＮｉ、Ｃｏ及びＦｅの少なくとも１種以上と
からなる超硬合金の表面にイオンビームミキシング法に
より下記式（ I ）にて表わされる複合化合物層を被覆
したことを特徴とする複合超硬材料。 〔（Ｔｉ）＿ｘ（Ｚｒ）＿ｙ（Ｈｆ）＿ｚ〕（Ｎ）＿ｖ
・・・（ I ） 但し、式中のｘ、ｙ、ｚ、ｖはｘ＋ｙ＋ｚ＝１、０．４
≦ｘ≦０．９５、０．０５≦ｙ≦０．５、０．０５≦ｚ
≦０．５、０．８≦ｖ≦１．０を満足するものである。[Claims] Carbides and nitrides of metals from groups IVa, Va, and VIa of the periodic table;
A composite superalloy characterized in that the surface of a cemented carbide comprising carbonitride and at least one of Ni, Co and Fe is coated with a composite compound layer represented by the following formula (I) by an ion beam mixing method. hard material. [(Ti)_x(Zr)_y(Hf)_z](N)_v
...(I) However, x, y, z, v in the formula are x+y+z=1, 0.4
≦x≦0.95, 0.05≦y≦0.5, 0.05≦z
It satisfies ≦0.5, 0.8≦v≦1.0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20000188A JPH0250948A (en) | 1988-08-12 | 1988-08-12 | Conjugated super hard material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20000188A JPH0250948A (en) | 1988-08-12 | 1988-08-12 | Conjugated super hard material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0250948A true JPH0250948A (en) | 1990-02-20 |
| JPH0588307B2 JPH0588307B2 (en) | 1993-12-21 |
Family
ID=16417145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20000188A Granted JPH0250948A (en) | 1988-08-12 | 1988-08-12 | Conjugated super hard material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250948A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5364900A (en) * | 1993-04-08 | 1994-11-15 | Asahi Kasei Kogyo Kabushiki Kaisha | Stabilized acetal resin compositions |
| WO2002090859A1 (en) * | 2001-05-08 | 2002-11-14 | Tinox Gmbh | Heat-exchanging device comprising a surface-coated wall separating medium 1 from medium 2 |
| JPWO2009025112A1 (en) * | 2007-08-22 | 2010-11-18 | 住友電気工業株式会社 | Surface coated cutting tool |
-
1988
- 1988-08-12 JP JP20000188A patent/JPH0250948A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5364900A (en) * | 1993-04-08 | 1994-11-15 | Asahi Kasei Kogyo Kabushiki Kaisha | Stabilized acetal resin compositions |
| WO2002090859A1 (en) * | 2001-05-08 | 2002-11-14 | Tinox Gmbh | Heat-exchanging device comprising a surface-coated wall separating medium 1 from medium 2 |
| JPWO2009025112A1 (en) * | 2007-08-22 | 2010-11-18 | 住友電気工業株式会社 | Surface coated cutting tool |
| JP5662680B2 (en) * | 2007-08-22 | 2015-02-04 | 住友電気工業株式会社 | Surface coated cutting tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0588307B2 (en) | 1993-12-21 |
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