JPH0249723Y2 - - Google Patents
Info
- Publication number
- JPH0249723Y2 JPH0249723Y2 JP8682885U JP8682885U JPH0249723Y2 JP H0249723 Y2 JPH0249723 Y2 JP H0249723Y2 JP 8682885 U JP8682885 U JP 8682885U JP 8682885 U JP8682885 U JP 8682885U JP H0249723 Y2 JPH0249723 Y2 JP H0249723Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- etched
- cassette
- chamber
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 28
- 238000005530 etching Methods 0.000 claims description 24
- 238000001312 dry etching Methods 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 19
- 239000006185 dispersion Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000002597 Solanum melongena Nutrition 0.000 description 1
- 244000061458 Solanum melongena Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8682885U JPH0249723Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8682885U JPH0249723Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-06-11 | 1985-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203541U JPS61203541U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-22 |
| JPH0249723Y2 true JPH0249723Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-27 |
Family
ID=30638485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8682885U Expired JPH0249723Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249723Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1985
- 1985-06-11 JP JP8682885U patent/JPH0249723Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61203541U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-22 |