JPH0250577B2 - - Google Patents

Info

Publication number
JPH0250577B2
JPH0250577B2 JP54057395A JP5739579A JPH0250577B2 JP H0250577 B2 JPH0250577 B2 JP H0250577B2 JP 54057395 A JP54057395 A JP 54057395A JP 5739579 A JP5739579 A JP 5739579A JP H0250577 B2 JPH0250577 B2 JP H0250577B2
Authority
JP
Japan
Prior art keywords
cathode
discharge
lab
plasma
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP54057395A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55148337A (en
Inventor
Joshin Uramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP5739579A priority Critical patent/JPS55148337A/ja
Publication of JPS55148337A publication Critical patent/JPS55148337A/ja
Publication of JPH0250577B2 publication Critical patent/JPH0250577B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes

Landscapes

  • Solid Thermionic Cathode (AREA)
JP5739579A 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation Granted JPS55148337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5739579A JPS55148337A (en) 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5739579A JPS55148337A (en) 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation

Publications (2)

Publication Number Publication Date
JPS55148337A JPS55148337A (en) 1980-11-18
JPH0250577B2 true JPH0250577B2 (enrdf_load_html_response) 1990-11-02

Family

ID=13054429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5739579A Granted JPS55148337A (en) 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation

Country Status (1)

Country Link
JP (1) JPS55148337A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002155355A (ja) * 2000-11-17 2002-05-31 Chugai Ro Co Ltd 圧力勾配型プラズマ発生装置の始動方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102320A (ja) * 1986-10-20 1988-05-07 Tokyo Electron Ltd プラズマ生成装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047285B2 (ja) * 1975-10-01 1985-10-21 日本ゼオン株式会社 アクリロニトリル系重合体の製造法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002155355A (ja) * 2000-11-17 2002-05-31 Chugai Ro Co Ltd 圧力勾配型プラズマ発生装置の始動方法

Also Published As

Publication number Publication date
JPS55148337A (en) 1980-11-18

Similar Documents

Publication Publication Date Title
Harrison Investigation of the perveances and beam profiles of an aperture disk emission system
GB969833A (en) Crossed-field electron discharge device
EP0095311B1 (en) Ion source apparatus
JPH0250577B2 (enrdf_load_html_response)
JP3454384B2 (ja) イオンビーム発生装置及び方法
JPH0160889B2 (enrdf_load_html_response)
JPS6318297B2 (enrdf_load_html_response)
US3280365A (en) Penning-type discharge ionization gauge with discharge initiation electron source
JPH0746586B2 (ja) イオン源
US6323586B1 (en) Closed drift hollow cathode
JPH0752635B2 (ja) イオン源装置
JP2586836B2 (ja) イオン源装置
JPH0222500B2 (enrdf_load_html_response)
US2803772A (en) Apparatus for producing a hollow electron beam
JP4114770B2 (ja) 酸素イオン発生用真空処理装置
JPS5911400Y2 (ja) 電界放射型イオン源
JP2002313600A (ja) 圧力勾配型プラズマガン
JPS594428Y2 (ja) イオン源装置先端イオン発生部の真空封止機構
JPH024979B2 (enrdf_load_html_response)
JP2002155355A (ja) 圧力勾配型プラズマ発生装置の始動方法
JPH0554812A (ja) イオン源
SREENIVASAN Parameters Influencing the Energy Spread in a Duoplasmatron Source
MIRTICH Hydrogen hollow cathode ion source[Patent]
US2049139A (en) Electrical discharge relay
GB1059379A (en) Gaseous discharge device